JPS61177440U - - Google Patents
Info
- Publication number
- JPS61177440U JPS61177440U JP6163185U JP6163185U JPS61177440U JP S61177440 U JPS61177440 U JP S61177440U JP 6163185 U JP6163185 U JP 6163185U JP 6163185 U JP6163185 U JP 6163185U JP S61177440 U JPS61177440 U JP S61177440U
- Authority
- JP
- Japan
- Prior art keywords
- bell gear
- bell
- gear
- reaction gas
- susceptor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000012495 reaction gas Substances 0.000 claims description 4
- 238000001947 vapour-phase growth Methods 0.000 claims description 3
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6163185U JPS61177440U (th) | 1985-04-24 | 1985-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6163185U JPS61177440U (th) | 1985-04-24 | 1985-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61177440U true JPS61177440U (th) | 1986-11-05 |
Family
ID=30590081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6163185U Pending JPS61177440U (th) | 1985-04-24 | 1985-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61177440U (th) |
-
1985
- 1985-04-24 JP JP6163185U patent/JPS61177440U/ja active Pending