JPS6117302B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device for easily and automatically measuring the surge resistance of semiconductor components.

Conventionally, the selection of good and defective semiconductor parts was done by
A method has been used in which an observer uses an oscilloscope or the like to compare the standard voltage-current waveform of a standard product with the voltage-current waveform of an individual component, but this method can lead to errors in the observer's selection judgment, Or, it is accompanied by drawbacks such as the difficulty of speeding up the pass/fail judgment.
For this reason, the following prior art has been reported as a countermeasure for improving the above-mentioned drawbacks. To describe this in detail below, the output current value of the object to be measured is compared with several predetermined reference current values, and the output voltage value when the two become equal is measured and memorized. 2
An automatic waveform discrimination device (Special Publication No. 51-5912) that compares the difference between the output voltage values of points with a preset tolerance value and displays the results, or multiple test samples.
A characteristic testing circuit that enables the forward and reverse voltage-current characteristics of test diodes to be switched and measured at any time using a common measuring instrument (Utility Model 51-
98972), or by applying an αv/αt signal indicating the time rate of voltage change to the input terminal of the semiconductor device under test, and when the output terminal current value or voltage value of the DUT reaches a reference value, a predetermined judgment signal is generated. and αv/αt
A semiconductor characteristic measuring device (Utility Model Publication No. 51-17007) characterized by comparing power supply signals, and a standard sample of an integrated circuit having a plurality of terminals and a sample to be measured are placed in an operating state using an appropriate operating circuit. An integrated circuit defect detection device (1973), which compares the output voltage difference of each output terminal between the two with a predetermined reference voltage value, and causes the pointer of the indicator to swing when an abnormality occurs in the voltage value. −22603) or IC, Trs
and other devices for automatically testing electronic devices such as semiconductors, and in particular regarding improved testing jigs for such devices.
51-23153) and others have been published.

However, although the above-mentioned device is an effective means for thorough quality control of manufactured semiconductor components and for grading the initial characteristics of products,
In actual markets where reliability, which differs from initial characteristics, is an issue, there are many cases in which a large number of products that are determined to be good by the above-mentioned device fail. According to the inventor's research on this matter, the biggest cause of this is an external surge, which is an unnecessary abnormal signal from the outside, and the above-mentioned conventional device can guarantee the reliability of parts against surges. It cannot be. For example, if the voltage-current characteristics of the initial characteristics have a poor rise and the operating resistance is excessive, there is a strange tendency for the surge resistance to be poor. Therefore, tests for estimating the lifespan of parts against external surges, that is, reliability tests, have to rely on experimental data such as individual or destructive tests, and the only non-destructive way to predict surge lifespans is to improve the reliability of parts. It should have been said that it still does not exist, even though there is a need for it.

Therefore, the present applicant has developed a new automatic surge withstand capacity measuring device (patent application filed in 1983) that improves the shortcomings of the above-mentioned conventional technology and automatically measures the surge withstand capacity in a non-destructive manner, which is a guideline for improving the reliability of semiconductor components. -2805 (Special Publication No. 57-49871)) was filed first.

Below, the above-mentioned automatic surge resistance measuring device is used as the first
This will be explained with reference to FIGS. 3 and 4.

In the figure, 1 is an array section, 2 is a terminal pair switching section, 3 is a current setting section, 4 is a voltage/current measurement section, 5 is a voltage comparison section, 6 is an analog-digital conversion section, 7 is a storage section, and 8 is a calculation section. 9 is a printing section, and 10 is a control section.

Next, its operation will be explained. A signal from a control section 10 using a microcomputer is applied to a terminal pair switching section 2 that mechanically switches terminal pairs of an object to be measured (hereinafter simply referred to as an object to be measured), which is a semiconductor component, sequentially. The terminals are connected to the array section 2 and set in pairs of terminals to be measured in the arrangement section 1, which are arranged in a rectangular manner with predetermined numbers. At the same time, a signal from the control section 10 is given to a current setting section 3 having a DC step pulse generator, and a first current value I ₀ , a second current value I 1 and a third current value set in advance to the first terminal pair are given to the current setting section ₃ having a DC step pulse generator. A current value I ₂ of is sequentially applied. Note that the set current value is an average value for the entire lot to which the element belongs, and is determined in advance.

Next, the first current value I ₀ flowing through the object to be measured, the first voltage value V ₀ appearing across the object to be measured, the second current value I ₁ and the second current value V ₁ , and the third current value value I ₂ and 3rd
The voltage value V ₂ is measured by a measuring section 4 equipped with a DC ammeter and a DC voltmeter connected in series and parallel to the object to be measured. The output voltage terminal of the measuring section 4 is connected to a voltage comparing section 5 which generates a predetermined reference voltage value, and it is determined whether the terminal pair of the array section 1 is the final terminal pair.

When the output voltage value of the measuring section 4 is equal to or higher than the reference voltage value, that is, when it is not the final terminal pair, the output voltage value and output current value are converted into digital values by the individually provided analog-digital conversion section 6 and stored in the storage section 7. is stored once. At the same time, the output of the analog-to-digital converter 6 is input to the arithmetic unit 8, and the voltage limit index α and surge withstand capacity N shown in the following equations (1) and (2) are calculated.

α=log(I ₁ /I ₂ )/log(V ₁ /V ₂ )...
(1) N=α・(K ₁ +K ₂・α・logV ₀ ) ^-1 ...(2) However, K ₁ and K ₂ are constants determined experimentally for a specific lot.

The arithmetic unit 8 uses a normal microcomputer, and the output of the arithmetic unit 8 is inputted again to the storage unit 7 and stored in the storage unit 7.
Terminal pair number The first set current value I ₀ and the corresponding first measured voltage value V ₀ , the second set current value I ₁ and the second
The measured voltage value V ₁ and the third set current value I ₂ and the third
The printing unit 9 outputs the measured voltage value V ₂ in correspondence with the measured voltage value V 2 . The above sequence of operations is repeated via the control unit 10 according to a predetermined program until the final terminal pair is reached.

When the terminal pair is the final terminal pair, that is, when the output voltage value of the measuring section 4 is below the reference voltage, the output signal of the voltage comparing section 5 is input to the control section 10, and at the same time, the signal from the control section 10 is input to the control section 10. is the calculation section 8
The content stored in the storage unit 7 is read out, and the first measured voltage value V ₀ and the second measured voltage value are read out.
After calculating the average value and standard deviation σ of V ₁ , the third measured voltage value V ₂ , the voltage restriction index α, and the surge withstand capacity N, the printing unit 9 prints.

FIG. 3 is an explanatory diagram showing the reverse voltage-current characteristics of a semiconductor element.

In the figure, I ₀ and V ₀ are the above-mentioned first set current value and measured voltage value belonging to the early breakdown region, or I ₁ and V ₁ and
I ₂ and V ₂ represent the second set current value and measured voltage value and the third set current value and measured voltage value, respectively, which belong to the breakdown region.

FIG. 4 is an explanatory diagram showing the relationship between reverse voltage and voltage limit index, and shows a triangular wave (rising 8μ
sec, fall 20 μsec, peak value ₄₀₀₀ A) and apply a standard shock wave to obtain a surge withstand capacity N=1.

The above-mentioned automatic surge resistance measurement device uses surge absorbing semiconductor components, such as metal oxide pallisters, to protect various electronic devices from external surges.
It becomes possible to non-destructively and quantitatively evaluate the surge resistance of Zener diodes, etc., and predict the occurrence of failures in the market that could not be predicted using conventional waveform sorting technology, thereby improving component quality. In addition, it is easy to evaluate many parts at the same time by simply increasing the number of terminal pairs of the object to be measured.
This greatly contributes to not only improving the quality of electronic components but also improving their reliability over their lifetime.

The present invention relates to an improvement of the above-mentioned automatic surge withstand capacity measuring device, which is capable of accurately measuring the individual surge withstand capacity of a large number of objects to be measured, and is equipped with a terminal switching mechanism having a simple structure. The goal is to provide equipment.

The present invention provides a first terminal switching section in which one end of a pair of terminals of the objects to be measured arranged in a rectangular array is commonly connected for each row and connected to a terminal corresponding to each row; a second terminal switching section in which the other end of the terminal pair is commonly connected for each column and connected to a terminal corresponding to each column, the first terminal switching section and the second terminal switching section;
The terminal switching sections are linked so that when either the first terminal switching section or the second terminal switching section switches for one cycle, the other terminal of the first terminal switching section or the second terminal switching section switches for one step. The present invention is characterized by comprising a drive section that is driven to switch. By driving the first terminal switching section and the second terminal switching section via this driving section, it is possible to select terminal pairs of a large number of objects to be measured in a fixed order.

Hereinafter, one embodiment of the automatic surge resistance measuring device of the present invention will be described with reference to FIG. 2.

In the figure, the same reference numerals as in FIG. 1 indicate the same parts. In the array section 1, a large number of objects to be measured 11 are arranged in a rectangular array in n rows and n columns. In addition, in the above-mentioned large number of objects to be measured 11, the reference numerals (n rows and n columns) are also added for convenience. This large number of objects to be measured 1 arranged in a rectangular arrangement
One end of the terminal pair of 1 is connected to the connecting wires 12-1, 12-2,
......12-n is used to connect each row in common, and the other end of the terminal pair is connected to the connecting wires 13-1, 13-2,
. . . 13-n connects each column in common. 14 is n terminals 16-1, 16-2,...
......16-n, the above-mentioned connection wires 12-1, 12-2, ......12-
n to terminals 16-1, 16-2, . . . corresponding to each row.
...Connect to 16-n. 15 is the same n terminals 17-1, 17-2, ......17-n
In the second terminal switching section having the above-mentioned connection line 13-
1, 13-2, 13-n are connected to terminals 17-1, 17-2, 17-n corresponding to each column.
Connect to n. 19 is a second drive motor linked to the control section 10 and the second terminal switching section 15;
The drive motor is driven by a signal from the control section 10 to connect the terminals 17-1 and 17- of the second terminal switching section 15.
2.....Switch 17-n by one step.
18 is a first drive motor linked to the control section 10 and the first terminal switching section 14;
The two-terminal switching unit 15 rotates once and the terminals 17-1, 1
7-2, . . . 17-n is driven by a clock pulse from the control section 10 that is generated when switching one cycle, and the terminal 16- of the first terminal switching section 14 is switched.
1, 16-2, 16-3 are switched in one step.

Next, its operation will be explained. Control unit 10
The second drive motor 19 is driven by the signal, and the second terminal switching section 15 operates accordingly to switch terminal 1
7-1, 17-2, . . . 17-n are switched by one step, and the second terminal switching section 15 rotates once, and the terminals 17-1, 17-2, . . . 17-n are switched by one step.
When n is switched by one cycle, a clock pulse is generated, which operates the first terminal switching section 14 and switches the terminals 16-1, 16-2, . . . 16-n by one step. Thereafter, the above-mentioned operation is repeated, and the terminal 16-1 of the first terminal switching section 14,
By switching 16-2, ......16-n for one cycle, the terminal pairs of many devices under test 11 are changed to 1-1, 2-1, ......n-1, 1-.
2, 2-2, ……………n-2, ……………1-
They are selected in a certain order: n, 2-n, . . . nn.

As described below, the automatic surge resistance measurement device of the present invention has a first terminal in which one end of a pair of terminals of the objects to be measured arranged in a rectangular array is connected in common for each row, and this is connected to a terminal corresponding to each row. a switching section, a second terminal switching section in which the other ends of the terminal pairs of the objects to be measured arranged in a rectangular array are connected in common for each column and connected to terminals corresponding to each column; and the first terminal switching section. and the second terminal switching section, and when the terminal of either the first terminal switching section or the second terminal switching section is switched for one cycle, the other terminal of the first terminal switching section or the second terminal switching section is switched. Since the device is equipped with a drive unit that drives the terminals to switch in one step, by driving the first terminal switching unit and the second terminal switching unit via the drive unit, the terminals of a large number of objects to be measured can be switched. The pairs can be selected according to a fixed order. Therefore, it is possible to accurately measure the individual surge resistance of a large number of objects to be measured. Furthermore, the terminal switching means is simple in structure because it consists of the first terminal switching section, the second terminal switching section, and the driving section.

[Brief explanation of the drawing]

Fig. 1 is a block diagram showing an example of the automatic surge withstand capacity measuring device of the prior application, Fig. 2 is an explanatory diagram showing an embodiment of the automatic surge withstand capacity measuring device of the present invention, and Fig. 3 is a reverse voltage of a semiconductor element. FIG. 4 is an explanatory diagram showing the current characteristics, and FIG. 4 is an explanatory diagram showing the relationship between the reverse voltage and the voltage restriction index. 1...Measurement object arrangement section, 2...Terminal switching section,
3...Current setting section, 4...Voltage and current measuring section, 5...
... Voltage comparison section, 6 ... Analog-digital conversion section, 7 ... Storage section, 8 ... Calculation section, 9 ... Printing section, 10 ... Control section, 11 ... DUT (semiconductor component), 12- 1, 12-2, ……………12-
n, 13-1, 13-2, 13-n...
... Connection wire, 14 ... First terminal switching section, 15 ... Second terminal switching section, 16-1, 16-2, ......
16-n, 17-1, 17-2, ……………17
-n... Connection terminal, 18... First drive motor,
19...Second drive motor. 〓〓〓〓〓

Claims (1)

[Scope of Claims] 1. Arranging means for arranging a plurality of semiconductor components having connection terminal pairs in a rectangular manner by assigning a predetermined terminal pair number to each terminal pair, and these terminal pairs. a first current value I ₀ belonging to the early breakdown region of the semiconductor component, a second current value I ₁ belonging to the breakdown region equal to or higher than the first current value, and current setting means for setting _{a third current value I 2 different from} the second current value I ₁ via a current supply source; a measuring means for measuring a second voltage value V ₁ for a set current value I ₁ and a third voltage value V ₂ for a third set current value I ₂ ; a comparison means for comparing the measured _voltage values and indicating _the final terminal pair of _the array; An automatic surge withstand capacity measuring device comprising a calculation means for calculating a voltage restriction index α and a surge withstand capacity N according to the following calculation formula from a set current value I ₂ and a third measured voltage value V ₂ , wherein the terminal switching unit consists of a first terminal switching section in which one end of a terminal pair of semiconductor components arranged in a rectangular array is commonly connected for each row and connected to a terminal corresponding to each row; a second terminal switching section whose ends are commonly wired for each column and connected to terminals corresponding to each column; and a first terminal switching section linked to the first terminal switching section and the second terminal switching section. Alternatively, the drive unit is provided with a drive unit that drives the other terminal of either the first terminal switching unit or the second terminal switching unit to switch by one step when either one of the terminals of the second terminal switching unit switches for one cycle. An automatic surge resistance measuring device characterized by: α=log(I ₁ /I ₂ )/log(V ₁ /V ₂ ) N=α・(K ₁ +K ₂・α・logV ₀ ) ^-1 (K ₁ and K ₂ are constants)