JPS61167652U - - Google Patents
Info
- Publication number
- JPS61167652U JPS61167652U JP1985050919U JP5091985U JPS61167652U JP S61167652 U JPS61167652 U JP S61167652U JP 1985050919 U JP1985050919 U JP 1985050919U JP 5091985 U JP5091985 U JP 5091985U JP S61167652 U JPS61167652 U JP S61167652U
- Authority
- JP
- Japan
- Prior art keywords
- adhesive layer
- protection device
- support frame
- ventilation means
- photomask protection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012790 adhesive layer Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 2
- 238000009423 ventilation Methods 0.000 claims 3
- 239000010410 layer Substances 0.000 claims 2
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985050919U JPH0123137Y2 (cs) | 1985-04-05 | 1985-04-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985050919U JPH0123137Y2 (cs) | 1985-04-05 | 1985-04-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61167652U true JPS61167652U (cs) | 1986-10-17 |
| JPH0123137Y2 JPH0123137Y2 (cs) | 1989-07-17 |
Family
ID=30569500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985050919U Expired JPH0123137Y2 (cs) | 1985-04-05 | 1985-04-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0123137Y2 (cs) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998002783A1 (fr) * | 1996-07-17 | 1998-01-22 | Mitsui Chemicals, Inc. | Dispositif de protection de masque |
| JP2001005169A (ja) * | 1999-06-24 | 2001-01-12 | Shin Etsu Chem Co Ltd | ペリクルおよびペリクルの製造方法 |
| JP2006184817A (ja) * | 2004-12-28 | 2006-07-13 | Fujitsu Ltd | ペリクル及び転写基板 |
| JP2020181212A (ja) * | 2014-11-17 | 2020-11-05 | エーエスエムエル ネザーランズ ビー．ブイ． | マスクアセンブリ |
-
1985
- 1985-04-05 JP JP1985050919U patent/JPH0123137Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998002783A1 (fr) * | 1996-07-17 | 1998-01-22 | Mitsui Chemicals, Inc. | Dispositif de protection de masque |
| JP2001005169A (ja) * | 1999-06-24 | 2001-01-12 | Shin Etsu Chem Co Ltd | ペリクルおよびペリクルの製造方法 |
| JP2006184817A (ja) * | 2004-12-28 | 2006-07-13 | Fujitsu Ltd | ペリクル及び転写基板 |
| JP2020181212A (ja) * | 2014-11-17 | 2020-11-05 | エーエスエムエル ネザーランズ ビー．ブイ． | マスクアセンブリ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0123137Y2 (cs) | 1989-07-17 |