JPS6116528Y2 - - Google Patents

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Publication number
JPS6116528Y2
JPS6116528Y2 JP10951180U JP10951180U JPS6116528Y2 JP S6116528 Y2 JPS6116528 Y2 JP S6116528Y2 JP 10951180 U JP10951180 U JP 10951180U JP 10951180 U JP10951180 U JP 10951180U JP S6116528 Y2 JPS6116528 Y2 JP S6116528Y2
Authority
JP
Japan
Prior art keywords
piezoelectric element
pair
mass
coupling
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10951180U
Other languages
Japanese (ja)
Other versions
JPS5732853U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10951180U priority Critical patent/JPS6116528Y2/ja
Publication of JPS5732853U publication Critical patent/JPS5732853U/ja
Application granted granted Critical
Publication of JPS6116528Y2 publication Critical patent/JPS6116528Y2/ja
Expired legal-status Critical Current

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Description

【考案の詳細な説明】 この考案は、圧電素子を利用する剪断形加速度
ピツクアツプの改良、特に圧電素子と質量体との
結合固定手段の改良に関し、その目的は主として
製造組立の容易性を確保する点にある。
[Detailed description of the invention] This invention relates to an improvement of a shear-type acceleration pick-up that utilizes a piezoelectric element, and in particular to an improvement of the means for coupling and fixing the piezoelectric element to a mass body.The purpose of this invention is to primarily ensure ease of manufacturing and assembly. At the point.

剪断形加速度ピツクアツプは、ベースが振動す
ることによりベースから突出する支持体と質量体
とに結合固定された圧電素子に生起する面辷り歪
を利用するものであり、この結合固定手段の如何
は重要である。しかして、圧電素子と支持体およ
び質量体との結合手段として通常採用される手段
は接着剤による結合であるが、経年変化に基づく
接着剤の剥離等、機械的強度の面で不十分であ
り、問題点を有していた。これに対して圧電素子
と支持体および質量体に貫通孔を設け、この貫通
孔を介して三者をボルトで緊締して結合固定する
手段が提案されている。この従来例を第1A図、
第1B図に沿つて説明する。1は中心部に貫通孔
1Aを有する一対の圧電素子であり、分極処理
後、分極方向(矢印)に平行な一双の面にそれぞ
れ電極を設けてなる。分極方向を揃えたこの一対
の圧電素子1,1はベース2から突出する支持体
3を介して対向配置されている。尚3Aは支持体
3に形成された貫通孔である。4は中心部に貫通
孔4Aを有する質量体であり、一対の圧電素子
1,1のそれぞれ外方に対向配置されている。5
は一対の質量体4,4の貫通孔4A,4Aと、一
対の圧電素子1,1の貫通孔1A,1Aと、支持
体3の貫通孔3Aを貫通するボルトであり、その
両端はナツト6,6で緊締されている。従つて、
圧電素子1は支持体3と質量体4とで挾持され、
ボルトで三者は結合固定される。作用について述
べると、いまベース2が振動すると同時に支持体
3が一体となつて動作し、しかも質量体4は振子
の機能を発揮して、圧電素子1に面辷り運動が作
用し、出力を生じることとなる。
The shear type acceleration pickup utilizes the sliding strain that occurs in a piezoelectric element that is fixedly coupled to a support body that protrudes from the base and a mass body when the base vibrates, and the method of this coupling and fixing is important. It is. However, the bonding method that is usually used to connect the piezoelectric element to the support and mass body is adhesive bonding, but it is insufficient in terms of mechanical strength, such as peeling of the adhesive due to aging. , had some problems. On the other hand, a method has been proposed in which a through hole is provided in the piezoelectric element, the support body, and the mass body, and the three are fastened and fixed together with bolts through the through hole. This conventional example is shown in Figure 1A.
This will be explained along with FIG. 1B. Reference numeral 1 denotes a pair of piezoelectric elements having a through hole 1A in the center thereof, and after polarization treatment, electrodes are provided on each of a pair of surfaces parallel to the polarization direction (arrow). This pair of piezoelectric elements 1, 1 having the same polarization direction are placed opposite to each other with a support 3 protruding from a base 2 interposed therebetween. Note that 3A is a through hole formed in the support body 3. Reference numeral 4 denotes a mass body having a through hole 4A in the center thereof, and is disposed opposite to the outside of the pair of piezoelectric elements 1, 1, respectively. 5
is a bolt that passes through the through holes 4A, 4A of the pair of mass bodies 4, 4, the through holes 1A, 1A of the pair of piezoelectric elements 1, 1, and the through hole 3A of the support body 3, and both ends thereof are connected to nuts 6. ,6 is tightened. Therefore,
The piezoelectric element 1 is held between a support body 3 and a mass body 4,
The three parts are connected and fixed with bolts. To explain the action, the base 2 vibrates and the support 3 moves together as a unit, and the mass body 4 exhibits the function of a pendulum, causing a sliding motion to act on the piezoelectric element 1, producing an output. That will happen.

上記従来の構成では確しかに圧電素子は支持体
と質量体とに強固に結合されるも、支持体のみな
らず圧電素子にも貫通孔を設ける必要がある。そ
の為、圧電素子は割れ易く、また貫通孔の部分だ
け静電容量が減少する不都合を生じていた。更に
ボルトと支持体あるいは圧電素子とが接触する
と、ベースと質量体とが一体化することとなり、
面辷り運動が圧電素子に生じないこととなる。従
つてボルトは貫通孔1A,3Aの中心に位置する
ごとく注意深く組み立てなければならず製造組立
に難点を有している。
Although the piezoelectric element is certainly firmly connected to the support and the mass body in the conventional configuration described above, it is necessary to provide a through hole not only in the support but also in the piezoelectric element. Therefore, the piezoelectric element is easily broken, and the capacitance decreases only at the through hole. Furthermore, when the bolt and the support or the piezoelectric element come into contact, the base and the mass become integrated,
No sliding movement occurs in the piezoelectric element. Therefore, the bolts must be assembled carefully so that they are located in the center of the through holes 1A and 3A, which poses a difficulty in manufacturing and assembly.

本考案は、上記欠点に鑑み貫通孔を有しない圧
電素子を用いて十分強固な結合固定手段を提供す
るものである。
In view of the above drawbacks, the present invention provides a sufficiently strong coupling and fixing means using a piezoelectric element having no through holes.

以下、本考案の一実施例を図に沿つて説明す
る。第2A図、第2B図に於いて、11は分極処
理後、分極方向(矢印)に平行な一双の面にそれ
ぞれ電極を設けられた圧電素子である。13はベ
ース12から突出する支持体である。一対の圧電
素子11,11は、この支持体13を介して対向
配置されている。14は一対の圧電素子11,1
1のそれぞれ外方に対向配置された質量体であ
る。質量体14は、圧電素子11と当接する本体
14Aと本体14Aの両端に設けられた結合端部
14Bとから構成されている。一方の結合端部1
4Bにはボルト等の結合固定部材15が貫通する
結合貫通孔15Aが、他方の結合端部14Bには
結合固定部材15が螺着結合する結合盲孔15B
が形成されている。15Cは結合固定部材15の
頭部である。一対の質量体14に関して、結合貫
通孔15Aとの結合盲孔15Bを互い違に形成し
たのは、一対の質量体14のバランスがくずれる
事を防止する為である。またこの実施例では、結
合端部14Bの一方を結合盲孔15Bとしている
が、必ずしも盲孔である必要はなく貫通孔にして
貫通したボルト等の結合固定部材15をナツトで
緊締しても同様の効果が得られるものである。要
は一対の質量体14同士を互いに強固に結合固定
部材15で結合できればよい。さらにこの実施例
では、一般にピツクアツプのケースが加工上の容
易性から円筒状に形成されていることを考慮して
質量体14の外形を円弧状に形成しているが、ケ
ース形状に合わせて適宜変更し得るものである。
即ち第3図に示すごとく質量体14の外形を略四
辺形に構成し、ピツクアツプのケースが立方形状
の場合に適合させることも可能である。また圧電
素子11は一対に限定される必要はなく、所望の
数を設置できる。
An embodiment of the present invention will be described below with reference to the drawings. In FIGS. 2A and 2B, reference numeral 11 denotes a piezoelectric element having electrodes provided on a pair of surfaces parallel to the polarization direction (arrow) after polarization treatment. 13 is a support body protruding from the base 12. A pair of piezoelectric elements 11 and 11 are arranged opposite to each other with this support 13 in between. 14 is a pair of piezoelectric elements 11, 1
The mass bodies are arranged facing each other outwardly from each other. The mass body 14 includes a main body 14A that comes into contact with the piezoelectric element 11, and coupling ends 14B provided at both ends of the main body 14A. One joint end 1
4B has a coupling through hole 15A through which a coupling fixing member 15 such as a bolt passes, and the other coupling end 14B has a coupling blind hole 15B through which the coupling fixing member 15 is screwed.
is formed. 15C is the head of the coupling and fixing member 15. Regarding the pair of mass bodies 14, the reason why the coupling blind holes 15B and the coupling through holes 15A are formed alternately is to prevent the pair of mass bodies 14 from becoming unbalanced. Further, in this embodiment, one of the joint end portions 14B is made into a blind joint hole 15B, but it does not necessarily have to be a blind hole, and the joint fixing member 15 such as a bolt passed through the hole may be tightened with a nut. The following effects can be obtained. In short, it is sufficient that the pair of mass bodies 14 can be firmly connected to each other by the connecting fixing member 15. Furthermore, in this embodiment, the outer shape of the mass body 14 is formed into an arc shape considering that pick-up cases are generally formed into a cylindrical shape for ease of processing. It is subject to change.
That is, as shown in FIG. 3, the outer shape of the mass body 14 can be configured to be substantially quadrilateral, so that it can be adapted to the case where the pickup case is cubic. Furthermore, the number of piezoelectric elements 11 need not be limited to one pair, and a desired number can be installed.

このように構成したものに於て、質量体14と
結合固定部材15の合計質量を6gγ、圧電素子
11は電極寸法5mm×5mm、厚み1mm、容量
260PFのものを用いた場合、出力感度が30mv/
gが得られ実用上何ら問題はなかつた。尚、この
時の圧電素子はPZTを、質量体、ベースおよび支
持体はステンレスを使用した。
In this configuration, the total mass of the mass body 14 and the coupling and fixing member 15 is 6 gγ, the piezoelectric element 11 has electrode dimensions of 5 mm x 5 mm, thickness of 1 mm, and capacity.
When using a 260PF one, the output sensitivity is 30mv/
g was obtained, and there was no practical problem. In this case, the piezoelectric element was made of PZT, and the mass body, base, and support were made of stainless steel.

以上述べたごとく本考案は、一対の質量体と支
持体とで圧電素子を挾持し、一対の質量体の両端
部を結合することにより、圧電素子と質量体との
結合固定をはかつている。従つて圧電素子自体に
貫通孔を設ける手間が省け、また機械的強度も十
分保たれ、静電容量の減少もなく好都合である。
さらに結合固定も簡単に行え、製造組立上非常に
容易となるものである。
As described above, in the present invention, the piezoelectric element is held between a pair of mass bodies and a support body, and the piezoelectric element and the mass body are coupled and fixed by connecting both ends of the pair of mass bodies. Therefore, there is no need to provide a through hole in the piezoelectric element itself, the mechanical strength is maintained sufficiently, and there is no decrease in capacitance, which is advantageous.
Furthermore, it can be easily connected and fixed, making manufacturing and assembly extremely easy.

【図面の簡単な説明】[Brief explanation of the drawing]

第1A図は従来例を示す側断面図、第1B図は
同じく平面図、第2A図は本考案の一実施例を示
す一部断面の側面図、第2B図は同じく平面図、
第3図は他の実施例を示す平面図。 11:圧電素子、12:ベース、13:支持
体、14:質量体、14A:本体、14B:結合
端部、15:結合固定部材。
1A is a side sectional view showing a conventional example, FIG. 1B is a plan view, FIG. 2A is a partially sectional side view showing an embodiment of the present invention, and FIG. 2B is a plan view,
FIG. 3 is a plan view showing another embodiment. 11: piezoelectric element, 12: base, 13: support body, 14: mass body, 14A: main body, 14B: joint end, 15: joint fixing member.

Claims (1)

【実用新案登録請求の範囲】 ベース12から突出する支持体13を介してま
ず圧電素子11,11が対向配置され、さらに一
対の質量体14,14が対向配置されたものにお
いて、 前記質量体14が、前記圧電素子11と当接す
る本体14Aと、この本体14Aの両端に形成さ
れた結合端部14Bとで構成されており、 前記一対の質量体14の双方を、その結合端部
14Bにおいて結合固定部材15で結合固定して
なる剪断形加速度ピツクアツプ。
[Claims for Utility Model Registration] First, piezoelectric elements 11, 11 are disposed facing each other with a support 13 protruding from a base 12, and a pair of mass bodies 14, 14 are further disposed facing each other, wherein said mass body 14 is composed of a main body 14A that comes into contact with the piezoelectric element 11, and coupling ends 14B formed at both ends of the main body 14A, and both of the pair of mass bodies 14 are coupled at the coupling ends 14B. A shear type acceleration pick-up which is connected and fixed by a fixing member 15.
JP10951180U 1980-08-01 1980-08-01 Expired JPS6116528Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10951180U JPS6116528Y2 (en) 1980-08-01 1980-08-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10951180U JPS6116528Y2 (en) 1980-08-01 1980-08-01

Publications (2)

Publication Number Publication Date
JPS5732853U JPS5732853U (en) 1982-02-20
JPS6116528Y2 true JPS6116528Y2 (en) 1986-05-21

Family

ID=29470705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10951180U Expired JPS6116528Y2 (en) 1980-08-01 1980-08-01

Country Status (1)

Country Link
JP (1) JPS6116528Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8257505B2 (en) 1996-09-30 2012-09-04 Akrion Systems, Llc Method for megasonic processing of an article

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8257505B2 (en) 1996-09-30 2012-09-04 Akrion Systems, Llc Method for megasonic processing of an article
US8771427B2 (en) 1996-09-30 2014-07-08 Akrion Systems, Llc Method of manufacturing integrated circuit devices

Also Published As

Publication number Publication date
JPS5732853U (en) 1982-02-20

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