JPH0226228U - - Google Patents
Info
- Publication number
- JPH0226228U JPH0226228U JP10503488U JP10503488U JPH0226228U JP H0226228 U JPH0226228 U JP H0226228U JP 10503488 U JP10503488 U JP 10503488U JP 10503488 U JP10503488 U JP 10503488U JP H0226228 U JPH0226228 U JP H0226228U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- pressurizing
- reaction tube
- infrared
- treatment apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10503488U JPH0226228U (th) | 1988-08-09 | 1988-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10503488U JPH0226228U (th) | 1988-08-09 | 1988-08-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0226228U true JPH0226228U (th) | 1990-02-21 |
Family
ID=31337290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10503488U Pending JPH0226228U (th) | 1988-08-09 | 1988-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0226228U (th) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63206161A (ja) * | 1987-02-20 | 1988-08-25 | Aloka Co Ltd | 放射線検出器用高圧スイツチング電源 |
-
1988
- 1988-08-09 JP JP10503488U patent/JPH0226228U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63206161A (ja) * | 1987-02-20 | 1988-08-25 | Aloka Co Ltd | 放射線検出器用高圧スイツチング電源 |