JPS6116528Y2 - - Google Patents
Info
- Publication number
- JPS6116528Y2 JPS6116528Y2 JP10951180U JP10951180U JPS6116528Y2 JP S6116528 Y2 JPS6116528 Y2 JP S6116528Y2 JP 10951180 U JP10951180 U JP 10951180U JP 10951180 U JP10951180 U JP 10951180U JP S6116528 Y2 JPS6116528 Y2 JP S6116528Y2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- pair
- mass
- coupling
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000008878 coupling Effects 0.000 claims description 15
- 238000010168 coupling process Methods 0.000 claims description 15
- 238000005859 coupling reaction Methods 0.000 claims description 15
- 230000001133 acceleration Effects 0.000 claims description 3
- 230000010287 polarization Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Connection Of Plates (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10951180U JPS6116528Y2 (US07498051-20090303-C00003.png) | 1980-08-01 | 1980-08-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10951180U JPS6116528Y2 (US07498051-20090303-C00003.png) | 1980-08-01 | 1980-08-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5732853U JPS5732853U (US07498051-20090303-C00003.png) | 1982-02-20 |
| JPS6116528Y2 true JPS6116528Y2 (US07498051-20090303-C00003.png) | 1986-05-21 |
Family
ID=29470705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10951180U Expired JPS6116528Y2 (US07498051-20090303-C00003.png) | 1980-08-01 | 1980-08-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6116528Y2 (US07498051-20090303-C00003.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8257505B2 (en) | 1996-09-30 | 2012-09-04 | Akrion Systems, Llc | Method for megasonic processing of an article |
-
1980
- 1980-08-01 JP JP10951180U patent/JPS6116528Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8257505B2 (en) | 1996-09-30 | 2012-09-04 | Akrion Systems, Llc | Method for megasonic processing of an article |
| US8771427B2 (en) | 1996-09-30 | 2014-07-08 | Akrion Systems, Llc | Method of manufacturing integrated circuit devices |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5732853U (US07498051-20090303-C00003.png) | 1982-02-20 |
