JPS61172169U - - Google Patents
Info
- Publication number
- JPS61172169U JPS61172169U JP5587185U JP5587185U JPS61172169U JP S61172169 U JPS61172169 U JP S61172169U JP 5587185 U JP5587185 U JP 5587185U JP 5587185 U JP5587185 U JP 5587185U JP S61172169 U JPS61172169 U JP S61172169U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- vapor phase
- ejection ports
- phase growth
- nozzle device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000012071 phase Substances 0.000 claims 1
- 239000000376 reactant Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5587185U JPH0345955Y2 (https=) | 1985-04-15 | 1985-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5587185U JPH0345955Y2 (https=) | 1985-04-15 | 1985-04-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61172169U true JPS61172169U (https=) | 1986-10-25 |
| JPH0345955Y2 JPH0345955Y2 (https=) | 1991-09-27 |
Family
ID=30578952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5587185U Expired JPH0345955Y2 (https=) | 1985-04-15 | 1985-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0345955Y2 (https=) |
-
1985
- 1985-04-15 JP JP5587185U patent/JPH0345955Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0345955Y2 (https=) | 1991-09-27 |