JPS61164998A - 薬品の自動供給装置 - Google Patents

薬品の自動供給装置

Info

Publication number
JPS61164998A
JPS61164998A JP478785A JP478785A JPS61164998A JP S61164998 A JPS61164998 A JP S61164998A JP 478785 A JP478785 A JP 478785A JP 478785 A JP478785 A JP 478785A JP S61164998 A JPS61164998 A JP S61164998A
Authority
JP
Japan
Prior art keywords
supply
chemical
pressure
chemical liquid
piping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP478785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0156999B2 (enExample
Inventor
藤永　清久
荒井　英輔
山下　朝朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP478785A priority Critical patent/JPS61164998A/ja
Publication of JPS61164998A publication Critical patent/JPS61164998A/ja
Publication of JPH0156999B2 publication Critical patent/JPH0156999B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pipeline Systems (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
JP478785A 1985-01-14 1985-01-14 薬品の自動供給装置 Granted JPS61164998A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP478785A JPS61164998A (ja) 1985-01-14 1985-01-14 薬品の自動供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP478785A JPS61164998A (ja) 1985-01-14 1985-01-14 薬品の自動供給装置

Publications (2)

Publication Number Publication Date
JPS61164998A true JPS61164998A (ja) 1986-07-25
JPH0156999B2 JPH0156999B2 (enExample) 1989-12-04

Family

ID=11593502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP478785A Granted JPS61164998A (ja) 1985-01-14 1985-01-14 薬品の自動供給装置

Country Status (1)

Country Link
JP (1) JPS61164998A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05319500A (ja) * 1992-05-13 1993-12-03 Nec Corp 薬品供給装置
US6042649A (en) * 1996-07-27 2000-03-28 Samsung Electronics Co., Ltd. Polyimide coating device having a polyimide supply status sensing device
JP2008531426A (ja) * 2005-03-04 2008-08-14 エドワーズ・バキューム・インコーポレーテッド 大量流体送出システム内の流体の状態の制御
US10646920B2 (en) 2009-12-10 2020-05-12 Novelis Inc. Method of forming sealed refractory joints in metal-containment vessels, and vessels containing sealed joints

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS555348A (en) * 1978-06-22 1980-01-16 Cornelius Co Carbonated bevarage distributing method and apparatus
JPS58114973U (ja) * 1982-02-01 1983-08-05 株式会社東芝 逆止弁異常検出装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS555348A (en) * 1978-06-22 1980-01-16 Cornelius Co Carbonated bevarage distributing method and apparatus
JPS58114973U (ja) * 1982-02-01 1983-08-05 株式会社東芝 逆止弁異常検出装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05319500A (ja) * 1992-05-13 1993-12-03 Nec Corp 薬品供給装置
US6042649A (en) * 1996-07-27 2000-03-28 Samsung Electronics Co., Ltd. Polyimide coating device having a polyimide supply status sensing device
JP2008531426A (ja) * 2005-03-04 2008-08-14 エドワーズ・バキューム・インコーポレーテッド 大量流体送出システム内の流体の状態の制御
US10646920B2 (en) 2009-12-10 2020-05-12 Novelis Inc. Method of forming sealed refractory joints in metal-containment vessels, and vessels containing sealed joints

Also Published As

Publication number Publication date
JPH0156999B2 (enExample) 1989-12-04

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