JPS61176763U - - Google Patents
Info
- Publication number
- JPS61176763U JPS61176763U JP6025285U JP6025285U JPS61176763U JP S61176763 U JPS61176763 U JP S61176763U JP 6025285 U JP6025285 U JP 6025285U JP 6025285 U JP6025285 U JP 6025285U JP S61176763 U JPS61176763 U JP S61176763U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- sample stand
- high voltage
- sample
- ion gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000000992 sputter etching Methods 0.000 claims 2
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 description 1
- 244000144985 peep Species 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6025285U JPS61176763U (OSRAM) | 1985-04-24 | 1985-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6025285U JPS61176763U (OSRAM) | 1985-04-24 | 1985-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61176763U true JPS61176763U (OSRAM) | 1986-11-04 |
Family
ID=30587425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6025285U Pending JPS61176763U (OSRAM) | 1985-04-24 | 1985-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61176763U (OSRAM) |
-
1985
- 1985-04-24 JP JP6025285U patent/JPS61176763U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB1420061A (en) | Sputtering method and apparatus | |
| DK304386A (da) | Fremgangsmaade og apparat til udfaeldning | |
| JPS61176763U (OSRAM) | ||
| JP2637948B2 (ja) | ビームプラズマ型イオン銃 | |
| ATE140560T1 (de) | Ionenpumpe und vakuumpumpanlage dafür | |
| JPS6311560U (OSRAM) | ||
| JPS61113763A (ja) | 電子衝撃型蒸着装置 | |
| JPS641221A (en) | Manufacture of polarizable electrode | |
| JPS6251736U (OSRAM) | ||
| JPH024979B2 (OSRAM) | ||
| JP2637947B2 (ja) | ビームプラズマ型イオン銃 | |
| JPS6231857U (OSRAM) | ||
| JPS62157968U (OSRAM) | ||
| JPH01279751A (ja) | 薄膜形成装置 | |
| JPS61187373U (OSRAM) | ||
| JPS60178961U (ja) | 断熱空間の真空の性能を維持する電離法 | |
| JPS6130069U (ja) | 被膜形成装置 | |
| JPS63124342A (ja) | イオン銃 | |
| JPS6258900U (OSRAM) | ||
| JPS62193659U (OSRAM) | ||
| JPS61176764U (OSRAM) | ||
| JPS61199860U (OSRAM) | ||
| JPS6251648U (OSRAM) | ||
| JPS62191100U (OSRAM) | ||
| JPS6247781U (OSRAM) |