JPS61166962A - Sliding contact member having excellent wear resistance and its production - Google Patents

Sliding contact member having excellent wear resistance and its production

Info

Publication number
JPS61166962A
JPS61166962A JP821085A JP821085A JPS61166962A JP S61166962 A JPS61166962 A JP S61166962A JP 821085 A JP821085 A JP 821085A JP 821085 A JP821085 A JP 821085A JP S61166962 A JPS61166962 A JP S61166962A
Authority
JP
Japan
Prior art keywords
sliding contact
recesses
resist film
film
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP821085A
Other languages
Japanese (ja)
Other versions
JPH0124862B2 (en
Inventor
Tsutomu Shimizu
勉 清水
Koji Tarumoto
樽本 浩次
Satoshi Nanba
智 南場
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mazda Motor Corp
Original Assignee
Mazda Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mazda Motor Corp filed Critical Mazda Motor Corp
Priority to JP821085A priority Critical patent/JPS61166962A/en
Priority to US06/819,681 priority patent/US4678738A/en
Priority to DE19863601319 priority patent/DE3601319A1/en
Publication of JPS61166962A publication Critical patent/JPS61166962A/en
Publication of JPH0124862B2 publication Critical patent/JPH0124862B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To obtain efficiently a sliding contact member having high oil holding power and excellent wear resistance by forming recesses by photoetching to a metallic member having a sliding contact surface then spraying thermally a thermal spraying material thereto in the state having a resist film remaining thereon and removing the above-mentioned film and the thermally sprayed layer on the film. CONSTITUTION:A plating layer 2 of hard Cr, etc., is formed on the surface of a base material consisting of an alloy cast iron, etc., and thereafter the surface is formed to a smooth sliding contact surface 2a. The oil holding recesses 2b are formed on such surface by photoetching of the conventional practice. Thermal spraying particles such as Mo are projected from a plasma spraying nozzle 5 to the resist film 4 for photoetching and recesses 2b to laminate the thermal spraying particles in the recesses 2b without removing the film 4 remaining on the sliding contact surface 2a. The film 4 and the sprayed layer 3a on the film 4 are removed and the sliding contact member formed with the porous sprayed layer 3 of Mo, etc., having the lubricating oil holding function only in the recesses 2b is obtd.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、例えばエンジンのシリンダライナ等に使用さ
れる摺接部材の耐摩耗性の改善および、この耐摩耗性に
優れた摺接部材の効率的な製造方法に関するものである
Detailed Description of the Invention [Field of Industrial Application] The present invention is directed to improving the wear resistance of sliding contact members used, for example, in engine cylinder liners, and to improving the wear resistance of sliding contact members with excellent wear resistance. It relates to an efficient manufacturing method.

〔従来技術〕[Prior art]

従来、エンジンでは、ピストンがシリンダブロック内を
摺動するようになっているが、このシリンダブロック内
にはピストンとの摺接面を有する摺接部材としてシリン
ダライナが固着されており、従ってこのシリンダライナ
には、高い耐摩耗性が必要である。この耐摩耗性を向上
するには、摺接面にi!!!量の?′Ii滑油が保持さ
れるようにすればよく、この保持された潤滑油により潤
滑効果が高められ、耐摩耗性が向上する。そして上記W
II滑油を摺接面に保持するためには、該摺接面に潤滑
油を保持するためのオイル保持凹部を形成する方法があ
る。
Conventionally, in an engine, a piston slides inside a cylinder block, but a cylinder liner is fixed inside this cylinder block as a sliding contact member having a sliding surface that makes contact with the piston. The liner must have high abrasion resistance. To improve this wear resistance, i! ! ! Quantity? 'Ii lubricating oil may be retained, and this retained lubricating oil enhances the lubrication effect and improves wear resistance. And the above W
II. In order to retain the lubricating oil on the sliding surface, there is a method of forming an oil retaining recess for retaining the lubricating oil on the sliding surface.

ところで上記オイル保持凹部によるオイル保持機能は、
該凹部の面積率、即ち全オイル保持凹部の総開口面積を
摺接面全体の面積で割った値が大きいほど大きくなるが
、このオイル保持能力を確保するために上記面積率を太
き(すると、上記ピストンと高圧で摺接するプラト一部
の面積が小さくなり、そのため単位面稍当りの面圧が大
きくなり、耐摩耗性向上の観点から好ましくない。一方
、上記面積率をあまり大きくすることなくオイル保持能
力を大きくするには、上記オイル保持凹部の刻設深さを
深くすればよいが、硬質メッキ層に逆電処理を施してオ
イル保持凹部を形成する従来の方法においては、上記凹
部を深くするために逆電解量を多くすると、凹部間のプ
ラト一部でも電解が促進されてその表面粗さが悪化して
しまう問題が生じる。
By the way, the oil retention function of the oil retention recess mentioned above is as follows.
The larger the area ratio of the recesses, that is, the value obtained by dividing the total opening area of all the oil holding recesses by the area of the entire sliding surface, the larger the area ratio becomes. , the area of the part of the plate that makes sliding contact with the piston under high pressure becomes smaller, which increases the surface pressure per unit surface area, which is undesirable from the viewpoint of improving wear resistance.On the other hand, without increasing the area ratio too much, In order to increase the oil holding capacity, it is possible to increase the depth of the oil holding recess, but in the conventional method of forming the oil holding recess by applying reverse electric treatment to the hard plating layer, the recess is If the amount of reverse electrolysis is increased in order to increase the depth, a problem arises in that electrolysis is promoted even in a portion of the plateau between the recesses, resulting in worsening of the surface roughness.

そこで本願出願人は、上記従来の問題点を解消できる摺
接部材として、フォトエツチング法により深さの深いオ
イル保持凹部を摺接面に規則的に形成したものについて
出願しており(特願昭58−111200号)、この従
来技術によれば、上記プラト一部の表面粗さが悪化する
ことなく深さの深いオイル保持凹部を形成でき、面積率
をそれほど大きくすることなくオイル保持能力を向上で
き、耐摩耗性を向上できる。
Therefore, the applicant of the present application has filed an application for a sliding contact member in which deep oil retaining recesses are regularly formed on the sliding contact surface using a photo-etching method as a sliding contact member that can solve the above-mentioned conventional problems. 58-111200), according to this prior art, a deep oil holding recess can be formed without deteriorating the surface roughness of the part of the plate, and the oil holding capacity can be improved without significantly increasing the area ratio. can improve wear resistance.

ところで、上記オイル保持凹部に供給され、保持されて
いる潤滑油は、この凹部内に単に溜っているだけである
から、ピストンの摺動に伴なってこれに引きずられて持
ち去られる傾向があり、特にピストンの摺動速度が速く
なるほどこの持ち去られる量が増大し、そのため上記深
いオイル保持凹部を形成したものにおいても、摺動速度
によってはオイル保持能力が不十分となる場合が考えら
れる。
By the way, since the lubricating oil that is supplied and held in the oil holding recess is simply accumulated in this recess, it tends to be dragged away by the piston as it slides. In particular, as the sliding speed of the piston increases, the amount carried away increases. Therefore, even in the case where the deep oil retaining recess is formed, depending on the sliding speed, the oil retaining ability may be insufficient.

〔発明の目的〕[Purpose of the invention]

そこで本願の第1の発明の目的は、摺動速度が速くなっ
ても十分な潤滑効果が得られる高いオイル保持能力を有
し、耐摩耗性を大きく向上できる摺接部材を提供する点
にあり、また本願の第2の発明の目的は、上記オイル保
持能力の高い摺接部材を、簡単な工程により能率よく得
ることのできる摺接部材の製造方法を提供する点にある
Therefore, the object of the first invention of the present application is to provide a sliding contact member that has a high oil retention ability that provides sufficient lubrication even at high sliding speeds, and that can greatly improve wear resistance. A second object of the present invention is to provide a method for manufacturing a sliding contact member that can efficiently obtain the above-mentioned sliding contact member having a high oil holding capacity through a simple process.

〔発明の構成〕[Structure of the invention]

本願の第1の発明は、摺接部材において、金属ギ1 基鈑に硬質メッキ層を形成し、このメッキ層に多数の凹
部を形成し、該凹部内に多孔質の溶射層を設けたもので
あり、これによりこの第1の発明では、潤滑油は上記凹
部内に従来のもののように単に溜るというのではな(、
該凹部内の多孔質溶射層に確実に保持され、その結果摺
動速度が速くなっても/12I?fk油が摺接面を摺動
する部材によって持ち去られるということはなく、さら
に上記溶射層自体の特性を利用することにより耐摩耗性
の向上に寄与することとなる。
The first invention of the present application is a sliding contact member in which a hard plating layer is formed on a base plate of a metal plate, a large number of recesses are formed in this plating layer, and a porous sprayed layer is provided in the recesses. Therefore, in this first invention, the lubricating oil does not simply accumulate in the recess as in the conventional case (,
The /12I? The FK oil is not carried away by members sliding on the sliding contact surface, and furthermore, by utilizing the characteristics of the sprayed layer itself, it contributes to improving wear resistance.

上記硬質メッキ層、例えばクロムメッキ層に凹部を形成
し、この凹部に潤滑油保持機能を有する多孔質の、例え
ばモリブデンの溶射層を形成する方法としては、上述の
ように、フォトエツチング法により凹部を形成する方法
が公知であり、またMo等の溶射層が耐スカッフィング
性にすぐれていることも知られているから、以下の方法
が考えられる。即ち、上記Crメッキ層にフォトエツチ
ング法によって凹部を蝕刻し、このフォトエツチング用
レジスト膜を除去した後、上記メ・ツキ層上にMOを例
えばプラズマ溶射する方法である。しかしながら上記フ
ォトエツチング法とプラズマ溶射とを単に組み合せた処
理方法では以下の問題点が生じることが考えられる。
As a method for forming a recess in the hard plating layer, for example, a chromium plating layer, and forming a porous sprayed layer of molybdenum, for example, which has a lubricating oil retaining function in the recess, as described above, the recess is formed by photo-etching. Since a method for forming a oxide film is known, and it is also known that a thermally sprayed layer of Mo or the like has excellent scuffing resistance, the following method can be considered. That is, the method involves etching recesses in the Cr plating layer by photoetching, removing the photoetching resist film, and then plasma spraying MO onto the plating layer, for example. However, a treatment method simply combining the photoetching method and plasma spraying may cause the following problems.

■ Crメッキ層上には強固な酸化膜が存在しており、
またCrメッキ層は溶射粒子に対するぬれ性も悪いので
、溶射粒子はこのメッキ層表面には付着せずに周囲に飛
散し、その結果この飛散した粒子により上記凹部への溶
射が阻害され、該凹部内に溶射層を形成するのは困難と
なる。
■ There is a strong oxide film on the Cr plating layer,
In addition, since the Cr plating layer has poor wettability with respect to sprayed particles, the sprayed particles do not adhere to the surface of this plating layer but scatter around. As a result, the sprayed particles inhibit the spraying into the recesses, and It becomes difficult to form a sprayed layer inside the surface.

■ また上記凹部への溶射においては、上述のとおりC
rメッキ層上にも溶射粒子が衝突する訳であるが、この
衝突粒子によりCrメ・ツキ層自体の表面荒れが生じ、
結局耐摩耗性はそれほど向上できない。   □ そこで本願の第2の発明は、上記耐摩耗性に優れた摺接
部材を製造するための方法において、摺接面を有する上
記硬質メッキ層と金属基材などからなる金属部材にフォ
トエツチング法によって多数の凹部を形成した後、この
フォトエツチング用しジス1〜膜を上記金属部材上に残
したままで溶射材料を溶射し、しかる後上記レジスト膜
および該レジスト膜上に形成された溶射層を除去するよ
うにしたものであり、これにより本発明方法では、金属
部材上に残っているレジスト膜が軟質であることから、
溶射粒子はこのレジスト膜に容易に付着し、従ってこの
金N部材の摺接面が溶射粒子によって表面荒れを起こす
ことはないとともに、金属部材への溶射粒子が飛散する
こともなく、従ってこの飛散粒子により凹部内への溶射
粒子の進入が阻害されることもない。また、レジスト膜
上の不要な溶射層は、レジスト膜の除去により容易に除
去できる。
■ Also, in the case of thermal spraying to the above-mentioned recesses, as mentioned above,
Thermal spray particles also collide on the R plating layer, but these colliding particles cause surface roughness of the Cr plating layer itself.
In the end, wear resistance cannot be improved that much. □ Therefore, the second invention of the present application is a method for manufacturing a sliding contact member with excellent wear resistance, in which a metal member consisting of the hard plating layer having a sliding contact surface and a metal base material is subjected to a photoetching method. After forming a large number of concave portions, a thermal spraying material is thermally sprayed while the photoetching film remains on the metal member, and then the resist film and the thermal sprayed layer formed on the resist film are thermally sprayed. As a result, in the method of the present invention, since the resist film remaining on the metal member is soft,
Thermal spray particles easily adhere to this resist film, so the sliding surface of the gold-N member will not be roughened by the spray particles, and the spray particles will not scatter to the metal member, so this scattering will not occur. The particles do not prevent the thermal spray particles from entering the recesses. Moreover, unnecessary thermal sprayed layers on the resist film can be easily removed by removing the resist film.

〔実施例〕〔Example〕

以下、本願発明の実施例を図について説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

第1図は本願の第1の発明の一実施例による摺接部材、
例えばンリンダライナの内表面部を示し、図において、
■は金泥、例えば合金鋳鉄製基材であり、この基材1の
表面には硬質メッキ層、例えばCrメッキ層2が形成さ
れており、このC「メッキ層2の外表面は、図示しない
摺動部材であるピストンと摺接する摺接面2aとなって
いる。そしてこのCrメ・ツキ層2の摺接面2aには、
フォトエツチング法により多数のオイル保持凹部2bが
縦横等ピンチでもって該摺接面2aの全面にねたって形
成されており、この各オイル保持凹部2bは平面円形の
開口を有する縦断面略U字状のもので、この摺接面2a
のうち上記凹部2bの形成されていない部分がピストン
と当接するプラト一部となっている。
FIG. 1 shows a sliding contact member according to an embodiment of the first invention of the present application,
For example, the inner surface of the cylinder liner is shown, and in the figure,
3 is a base material made of gold paint, for example alloy cast iron, and a hard plating layer, for example a Cr plating layer 2, is formed on the surface of this base material 1. It is a sliding surface 2a that comes into sliding contact with a piston, which is a moving member.The sliding surface 2a of this Cr plated layer 2 has a
A large number of oil holding recesses 2b are formed vertically and horizontally in a pinch manner over the entire surface of the sliding contact surface 2a by photo-etching, and each oil holding recess 2b has a substantially U-shaped longitudinal section with a circular opening in plan view. This sliding surface 2a
The portion where the recessed portion 2b is not formed is a part of the plate that comes into contact with the piston.

そして上記各オイル保持凹部2b内には、例えばMoを
プラズマ溶射してなる溶射層3が形成されており、その
外表面は上記摺接面2aと略同一平面状になっており、
またこの溶射層3は多孔質のちので潤滑油を確実に保持
できる機能を有している。
A sprayed layer 3 formed by plasma spraying Mo, for example, is formed in each of the oil retaining recesses 2b, and its outer surface is substantially flush with the sliding surface 2a.
Further, since the sprayed layer 3 is porous, it has the function of reliably retaining lubricating oil.

本実施例の摺接部材では、オイル保持凹部2b    
 ゛ )内の溶射層3が多孔質になっているため、摺動
部材、この場合はピストンの摺動速度が速くなっても潤
滑油はこの溶射層3内に確実に保持され、これにより潤
滑効果が長期にわたって得られ、しかも上記溶射層3自
体の特性も利用できることにより耐摩耗性を大きく向上
できる。
In the sliding contact member of this embodiment, the oil holding recess 2b
Since the sprayed layer 3 in ) is porous, the lubricating oil is reliably retained within the sprayed layer 3 even when the sliding speed of the sliding member, in this case the piston, increases. The effect can be obtained over a long period of time, and since the characteristics of the thermal sprayed layer 3 itself can be utilized, the wear resistance can be greatly improved.

また、上述のとおり、Crメッキ層2の特に平坦部に溶
射された溶射粒子は周囲に飛散してしまい、該平坦部に
は付着しにくいのであるが、本実施例では平坦部ではな
く凹部内に溶射層を形成するようにしているから、溶射
粒子が飛散することはなく、容易確実にオイル保持凹部
2b内面に付着し、またこの溶射層3とCrメッキ層2
との密着性を向上できる。
Furthermore, as mentioned above, the spray particles sprayed on the flat part of the Cr plating layer 2 are scattered around and are difficult to adhere to the flat part. Since the sprayed layer is formed on the surface of the sprayed layer 3, the sprayed particles do not scatter and easily and reliably adhere to the inner surface of the oil holding recess 2b.
It can improve the adhesion with.

次に上記実施例の摺動部材の耐摩耗性向上効果を1a認
するための試験について説明する。本試験では、摺接面
の損傷度および耐焼付性について試験し、これにより耐
摩耗性を評価する。
Next, a test for confirming the effect of improving the wear resistance of the sliding member of the above example will be described. In this test, the degree of damage and seizure resistance of the sliding contact surface is tested, and the wear resistance is evaluated based on this.

第2図は上記実施例の耐摩耗性をピンディスク式摩耗試
験法により試験するための回転式摩耗試験機を示す。図
において、11はディスク回転部であり、これの図示し
ないモータにはディスク回転軸12が接続されており、
この回転軸12に試験片であるディスク13が取付けら
れ、これにより該ディスク13は所定の回転速度でもっ
て回転されるようになっている。また14はディスク押
圧部であり、支持部材15に揺動自在に取付けられた支
持アーム15aの先端には上記ディスク13の摺接面を
摺動するためのピン16が取付けられ、後端には吊ロー
プ17が連結され、この吊ロープ17はガイドプーリ1
8に巻回され、これの下端には荷重19が吊設されてお
り、これによりピン16は押圧筒MPでもってディスク
13の摺接面に押圧されることとなる。
FIG. 2 shows a rotary abrasion tester for testing the abrasion resistance of the above-mentioned examples by a pin-disc abrasion test method. In the figure, 11 is a disk rotating section, and a disk rotating shaft 12 is connected to a motor (not shown) of this section.
A disk 13, which is a test piece, is attached to this rotating shaft 12, so that the disk 13 is rotated at a predetermined rotational speed. Reference numeral 14 denotes a disk pressing section, and a support arm 15a is swingably attached to the support member 15. A pin 16 for sliding on the sliding surface of the disk 13 is attached to the tip of the support arm 15a, and a pin 16 is attached to the rear end of the support arm 15a. A hanging rope 17 is connected to the guide pulley 1.
8, and a load 19 is suspended from the lower end of the pin 16, so that the pin 16 is pressed against the sliding surface of the disk 13 by the pressing cylinder MP.

ここで上記ディスク13は、基材が合金鋳鉄製で、その
表面に硬質Crメッキ層(厚さ50μ。
Here, the base material of the disk 13 is made of alloyed cast iron, and the surface thereof has a hard Cr plating layer (thickness: 50 μm).

ビッカース硬度900〜1000)を形成し、その後#
1000ホーニング仕上げ加工を施したものである。
Vickers hardness 900-1000), then #
It has been given a 1000 honing finish.

そして本実施例試験片は、上記ディスク13にフォトエ
ツチング法にてオイル保持凹部を形成し、該凹部内にモ
リブデン溶射層(厚さ約20μ)を形成したものであり
、比較例1は上記ディスク13にフォトエツチング法に
よるオイル保持凹部のみを形成したものであり、比較例
2は上記ディスク13をそのまま用いたものである。ま
た上記ピン16は第1表に示す化学成分からなる合金鋳
鉄をチル処理してなる平面矩形の板状体であり、これの
上記ディスク13との摺接面には以下の加工力く方面さ
れている。
In the test piece of this example, an oil retaining recess was formed in the disk 13 by photoetching, and a molybdenum sprayed layer (about 20 μm in thickness) was formed in the recess. In Comparative Example 2, the disk 13 described above was used as is. The pin 16 is a flat rectangular plate made by chilling alloyed cast iron having the chemical components shown in Table 1, and its sliding surface with the disk 13 is subjected to the following machining force. ing.

イ、研摩仕上げ 砥石 :GC#60 アラサ: 1.6a ロ、ショツトブラスト仕上げ ショソト二カーボランダム#20 アラサ :10〜40μ 第1表 まず、摺接面の損傷度試験について説明すれば、この試
験は潤滑油によるものではなく、オイル保持凹部に形成
された溶射層による耐摩耗性の向上効果について試験す
るものである。
A. Polished whetstone: GC#60 Abrasion: 1.6a B. Shot-blast finished Shoto 2 carborundum #20 Abrasion: 10-40μ This test examines the effect of improving wear resistance not due to lubricating oil but due to the sprayed layer formed in the oil holding recess.

■、試験条件 押圧荷重  :P=4.5Kg ディスク周速: 5m/s6( テスト時間 =10分 潤滑条件  :無潤滑 ■、試験結果 第2表 この試験結果(上記第2表)から明らかなように、基材
上にクロムメッキ層を形成しただけの比較例2では、デ
ィスク13表面の損傷度が大きく、ピン16の摩耗量も
大きいが、クロムメッキ層にフォトエツチング法にて凹
部を形成した比較例1ではディスク13表面の損傷度、
ビン16の摩耗量ともに大幅に低減されており、上記凹
部にさらにモリブデン溶射層を形成した本実施例では、
ディスク13表面の損傷度はさらに小さくなっており、
またビン16の摩耗量は上記比較例1の1/2程度に低
減されており、このようにモリブデン溶射層自体により
耐摩耗性が太き(向上していることがわかる。
■, Test conditions Pressure load: P = 4.5Kg Disc circumferential speed: 5 m/s6 (Test time = 10 minutes Lubrication conditions: No lubrication ■, Test results Table 2 As is clear from the test results (Table 2 above) In Comparative Example 2, in which only a chromium plating layer was formed on the base material, the degree of damage to the surface of the disk 13 was large, and the amount of wear on the pin 16 was large; In Comparative Example 1, the degree of damage to the surface of the disk 13,
Both the amount of wear on the bottle 16 is significantly reduced, and in this example, a molybdenum sprayed layer is further formed in the recessed portion.
The degree of damage to the surface of the disk 13 has become even smaller.
Further, the amount of wear on the bottle 16 is reduced to about 1/2 of that in Comparative Example 1, and it can be seen that the wear resistance is increased (improved) due to the molybdenum sprayed layer itself.

次に耐焼付性試験について説明すれば、この試験は、オ
イル保持凹部に形成されたモリブデン溶射層によるオイ
ル保持機能の向上効果について試験するものである。
Next, the seizure resistance test will be explained. This test tests the effect of improving the oil retention function by the molybdenum sprayed layer formed in the oil retention recess.

■、試験条件 押圧荷重  :P=4.5Kg ディスク周速:  5m/sec 潤滑条件  ニオイル(10W40)と灯油と1:9 
 (Vol比)で混合 した潤滑油をlcc滴下する。
■, Test conditions Pressure load: P = 4.5Kg Disc circumferential speed: 5m/sec Lubrication conditions Nioil (10W40) and kerosene 1:9
Drop lcc of lubricating oil mixed at (Vol ratio).

■、試験結果 第3表 この試験結果(第3表)から明らかなように、本実施例
の試験片は比較例1よりも焼付までの時間が長くなって
おり、このことからモリブデン溶射層によりオイル保持
機能が向上したことがわかる。
■Test Results Table 3 As is clear from the test results (Table 3), the test piece of this example took a longer time to seize than Comparative Example 1, and this indicates that the molybdenum sprayed layer It can be seen that the oil retention function has improved.

第3図は本願の第2の発明の一実施例による摺接部材の
製造方法の工程図を示し、本実施例方法は主としてフォ
トエツチングによるオイル保持凹部の形成と、プラズマ
溶射による溶射層の形成との2段階からなる。
FIG. 3 shows a process diagram of a method for manufacturing a sliding contact member according to an embodiment of the second invention of the present application, and the method of this embodiment mainly involves forming oil retaining recesses by photoetching and forming a thermal spray layer by plasma spraying. It consists of two stages.

(I)まず、合金鋳鉄からなる基材1の表面に硬質クロ
ムメッキ層2を形成し、該メッキ層2の表面を研摩加工
又はホーニング加工により平滑にして摺接面2aを形成
する。
(I) First, a hard chromium plating layer 2 is formed on the surface of a base material 1 made of alloyed cast iron, and the surface of the plating layer 2 is smoothed by polishing or honing to form a sliding contact surface 2a.

(II)次に上記摺接面2aを税脂した後、紫外線感光
型のフォトレジストにより上記摺接面2aを被覆し、こ
のフォトレジスト膜4上に予め作成したフォトマスク(
図示せず)を密着載置する。このフォトマスクはオイル
保持凹部2bの拡大原図を作成し、これを写真撮影によ
り縮小したフィルム状のものであり、上記オイル保持凹
部2bに相当する部分は非透光部となっている。
(II) Next, after coating the sliding contact surface 2a, the sliding contact surface 2a is coated with an ultraviolet-sensitive photoresist, and a photomask prepared in advance on the photoresist film 4 (
(not shown) are placed in close contact with each other. This photomask is a film-like product obtained by creating an enlarged original drawing of the oil holding recess 2b and reducing it by photographing, and the portion corresponding to the oil holding recess 2b is a non-transparent portion.

(I[[)上記フォトマスクを載置した状態で、これに
高圧水銀炉(図示せず)により紫外線を照射すると、上
記レジスト膜4の紫外線が照射された部分は露光硬化し
、上記フォトマスクの非透光部にさえぎられて紫外線が
照射されなかった部分、即ちオイル保持凹部2bに相当
する部分は硬化せず、この後フォトマスクを取り去って
レジスト膜4をトリクロルエタンからなる非露光部熔解
液により現像すると、上記未硬化部分が溶解剥離され、
これにより上記レジスト膜4のオイル保持凹部2bに相
当する部分に開口4aが形成され、クロムメッキ層2の
この開口4a部分は外方に露出することとなる。
(I[[) When the above photomask is placed and irradiated with ultraviolet rays from a high-pressure mercury furnace (not shown), the portion of the resist film 4 irradiated with ultraviolet rays is cured by exposure, and the above photomask The portions that were blocked by the non-transparent portions and were not irradiated with ultraviolet light, that is, the portions corresponding to the oil holding recesses 2b, were not cured. After that, the photomask was removed and the resist film 4 was melted in the non-exposed portions made of trichloroethane. When developed with a liquid, the uncured portion is dissolved and peeled off,
As a result, an opening 4a is formed in a portion of the resist film 4 corresponding to the oil holding recess 2b, and this opening 4a portion of the chrome plating layer 2 is exposed to the outside.

(IV)そして上記レジスト1IllI4が形成された
クロムメッキ層2をエツチング処理すると、上記露出し
た部分が熔解されて、クロムメッキ層2に多数のオイル
保持凹部2bが形成される(第3図(a)参照)。
(IV) When the chromium plating layer 2 on which the resist 1IllI4 is formed is etched, the exposed portions are melted and a large number of oil retaining recesses 2b are formed in the chrome plating layer 2 (Fig. 3(a) )reference).

(■゛)そして次に上記レジスト膜4を取り去ることな
く、モリブデン溶射粒子をプラズマ溶射ノズル5から上
記レジスト膜4およびオイル保持四部2bに向けて投射
する。すると、レジスト膜4への溶射粒子は、このレジ
スト膜4がクロムメッキ層と比べればはるかるに軟質で
あることから、周囲に飛散することなくこのレジスト膜
4に容易に付着し、またオイル保持凹部2bへの溶射粒
子は上記のとおり飛散粒子がないことから容易確実に該
凹部2b内に積層される(第3図(b)、 (C)参照
)。
(■゛) Then, without removing the resist film 4, molybdenum spray particles are projected from the plasma spray nozzle 5 toward the resist film 4 and the oil holding portion 2b. Then, since the resist film 4 is much softer than the chrome plating layer, the sprayed particles on the resist film 4 easily adhere to the resist film 4 without scattering to the surroundings, and also retain oil. Since there are no scattered particles as described above, the particles sprayed onto the recess 2b are easily and reliably stacked in the recess 2b (see FIGS. 3(b) and 3(C)).

(Vl)最後に上記摺接部材を塩化メチレンからなるレ
ジスト膜熔解液に浸漬すると、上記レジスト膜4が除去
され、これに伴って該レジス)l!!14上の溶射層3
aも除去され、これによりオイル保持凹部2b内のみに
潤滑油保持機能を有する多孔質のモリブデン溶射層3が
形成された摺接部材が得られる(第3図(d)参照)。
(Vl) Finally, when the sliding contact member is immersed in a resist film melt made of methylene chloride, the resist film 4 is removed, and along with this, the resist)l! ! Sprayed layer 3 on 14
a is also removed, thereby obtaining a sliding member in which a porous molybdenum sprayed layer 3 having a lubricating oil retaining function is formed only in the oil retaining recess 2b (see FIG. 3(d)).

このように本実施例では、フォトエツチング後、紫外線
硬化したレジス)IFJ4を残した状態でモリブデン溶
射を行なったので、このレジスト膜4への溶射粒子は該
膜に付着し、周囲に飛散することはなく、従ってオイル
保持凹部2bへの溶射が上記飛散粒子に阻害されること
はなく、その結果上記オイル保持凹部2b内に溶射層3
を容易確実に形成できる。
In this example, molybdenum thermal spraying was performed with the ultraviolet-cured resist (IFJ4) remaining after photoetching, so that the thermal spray particles on this resist film 4 would adhere to the film and scatter to the surroundings. Therefore, the spraying into the oil holding recess 2b is not hindered by the above-mentioned scattered particles, and as a result, the thermal spraying layer 3 is formed inside the oil holding recess 2b.
can be formed easily and reliably.

ここで、通常レジスト膜のような有機質の皮膜に溶射粒
子を衝突させると、その熱で皮膜は熔解してしまうと考
えられるが、紫外線により硬化させたレジスト膜は耐熱
性が高く、しかも軟質であるため、このレジスト膜が溶
解してしまうことなく該膜上に溶射粒子が容易に付着す
るものと考えられる。
Normally, when thermal spray particles collide with an organic film such as a resist film, the film is thought to melt due to the heat, but a resist film cured by ultraviolet rays has high heat resistance and is soft. Therefore, it is thought that the thermal spray particles easily adhere to the resist film without dissolving the resist film.

また、逆に言えば、クロムメッキ層2の表面はレジスト
膜4によって保護されていることとなり、そのためこの
クロムメッキ層2の表面荒れが生じることもなく、かつ
このレジスト膜4上の溶射層はレジスト膜4を従来と同
じレジスト膜剥離剤に浸漬するだけで容易に除去するこ
とができる。
Conversely, the surface of the chrome plating layer 2 is protected by the resist film 4, so the surface of the chrome plating layer 2 does not become rough, and the sprayed layer on the resist film 4 The resist film 4 can be easily removed by simply immersing it in the same resist film stripping agent as in the prior art.

次に本実施例方法の効果を説明するための比較試験につ
いて説明する。
Next, a comparative test for explaining the effects of the method of this example will be explained.

この比較試験は、レジスト膜4によりオイル保持凹部2
b内への溶射効率が向上することを示すためのもので、
比較例1はフォトエツチング後レジスト膜4を除去して
溶射作業を行なったものであり、比較例2はフォトエツ
チング後レジスト膜4を除去し、クロムメッキ層2の表
面に溶射粒子の飛散を防止するためのブラスト処理を施
した後溶射を行なったものである。
In this comparative test, the oil retaining recess 2 was
This is to show that the thermal spraying efficiency within b is improved.
In Comparative Example 1, thermal spraying was performed after removing the resist film 4 after photo-etching, and in Comparative Example 2, the resist film 4 was removed after photo-etching to prevent spraying particles from scattering on the surface of the chrome plating layer 2. Thermal spraying was performed after a blasting process was carried out to achieve this.

I 試験条件 fil  フォトエツチング条件 フォトレジスト:フィルムタイプ (レジスト層厚み15μ。I Test conditions fil Photoetching conditions Photoresist: Film type (Resist layer thickness 15μ.

分解能30μ) フォトマスク:網点タイプ (網点径100μ。resolution 30μ) Photomask: Halftone type (Dot diameter 100μ.

面積率10%) 現像液   :111)リクロルエタンエソチング液=
30℃のCr03(250g/p)とH2SO4(2,
5 g/Iりとの溶液 (2+  R射条件 溶射材料:溶射用Mo(粒度1o〜44μ)溶射型式:
プラズマ溶射 出力  :35KW 距F@   :  ]OOm/m 溶射数 :10パス (3)溶射後のレジスト膜剥離液:塩化メチレン■、試
験結果 第4表 ここで第4表中の充虜率は、オイル保持凹部2bを縦方
向に切断し、この凹部2b内の溶射層3部分の断面積と
、該凹部2bの縦断面積との比(百分率)であり、この
値が大きいほどオイル保持四部2b内への溶射が容易確
実に効率よく行なわれたということになる。
Area ratio 10%) Developer: 111) Lichloroethane ethosing solution =
Cr03 (250g/p) and H2SO4 (2,
5g/I solution (2+R) Spraying conditions Thermal spraying material: Mo for thermal spraying (particle size 1o~44μ) Thermal spraying type:
Plasma spraying output: 35KW Distance F@: ]OOm/m Number of sprays: 10 passes (3) Resist film stripping solution after spraying: methylene chloride ■, test results Table 4 Here, the filling rate in Table 4 is as follows: This is the ratio (percentage) of the cross-sectional area of the sprayed layer 3 portion inside this recess 2b and the vertical cross-sectional area of the recess 2b when the oil holding recess 2b is cut in the longitudinal direction. This means that the thermal spraying was carried out easily, reliably and efficiently.

上記試験結果(第4表)から明らかなように、本実施例
方法では、オイル保持凹部2b内金体に溶射粒子が充填
されているのに対し、比較例1ではオイル保持凹部2b
内への溶射はほとんど不可能であり、これは該凹部2b
内への溶射が飛散粒子により阻害された結果である。ま
た比較例2で    ゛は、溶射粒子の飛散を防止する
ためにブラスト処理を施したのであるが、このようにク
ロムメッキ表面を荒してもオイル保持凹部2bの底面に
しか溶射層を形成できない。
As is clear from the above test results (Table 4), in the method of this embodiment, the inner metal body of the oil holding recess 2b is filled with thermal spray particles, whereas in Comparative Example 1, the inner metal body of the oil holding recess 2b
It is almost impossible to spray inside the recess 2b.
This is the result of inward thermal spraying being obstructed by flying particles. Further, in Comparative Example 2, blasting was performed to prevent sprayed particles from scattering, but even if the chrome plating surface is roughened in this way, a sprayed layer can only be formed on the bottom surface of the oil holding recess 2b.

なお、上記第1.第2の発明の実施例では、硬質メッキ
層2がクロムメッキ層であり、溶射材料がモリブデンで
ある場合について説明したが、このメッキ層、溶射材料
はこれらに限定されるものでないのは勿論であり、例え
ば硬質メッキ層はニアケルリン(N i P)メッキ層
など硬度HV700以上のものが好ましく、また溶射材
料はクロムカーハイl−(Cr3 C2)であってもよ
い。また、上記両実施例では摺接部材としてシリンダラ
イチを例にとって説明したが、本発明はシリンダライチ
以外の摺接部材にも勿論適用できる。
In addition, the above 1. In the embodiment of the second invention, a case has been described in which the hard plating layer 2 is a chrome plating layer and the thermal spraying material is molybdenum, but it goes without saying that the plating layer and the thermal spraying material are not limited to these. For example, the hard plating layer preferably has a hardness of HV700 or more, such as a near-kerlin (N i P) plating layer, and the thermal spraying material may be chromium kerosene (Cr3 C2). Further, in both of the above embodiments, the cylinder lychee was used as an example of the sliding member, but the present invention can of course be applied to sliding members other than the cylinder lychee.

〔発明の効果〕 以上のように本願の第1の発明に係る摺接部材によれば
、硬質メッキ層に多数の凹部を設け、該凹部内に多孔質
の溶射層を形成したので、該凹部の硬質メッキ部分と溶
射層との密着性を向上できる効果があり、また溶射層は
オイル保持性があり、しかも溶射層自体の特性も利用で
きるので、潤滑性を向上して耐摩耗性を太き(向上でき
る効果がある。
[Effects of the Invention] As described above, according to the sliding contact member according to the first invention of the present application, a large number of recesses are provided in the hard plating layer, and a porous sprayed layer is formed in the recesses. It has the effect of improving the adhesion between the hard plated part of the metal and the thermal sprayed layer, and the thermal sprayed layer has oil retention properties, and the properties of the thermal sprayed layer itself can be used, so it improves lubricity and increases wear resistance. (There is an effect that can be improved.

また、本願の第2の発明に係る摺接部材の製造方法によ
糺ば、摺接面を有する全底部材にフォトエツチングによ
り凹部を形成した後、レジスト膜を残した状態で溶射材
料を溶射するようにしたので、フォトエツチングに用い
たレジスト膜をそのまま使用するという簡単な構成によ
り、このレジス)IIが溶射粒子の飛散を防止するとと
もに、上記摺接面を溶射粒子の衝突から保護し、そのた
め上記凹部内に溶射層を効率よく形成でき、また摺接面
の表面荒れの発生を防止できる効果がある。
Further, according to the method for manufacturing a sliding contact member according to the second invention of the present application, after forming a recess by photoetching on the entire bottom member having a sliding contact surface, a thermal spraying material is sprayed with a resist film remaining. Therefore, by using a simple configuration in which the resist film used for photoetching is used as is, this resist II prevents the sprayed particles from scattering, and protects the sliding surface from the collision of the sprayed particles. Therefore, the sprayed layer can be efficiently formed within the recessed portion, and the surface roughness of the sliding contact surface can be prevented from occurring.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本願の第1の発明の一実施例による摺接部材を
示す断面図、第2図はその試験装置の概略構成図、第3
図(a)〜fdlは本願の第2の発明の一実施例方法を
説明するための工程図である。 ■・・・金属基材、2・・・硬質メッキ層、2a・・・
摺接面、2b・・・オイル保持凹部、3・・・溶射層、
3a・・・レジスト膜上の溶射層、4・・・レジスト膜
。 特 許 出 願 人 マツダ株式会社 代理人   弁理士 早 瀬 憲 − 第1図 h 第2図 第3 (G)       (b) 図 (C)        (d)
FIG. 1 is a cross-sectional view showing a sliding contact member according to an embodiment of the first invention of the present application, FIG. 2 is a schematic configuration diagram of a test device thereof, and FIG.
Figures (a) to fdl are process diagrams for explaining a method according to an embodiment of the second invention of the present application. ■...Metal base material, 2...Hard plating layer, 2a...
Sliding surface, 2b... oil holding recess, 3... thermal spray layer,
3a... Thermal spray layer on the resist film, 4... Resist film. Patent Applicant: Mazda Motor Corporation Agent, Patent Attorney Ken Hayase - Figure 1 h Figure 2 3 (G) (b) Figure (C) (d)

Claims (3)

【特許請求の範囲】[Claims] (1)金属基材に摺接面を有する硬質メッキ層を設け、
該メッキ層の摺接面に多数の凹部を設け、該凹部内のみ
に潤滑油保持機能を有する多孔質の溶射層を設けたこと
を特徴とする耐摩耗性に優れた摺接部材。
(1) Providing a hard plating layer with a sliding surface on a metal base material,
A sliding contact member with excellent wear resistance, characterized in that a large number of recesses are provided on the sliding surface of the plated layer, and a porous sprayed layer having a lubricant retaining function is provided only in the recesses.
(2)上記溶射層がモリブデンの溶射材料によって形成
されていることを特徴とする特許請求の範囲第1項記載
の耐摩耗性に優れた摺接部材。
(2) A sliding contact member with excellent wear resistance as set forth in claim 1, wherein the thermal sprayed layer is formed of a thermally sprayed material of molybdenum.
(3)摺接面を有する金属部材にフォトエッチング法で
多数の凹部を形成した後、フォトエッチング用のレジス
ト膜を金属部材上に残存させた状態で溶射材料を溶射し
、その後上記レジスト膜および該レジスト膜上の溶射層
を除去し、上記凹部内のみに潤滑油保持機能を有する多
孔質の溶射層を形成した摺接部材を得ることを特徴とす
る耐摩耗性に優れた摺接部材の製造方法。
(3) After forming a large number of recesses by photo-etching on a metal member having a sliding surface, a thermal spraying material is sprayed with a photo-etching resist film remaining on the metal member, and then the resist film and A sliding contact member with excellent wear resistance characterized in that the thermal sprayed layer on the resist film is removed to obtain a sliding contact member in which a porous thermal sprayed layer having a lubricant retaining function is formed only in the recess. Production method.
JP821085A 1985-01-18 1985-01-18 Sliding contact member having excellent wear resistance and its production Granted JPS61166962A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP821085A JPS61166962A (en) 1985-01-18 1985-01-18 Sliding contact member having excellent wear resistance and its production
US06/819,681 US4678738A (en) 1985-01-18 1986-01-17 Manufacture of a wear-resistant sliding surface
DE19863601319 DE3601319A1 (en) 1985-01-18 1986-01-17 METHOD FOR DESIGNING AN ABRASION-RESISTANT SLIDING SURFACE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP821085A JPS61166962A (en) 1985-01-18 1985-01-18 Sliding contact member having excellent wear resistance and its production

Publications (2)

Publication Number Publication Date
JPS61166962A true JPS61166962A (en) 1986-07-28
JPH0124862B2 JPH0124862B2 (en) 1989-05-15

Family

ID=11686875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP821085A Granted JPS61166962A (en) 1985-01-18 1985-01-18 Sliding contact member having excellent wear resistance and its production

Country Status (1)

Country Link
JP (1) JPS61166962A (en)

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US6671943B1 (en) 1994-06-06 2004-01-06 Toyota Jidosha Kabushiki Kaisha Method of manufacturing a piston
JP2008153315A (en) * 2006-12-15 2008-07-03 Tokyo Electron Ltd Method for manufacturing substrate setting board
JP2008536073A (en) * 2005-04-15 2008-09-04 ジーエスアイ グループ リミテッド Gas bearing spindle
JP2011529805A (en) * 2008-08-01 2011-12-15 コミサリア ア レネルジィ アトミーク エ オ ゼネ ルジイ アルテアナティーフ Method for using a super-slip thin layer characterized by a method for making a super-slip thin layer
KR20140079734A (en) * 2012-12-19 2014-06-27 가부시키가이샤 호리바 에스텍 Sealing member and method of manufacturing the same
JP2014527135A (en) * 2011-07-05 2014-10-09 マーレ インターナショナル ゲゼルシャフト ミット ベシュレンクテル ハフツング Cylinder sliding surface manufacturing method and cylinder liner
JP2017057825A (en) * 2015-09-18 2017-03-23 トヨタ自動車株式会社 Surface processing method for cylinder bore surface
WO2019225624A1 (en) * 2018-05-22 2019-11-28 帝国イオン株式会社 Wear-resistant coating film, wear-resistant member, method for producing wear-resistant coating film, and sliding mechanism

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Cited By (14)

* Cited by examiner, † Cited by third party
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JPH02170885A (en) * 1988-12-23 1990-07-02 Mitsubishi Electric Corp Friction sliding material
JPH03249360A (en) * 1990-02-28 1991-11-07 Aisin Seiki Co Ltd Oil grooving method for piston
US6671943B1 (en) 1994-06-06 2004-01-06 Toyota Jidosha Kabushiki Kaisha Method of manufacturing a piston
JP2008536073A (en) * 2005-04-15 2008-09-04 ジーエスアイ グループ リミテッド Gas bearing spindle
JP2008153315A (en) * 2006-12-15 2008-07-03 Tokyo Electron Ltd Method for manufacturing substrate setting board
JP4754469B2 (en) * 2006-12-15 2011-08-24 東京エレクトロン株式会社 Manufacturing method of substrate mounting table
JP2011529805A (en) * 2008-08-01 2011-12-15 コミサリア ア レネルジィ アトミーク エ オ ゼネ ルジイ アルテアナティーフ Method for using a super-slip thin layer characterized by a method for making a super-slip thin layer
JP2014527135A (en) * 2011-07-05 2014-10-09 マーレ インターナショナル ゲゼルシャフト ミット ベシュレンクテル ハフツング Cylinder sliding surface manufacturing method and cylinder liner
US9488126B2 (en) 2011-07-05 2016-11-08 Mahle International Gmbh Method for producing a cylinder liner surface and cylinder liner
KR20140079734A (en) * 2012-12-19 2014-06-27 가부시키가이샤 호리바 에스텍 Sealing member and method of manufacturing the same
JP2017057825A (en) * 2015-09-18 2017-03-23 トヨタ自動車株式会社 Surface processing method for cylinder bore surface
WO2019225624A1 (en) * 2018-05-22 2019-11-28 帝国イオン株式会社 Wear-resistant coating film, wear-resistant member, method for producing wear-resistant coating film, and sliding mechanism
JP2019203196A (en) * 2018-05-22 2019-11-28 帝国イオン株式会社 Wear resistant film, wear resistant member, method for manufacturing wear resistant film, and sliding mechanism
US11318706B2 (en) 2018-05-22 2022-05-03 Teikoku Ion Co., Ltd Wear-resistant coating film, wear-resistant member, method for producing wear-resistant coating film, and sliding mechanism

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