JPS6214450U - - Google Patents
Info
- Publication number
- JPS6214450U JPS6214450U JP1985103564U JP10356485U JPS6214450U JP S6214450 U JPS6214450 U JP S6214450U JP 1985103564 U JP1985103564 U JP 1985103564U JP 10356485 U JP10356485 U JP 10356485U JP S6214450 U JPS6214450 U JP S6214450U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- membrane
- breathable
- lithography
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 claims description 2
- 238000001459 lithography Methods 0.000 claims 1
- 239000012982 microporous membrane Substances 0.000 claims 1
- 239000012790 adhesive layer Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Prevention Of Fouling (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985103564U JPS6214450U (cs) | 1985-07-09 | 1985-07-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985103564U JPS6214450U (cs) | 1985-07-09 | 1985-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6214450U true JPS6214450U (cs) | 1987-01-28 |
Family
ID=30976236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985103564U Pending JPS6214450U (cs) | 1985-07-09 | 1985-07-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6214450U (cs) |
-
1985
- 1985-07-09 JP JP1985103564U patent/JPS6214450U/ja active Pending