JPS61174777A - 半導体放射線検出器の製造方法 - Google Patents
半導体放射線検出器の製造方法Info
- Publication number
- JPS61174777A JPS61174777A JP60015682A JP1568285A JPS61174777A JP S61174777 A JPS61174777 A JP S61174777A JP 60015682 A JP60015682 A JP 60015682A JP 1568285 A JP1568285 A JP 1568285A JP S61174777 A JPS61174777 A JP S61174777A
- Authority
- JP
- Japan
- Prior art keywords
- film
- boron
- substrate
- semiconductor substrate
- radiation detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T3/00—Measuring neutron radiation
- G01T3/08—Measuring neutron radiation with semiconductor detectors
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Radiation (AREA)
- Light Receiving Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60015682A JPS61174777A (ja) | 1985-01-30 | 1985-01-30 | 半導体放射線検出器の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60015682A JPS61174777A (ja) | 1985-01-30 | 1985-01-30 | 半導体放射線検出器の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61174777A true JPS61174777A (ja) | 1986-08-06 |
| JPH0476515B2 JPH0476515B2 (enrdf_load_stackoverflow) | 1992-12-03 |
Family
ID=11895519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60015682A Granted JPS61174777A (ja) | 1985-01-30 | 1985-01-30 | 半導体放射線検出器の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61174777A (enrdf_load_stackoverflow) |
-
1985
- 1985-01-30 JP JP60015682A patent/JPS61174777A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0476515B2 (enrdf_load_stackoverflow) | 1992-12-03 |
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