JPS61165870U - - Google Patents

Info

Publication number
JPS61165870U
JPS61165870U JP5031385U JP5031385U JPS61165870U JP S61165870 U JPS61165870 U JP S61165870U JP 5031385 U JP5031385 U JP 5031385U JP 5031385 U JP5031385 U JP 5031385U JP S61165870 U JPS61165870 U JP S61165870U
Authority
JP
Japan
Prior art keywords
chamber
air
supply
air source
door
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5031385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0427737Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5031385U priority Critical patent/JPH0427737Y2/ja
Publication of JPS61165870U publication Critical patent/JPS61165870U/ja
Application granted granted Critical
Publication of JPH0427737Y2 publication Critical patent/JPH0427737Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
JP5031385U 1985-04-03 1985-04-03 Expired JPH0427737Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5031385U JPH0427737Y2 (enrdf_load_stackoverflow) 1985-04-03 1985-04-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5031385U JPH0427737Y2 (enrdf_load_stackoverflow) 1985-04-03 1985-04-03

Publications (2)

Publication Number Publication Date
JPS61165870U true JPS61165870U (enrdf_load_stackoverflow) 1986-10-15
JPH0427737Y2 JPH0427737Y2 (enrdf_load_stackoverflow) 1992-07-03

Family

ID=30568326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5031385U Expired JPH0427737Y2 (enrdf_load_stackoverflow) 1985-04-03 1985-04-03

Country Status (1)

Country Link
JP (1) JPH0427737Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0427737Y2 (enrdf_load_stackoverflow) 1992-07-03

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