JPS61168549U - - Google Patents

Info

Publication number
JPS61168549U
JPS61168549U JP5259685U JP5259685U JPS61168549U JP S61168549 U JPS61168549 U JP S61168549U JP 5259685 U JP5259685 U JP 5259685U JP 5259685 U JP5259685 U JP 5259685U JP S61168549 U JPS61168549 U JP S61168549U
Authority
JP
Japan
Prior art keywords
ion
magnetic field
adsorption cells
ion pump
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5259685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5259685U priority Critical patent/JPS61168549U/ja
Publication of JPS61168549U publication Critical patent/JPS61168549U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP5259685U 1985-04-09 1985-04-09 Pending JPS61168549U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5259685U JPS61168549U (enrdf_load_stackoverflow) 1985-04-09 1985-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5259685U JPS61168549U (enrdf_load_stackoverflow) 1985-04-09 1985-04-09

Publications (1)

Publication Number Publication Date
JPS61168549U true JPS61168549U (enrdf_load_stackoverflow) 1986-10-18

Family

ID=30572691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5259685U Pending JPS61168549U (enrdf_load_stackoverflow) 1985-04-09 1985-04-09

Country Status (1)

Country Link
JP (1) JPS61168549U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001332209A (ja) * 2000-03-13 2001-11-30 Ulvac Japan Ltd スパッタイオンポンプ
WO2016002320A1 (ja) * 2014-06-30 2016-01-07 国立研究開発法人情報通信研究機構 積層型超高真空作成装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5253513A (en) * 1975-10-27 1977-04-30 Anelva Corp Vacuum pump

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5253513A (en) * 1975-10-27 1977-04-30 Anelva Corp Vacuum pump

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001332209A (ja) * 2000-03-13 2001-11-30 Ulvac Japan Ltd スパッタイオンポンプ
WO2016002320A1 (ja) * 2014-06-30 2016-01-07 国立研究開発法人情報通信研究機構 積層型超高真空作成装置
JP2016012501A (ja) * 2014-06-30 2016-01-21 国立研究開発法人情報通信研究機構 積層型超高真空作成装置
EP3163599A4 (en) * 2014-06-30 2018-02-21 National Institute of Information and Communication Technology Laminated ultra-high vacuum forming device

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