JPH0272545U - - Google Patents
Info
- Publication number
- JPH0272545U JPH0272545U JP15270288U JP15270288U JPH0272545U JP H0272545 U JPH0272545 U JP H0272545U JP 15270288 U JP15270288 U JP 15270288U JP 15270288 U JP15270288 U JP 15270288U JP H0272545 U JPH0272545 U JP H0272545U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- heater plate
- transfer arm
- airtight chamber
- contacting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15270288U JPH0272545U (th) | 1988-11-22 | 1988-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15270288U JPH0272545U (th) | 1988-11-22 | 1988-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0272545U true JPH0272545U (th) | 1990-06-01 |
Family
ID=31427869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15270288U Pending JPH0272545U (th) | 1988-11-22 | 1988-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0272545U (th) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003010800A1 (fr) * | 2001-07-25 | 2003-02-06 | Tokyo Electron Limited | Appareil et procede de traitement |
| JP2013104074A (ja) * | 2011-11-11 | 2013-05-30 | Sumitomo Electric Sintered Alloy Ltd | 粉末成形体のチャッキング装置 |
-
1988
- 1988-11-22 JP JP15270288U patent/JPH0272545U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003010800A1 (fr) * | 2001-07-25 | 2003-02-06 | Tokyo Electron Limited | Appareil et procede de traitement |
| JP2013104074A (ja) * | 2011-11-11 | 2013-05-30 | Sumitomo Electric Sintered Alloy Ltd | 粉末成形体のチャッキング装置 |