JPS61171246U - - Google Patents

Info

Publication number
JPS61171246U
JPS61171246U JP5374785U JP5374785U JPS61171246U JP S61171246 U JPS61171246 U JP S61171246U JP 5374785 U JP5374785 U JP 5374785U JP 5374785 U JP5374785 U JP 5374785U JP S61171246 U JPS61171246 U JP S61171246U
Authority
JP
Japan
Prior art keywords
gas
heat treatment
semiconductor wafer
treatment apparatus
floating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5374785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5374785U priority Critical patent/JPS61171246U/ja
Publication of JPS61171246U publication Critical patent/JPS61171246U/ja
Pending legal-status Critical Current

Links

JP5374785U 1985-04-11 1985-04-11 Pending JPS61171246U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5374785U JPS61171246U (enrdf_load_stackoverflow) 1985-04-11 1985-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5374785U JPS61171246U (enrdf_load_stackoverflow) 1985-04-11 1985-04-11

Publications (1)

Publication Number Publication Date
JPS61171246U true JPS61171246U (enrdf_load_stackoverflow) 1986-10-24

Family

ID=30574900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5374785U Pending JPS61171246U (enrdf_load_stackoverflow) 1985-04-11 1985-04-11

Country Status (1)

Country Link
JP (1) JPS61171246U (enrdf_load_stackoverflow)

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