JPS6117412Y2 - - Google Patents
Info
- Publication number
- JPS6117412Y2 JPS6117412Y2 JP11181580U JP11181580U JPS6117412Y2 JP S6117412 Y2 JPS6117412 Y2 JP S6117412Y2 JP 11181580 U JP11181580 U JP 11181580U JP 11181580 U JP11181580 U JP 11181580U JP S6117412 Y2 JPS6117412 Y2 JP S6117412Y2
- Authority
- JP
- Japan
- Prior art keywords
- humidity
- heater
- sensor
- humidity sensor
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910044991 metal oxide Inorganic materials 0.000 claims description 5
- 150000004706 metal oxides Chemical class 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000002336 sorption--desorption measurement Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11181580U JPS6117412Y2 (ko) | 1980-08-08 | 1980-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11181580U JPS6117412Y2 (ko) | 1980-08-08 | 1980-08-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5735654U JPS5735654U (ko) | 1982-02-25 |
| JPS6117412Y2 true JPS6117412Y2 (ko) | 1986-05-28 |
Family
ID=29472908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11181580U Expired JPS6117412Y2 (ko) | 1980-08-08 | 1980-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6117412Y2 (ko) |
-
1980
- 1980-08-08 JP JP11181580U patent/JPS6117412Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5735654U (ko) | 1982-02-25 |
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