JPS61165870U - - Google Patents
Info
- Publication number
- JPS61165870U JPS61165870U JP5031385U JP5031385U JPS61165870U JP S61165870 U JPS61165870 U JP S61165870U JP 5031385 U JP5031385 U JP 5031385U JP 5031385 U JP5031385 U JP 5031385U JP S61165870 U JPS61165870 U JP S61165870U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- air
- supply
- air source
- door
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5031385U JPH0427737Y2 (lv) | 1985-04-03 | 1985-04-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5031385U JPH0427737Y2 (lv) | 1985-04-03 | 1985-04-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61165870U true JPS61165870U (lv) | 1986-10-15 |
| JPH0427737Y2 JPH0427737Y2 (lv) | 1992-07-03 |
Family
ID=30568326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5031385U Expired JPH0427737Y2 (lv) | 1985-04-03 | 1985-04-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0427737Y2 (lv) |
-
1985
- 1985-04-03 JP JP5031385U patent/JPH0427737Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0427737Y2 (lv) | 1992-07-03 |
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