JPS61168549U - - Google Patents
Info
- Publication number
- JPS61168549U JPS61168549U JP5259685U JP5259685U JPS61168549U JP S61168549 U JPS61168549 U JP S61168549U JP 5259685 U JP5259685 U JP 5259685U JP 5259685 U JP5259685 U JP 5259685U JP S61168549 U JPS61168549 U JP S61168549U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- magnetic field
- adsorption cells
- ion pump
- pump according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 108010083687 Ion Pumps Proteins 0.000 claims description 4
- 230000007246 mechanism Effects 0.000 claims description 2
- 238000001179 sorption measurement Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 4
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5259685U JPS61168549U (enrdf_load_stackoverflow) | 1985-04-09 | 1985-04-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5259685U JPS61168549U (enrdf_load_stackoverflow) | 1985-04-09 | 1985-04-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61168549U true JPS61168549U (enrdf_load_stackoverflow) | 1986-10-18 |
Family
ID=30572691
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5259685U Pending JPS61168549U (enrdf_load_stackoverflow) | 1985-04-09 | 1985-04-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61168549U (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001332209A (ja) * | 2000-03-13 | 2001-11-30 | Ulvac Japan Ltd | スパッタイオンポンプ |
WO2016002320A1 (ja) * | 2014-06-30 | 2016-01-07 | 国立研究開発法人情報通信研究機構 | 積層型超高真空作成装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5253513A (en) * | 1975-10-27 | 1977-04-30 | Anelva Corp | Vacuum pump |
-
1985
- 1985-04-09 JP JP5259685U patent/JPS61168549U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5253513A (en) * | 1975-10-27 | 1977-04-30 | Anelva Corp | Vacuum pump |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001332209A (ja) * | 2000-03-13 | 2001-11-30 | Ulvac Japan Ltd | スパッタイオンポンプ |
WO2016002320A1 (ja) * | 2014-06-30 | 2016-01-07 | 国立研究開発法人情報通信研究機構 | 積層型超高真空作成装置 |
JP2016012501A (ja) * | 2014-06-30 | 2016-01-21 | 国立研究開発法人情報通信研究機構 | 積層型超高真空作成装置 |
EP3163599A4 (en) * | 2014-06-30 | 2018-02-21 | National Institute of Information and Communication Technology | Laminated ultra-high vacuum forming device |