JPS6117412Y2 - - Google Patents
Info
- Publication number
- JPS6117412Y2 JPS6117412Y2 JP11181580U JP11181580U JPS6117412Y2 JP S6117412 Y2 JPS6117412 Y2 JP S6117412Y2 JP 11181580 U JP11181580 U JP 11181580U JP 11181580 U JP11181580 U JP 11181580U JP S6117412 Y2 JPS6117412 Y2 JP S6117412Y2
- Authority
- JP
- Japan
- Prior art keywords
- humidity
- heater
- sensor
- humidity sensor
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910044991 metal oxide Inorganic materials 0.000 claims description 5
- 150000004706 metal oxides Chemical class 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000002336 sorption--desorption measurement Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
【考案の詳細な説明】
空調機器の開発は、環境改善への要求もさるこ
とながら、省エネルギー、省資源、さらには品質
管理等、多岐にわたる観点より大きな問題となつ
てきている。[Detailed description of the invention] The development of air conditioning equipment has become a major issue from a wide variety of viewpoints, including not only the demand for environmental improvement, but also energy saving, resource saving, and quality control.
ところが、従来、湿度を精度よく検出し、しか
も耐久性に優れた湿度測定装置がないため、その
開発が遅れていた。 However, the development of such a device has been delayed due to the lack of a humidity measuring device that can accurately detect humidity and has excellent durability.
湿度検出法の一つとして、金属酸化物半導体を
利用し、その湿度による抵抗値変化を応用して湿
度検出を行なう方法が公知であるが、多くの検討
を経ているにも拘らず、未だ信頼性ある湿度検出
方法として確立されていない。 One known humidity detection method is to use a metal oxide semiconductor and apply the change in resistance due to humidity. However, despite much research, it is still not reliable. It has not been established as a reliable humidity detection method.
本発明者等は鋭意・検討の結果ヒーターとフア
ンを併用することによつて、信頼性ある湿度測定
装置の実用化に成功したものである。 As a result of intensive study, the inventors of the present invention succeeded in putting a reliable humidity measuring device into practical use by using a heater and a fan in combination.
金属酸化物半導体は、表面における水分子の吸
脱着現象によつて抵抗値に変化を来すが、その吸
着現象は経時変化を伴う。即ち、抵抗値は一般に
相対湿度と経時時間によつて変化し、同一湿度条
件においても時間と共に高抵抗側にドリフトす
る。 The resistance value of metal oxide semiconductors changes due to the adsorption/desorption phenomenon of water molecules on the surface, and the adsorption phenomenon is accompanied by changes over time. That is, the resistance value generally changes depending on the relative humidity and the elapsed time, and even under the same humidity conditions, the resistance value drifts toward a higher resistance side with time.
この現象は、表面における吸着構造の変化や、
金属酸化物のバンド構造の変化として考えられ
る。従つて信頼性ある湿度の検出を行うために
は、表面における水分子の吸着状態を一定に保つ
必要がある。 This phenomenon is caused by changes in the adsorption structure on the surface,
This is thought to be a change in the band structure of the metal oxide. Therefore, in order to perform reliable humidity detection, it is necessary to maintain a constant adsorption state of water molecules on the surface.
またドリフト現象は、相対湿度の増加と共に大
きくなり、高湿度領域では連続測定可能時間は10
分以内となるため、湿度に応じた対応が必要とな
る。 In addition, the drift phenomenon increases as the relative humidity increases, and in high humidity regions, continuous measurement time is limited to 10
Since it takes less than a minute, it is necessary to take measures according to the humidity.
素子表面を一定にするためには、従来より行な
われているヒーターによる表面吸着水分の脱離方
法が適切であり、その後の吸着平衡状態における
湿度検出が考えられる。 In order to keep the element surface constant, a conventional method of desorbing surface adsorbed moisture using a heater is appropriate, and subsequent humidity detection in an adsorption equilibrium state can be considered.
しかし、この場合、素子自体も加熱されてしま
うので、素子温度が測定条件と同等に復帰するま
でに時間が必要となる。 However, in this case, since the element itself is also heated, it takes time for the element temperature to return to the same level as the measurement conditions.
特に、室内のように、空気の流れがない場合、
数分の時間が必要となつてしまい、その間湿度検
出が出来なくなる。 Especially when there is no airflow, such as indoors.
It takes several minutes, and humidity cannot be detected during that time.
エアコンや冷蔵庫等の静置した室内における湿
度検出は、今後益々要求されるようになると予測
されるが、湿度制御のためには3分以内における
湿度検出が要求されている。 It is predicted that humidity detection in a stationary room such as an air conditioner or a refrigerator will become increasingly required in the future, and humidity detection within 3 minutes is required for humidity control.
本考案はこのような状況に鑑みなされたもの
で、素子の加熱リフレツシユ用ヒータと、冷却用
フアンを併設して、素子を加熱して水分を離脱さ
せた後、速かに測定条件と同等に復帰させるよう
に工夫したもので、素子の復帰時間を2分以内に
短縮することを可能とし、一定時間の間隔におい
て、精度の高い湿度検出を可能としたものであ
る。 The present invention was developed in view of this situation, and it is equipped with a heater for heating and refreshing the element and a cooling fan, and after heating the element and removing moisture, it can be quickly brought to the same level as the measurement conditions. This device has been devised to allow the device to return to its original state, making it possible to shorten the return time of the element to within two minutes, and making it possible to detect humidity with high precision at fixed time intervals.
以下、本考案の実施例について図面に基づき説
明すれば次の通りである。 Hereinafter, embodiments of the present invention will be described based on the drawings.
第1図は本案実施例のブロツク図で示すもの
で、1は金属酸化物半導体から成る湿度センサー
である。湿度センサ1には発振器2によつて交流
電圧が与えられ、湿度に比例する検出電圧は増巾
器3により増巾され、湿度補償回路4、線形変換
回路5、A−D変換回路6を通して湿度に比例し
たデイジタル信号に変換され、デイジタル表示装
置7を駆動して湿度をデイジタル表示する。8は
湿度センサ1と並べて設けた湿度補償用サーミス
タである。 FIG. 1 shows a block diagram of an embodiment of the present invention, in which 1 is a humidity sensor made of a metal oxide semiconductor. An alternating current voltage is applied to the humidity sensor 1 by an oscillator 2, and the detected voltage proportional to humidity is amplified by an amplifier 3, and the humidity is outputted through a humidity compensation circuit 4, a linear conversion circuit 5, and an A-D conversion circuit 6. The humidity is converted into a digital signal proportional to the humidity, and the digital display device 7 is driven to digitally display the humidity. 8 is a humidity compensation thermistor provided in parallel with the humidity sensor 1.
9は湿度センサ1と並設したヒータでリフレツ
シユ・スイツチ10を投入すると、ヒータ制御回
路11によつて制御されるスイツチ12がオンと
なつてヒータ電源回路が閉成し、湿度センサ1を
加熱してリフレツシユする。なお13は交流電源
である。 Reference numeral 9 denotes a heater installed in parallel with the humidity sensor 1. When the refresh switch 10 is turned on, the switch 12 controlled by the heater control circuit 11 is turned on, the heater power supply circuit is closed, and the humidity sensor 1 is heated. and refresh. Note that 13 is an AC power source.
設定温度、例えば150゜に湿度センサ1の周囲
温度が達すると、比較器14がそれを検知してヒ
ータ制御回路11とフアンモータ制御回路15を
動作させて前記ヒータ電源回路を開路すると共
に、フアン16を一定時間駆動し、湿度センサ1
の周囲温度を測定温度まで下げる。 When the ambient temperature of the humidity sensor 1 reaches the set temperature, for example 150°, the comparator 14 detects this and operates the heater control circuit 11 and fan motor control circuit 15 to open the heater power supply circuit and turn off the fan. 16 for a certain period of time, humidity sensor 1
Reduce the ambient temperature to the measurement temperature.
即ち、スイツチ10を投入すると湿度センサ1
はリフレツシユされる。 That is, when the switch 10 is turned on, the humidity sensor 1
is refreshed.
以上のように本装置によれば湿度センサ1を常
に最適状態に保持することが出来るので、精度の
高い湿度測定をどの場所でも行うことが出来、そ
の実用価値は極めて高いものである。 As described above, according to this device, the humidity sensor 1 can be maintained in an optimal state at all times, so highly accurate humidity measurement can be performed at any location, and its practical value is extremely high.
第1図は本案実施例のブロツク図である。
1……湿度センサ、2……発振器、3……増巾
器、4……温度補償回路、5……線形変換回路、
6……A−D変換回路、7……デイジタル表示装
置、8……温度補償用サーミスタ、9……ヒー
タ、10……リフレツシユ・スイツチ、11……
ヒータ制御回路、12……スイツチ、13……交
流電源、14……比較器、15……フアンモータ
制御回路、16……フアン。
FIG. 1 is a block diagram of an embodiment of the present invention. 1... Humidity sensor, 2... Oscillator, 3... Amplifier, 4... Temperature compensation circuit, 5... Linear conversion circuit,
6...A-D conversion circuit, 7...Digital display device, 8...Temperature compensation thermistor, 9...Heater, 10...Refresh switch, 11...
Heater control circuit, 12... switch, 13... AC power supply, 14... comparator, 15... fan motor control circuit, 16... fan.
Claims (1)
において、前記センサ加熱リフレツシユ用ヒータ
と冷却用フアンとを並設したことを特徴とする湿
度測定装置。 A humidity measuring device using a metal oxide semiconductor as a sensor, characterized in that the sensor heating and refreshing heater and the cooling fan are arranged in parallel.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11181580U JPS6117412Y2 (en) | 1980-08-08 | 1980-08-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11181580U JPS6117412Y2 (en) | 1980-08-08 | 1980-08-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5735654U JPS5735654U (en) | 1982-02-25 |
JPS6117412Y2 true JPS6117412Y2 (en) | 1986-05-28 |
Family
ID=29472908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11181580U Expired JPS6117412Y2 (en) | 1980-08-08 | 1980-08-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6117412Y2 (en) |
-
1980
- 1980-08-08 JP JP11181580U patent/JPS6117412Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5735654U (en) | 1982-02-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4911357A (en) | Humidity controller utilizing absolute humidity | |
CA2166956A1 (en) | Thermal Conductivity Measuring Device | |
US5165793A (en) | Dew point measuring method and apparatus | |
JPS6117412Y2 (en) | ||
JP2893086B2 (en) | Control method of atmosphere in culture chamber in incubator | |
TW201547315A (en) | Glass display cabinet defogging control device | |
JPH0835887A (en) | Houman body sensor | |
JP2885661B2 (en) | microwave | |
JPH0339717Y2 (en) | ||
JPS637053U (en) | ||
JPS62170559U (en) | ||
JPH0694658A (en) | Low-temperature high-humidity detector and low-temperature high-humidity controller | |
JPH01152317A (en) | Load detector | |
JPH11148696A (en) | Temperature and humidity controller of environment testing device | |
JP2000329722A (en) | Apparatus and method for detection of carbon dioxide | |
JPS6068411A (en) | Program temperature controller for thermal analysis | |
JPS6154238U (en) | ||
SU1061027A1 (en) | Condensation-type hygrometer | |
JPH0712769A (en) | Hygrometer | |
SU115578A1 (en) | Condensation hygrometer | |
JPS56648A (en) | Humidity measuring method | |
JPS6396452U (en) | ||
JPS61201919U (en) | ||
JPS6321544A (en) | Detection of dew formation | |
SU1179193A1 (en) | Method of determining gas concentration |