JPS61171244U - - Google Patents

Info

Publication number
JPS61171244U
JPS61171244U JP5524485U JP5524485U JPS61171244U JP S61171244 U JPS61171244 U JP S61171244U JP 5524485 U JP5524485 U JP 5524485U JP 5524485 U JP5524485 U JP 5524485U JP S61171244 U JPS61171244 U JP S61171244U
Authority
JP
Japan
Prior art keywords
processing
substrate
tank
holding rod
processing tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5524485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0234823Y2 (US07652168-20100126-C00068.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985055244U priority Critical patent/JPH0234823Y2/ja
Publication of JPS61171244U publication Critical patent/JPS61171244U/ja
Application granted granted Critical
Publication of JPH0234823Y2 publication Critical patent/JPH0234823Y2/ja
Expired legal-status Critical Current

Links

JP1985055244U 1985-04-12 1985-04-12 Expired JPH0234823Y2 (US07652168-20100126-C00068.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985055244U JPH0234823Y2 (US07652168-20100126-C00068.png) 1985-04-12 1985-04-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985055244U JPH0234823Y2 (US07652168-20100126-C00068.png) 1985-04-12 1985-04-12

Publications (2)

Publication Number Publication Date
JPS61171244U true JPS61171244U (US07652168-20100126-C00068.png) 1986-10-24
JPH0234823Y2 JPH0234823Y2 (US07652168-20100126-C00068.png) 1990-09-19

Family

ID=30577735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985055244U Expired JPH0234823Y2 (US07652168-20100126-C00068.png) 1985-04-12 1985-04-12

Country Status (1)

Country Link
JP (1) JPH0234823Y2 (US07652168-20100126-C00068.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0332023A (ja) * 1989-06-29 1991-02-12 Toho Kasei Kk ウェット処理マシン

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4817894U (US07652168-20100126-C00068.png) * 1971-07-12 1973-02-28
JPS544668U (US07652168-20100126-C00068.png) * 1977-06-14 1979-01-12
JPS5494274A (en) * 1978-01-10 1979-07-25 Toshiba Corp Liquid terating device of semiconductor wafers
JPS5744685U (US07652168-20100126-C00068.png) * 1980-08-15 1982-03-11
JPS5752138A (en) * 1980-09-16 1982-03-27 Mitsubishi Electric Corp Etching device for semiconductor substrate
JPS5764740A (en) * 1980-10-09 1982-04-20 Nippon Telegr & Teleph Corp <Ntt> Developing device
JPS584143A (ja) * 1981-06-30 1983-01-11 Fujitsu Ltd ポジ・レジスト膜の現像方法
JPS5848423A (ja) * 1981-09-17 1983-03-22 Matsushita Electric Ind Co Ltd 洗浄槽
JPS59134834A (ja) * 1983-01-21 1984-08-02 Mitsubishi Electric Corp 半導体ウエハの洗浄装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5264335A (en) * 1975-11-21 1977-05-27 Ibuki Kogyo Co Ltd Supersonic beauty apparatus

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4817894U (US07652168-20100126-C00068.png) * 1971-07-12 1973-02-28
JPS544668U (US07652168-20100126-C00068.png) * 1977-06-14 1979-01-12
JPS5494274A (en) * 1978-01-10 1979-07-25 Toshiba Corp Liquid terating device of semiconductor wafers
JPS5744685U (US07652168-20100126-C00068.png) * 1980-08-15 1982-03-11
JPS5752138A (en) * 1980-09-16 1982-03-27 Mitsubishi Electric Corp Etching device for semiconductor substrate
JPS5764740A (en) * 1980-10-09 1982-04-20 Nippon Telegr & Teleph Corp <Ntt> Developing device
JPS584143A (ja) * 1981-06-30 1983-01-11 Fujitsu Ltd ポジ・レジスト膜の現像方法
JPS5848423A (ja) * 1981-09-17 1983-03-22 Matsushita Electric Ind Co Ltd 洗浄槽
JPS59134834A (ja) * 1983-01-21 1984-08-02 Mitsubishi Electric Corp 半導体ウエハの洗浄装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0332023A (ja) * 1989-06-29 1991-02-12 Toho Kasei Kk ウェット処理マシン

Also Published As

Publication number Publication date
JPH0234823Y2 (US07652168-20100126-C00068.png) 1990-09-19

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