JPS61171482U - - Google Patents

Info

Publication number
JPS61171482U
JPS61171482U JP5320985U JP5320985U JPS61171482U JP S61171482 U JPS61171482 U JP S61171482U JP 5320985 U JP5320985 U JP 5320985U JP 5320985 U JP5320985 U JP 5320985U JP S61171482 U JPS61171482 U JP S61171482U
Authority
JP
Japan
Prior art keywords
target object
attached
drive device
arm
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5320985U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5320985U priority Critical patent/JPS61171482U/ja
Publication of JPS61171482U publication Critical patent/JPS61171482U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Linear Motors (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例の構成を示す断面
図、第２図はこの考案の他の実施例における被駆
動体を示す平面図、第３図は従来の加速管デチユ
ーン機構を示す断面図である。 図において、１は対象物体（デチユーン棒）、
９はスプリング、１２はアーム、１３はリニヤモ
ータである。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 真空中の目的部位へ対象物体を移動させる
    ものにおいて、上記対象物体を取り付けたアーム
    をリニヤモータで駆動するようにしたことを特徴
    とする駆動装置。 (2) 対象物体をスプリングを介してアームに取
    り付けたことを特徴とする実用新案登録請求の範
    囲第１項記載の駆動装置。
JP5320985U 1985-04-10 1985-04-10 Pending JPS61171482U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5320985U JPS61171482U (ja) 1985-04-10 1985-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5320985U JPS61171482U (ja) 1985-04-10 1985-04-10

Publications (1)

Publication Number Publication Date
JPS61171482U true JPS61171482U (ja) 1986-10-24

Family

ID=30573856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5320985U Pending JPS61171482U (ja) 1985-04-10 1985-04-10

Country Status (1)

Country Link
JP (1) JPS61171482U (ja)

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