JPS61164998A - Automatic feeder for chemical - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention relates to an automatic chemical supply device that continuously and automatically supplies liquid chemicals.

[Prior art]

Conventionally, the supply device for this scale has a plurality of storage tanks storing chemical liquids, and by pumping gas for pressurizing chemical liquids into these storage tanks, liquids can be continuously supplied from these storage tanks. There is a device to supply it.

Conventionally, in such a supply device, in order to selectively supply the chemical liquid FF feeding gas to each storage tank, it was provided in the supply piping for the chemical liquid pressure feeding gas. ! There was no means for controlling the two valves and a plurality of valves provided in the supply piping for the chemical solution in order to selectively supply the chemical solution to the outside.

[Problem that the invention attempts to solve]

The conventional supply device as described above has the following practical problems.

(1) When the supply device is put into operation, if chemical solution is not supplied from the supply port of the supply piping connected to this device, possible causes of failure include a malfunction of the sensor for monitoring the remaining amount of chemical solution, or a malfunction of the control valve. There are various causes such as failure and filter clogging.

However, it is difficult to immediately determine the cause, especially when the numerous air valves and electromagnetic valves used to control the supply of chemical liquids malfunction. This took a considerable amount of time and required a great deal of effort, such as removing each valve from the piping and inspecting it.

(2) Additionally, there were the following shortcomings regarding the management and maintenance of the chemical supply equipment and supply piping.

(i) If the chemical solution will not be used for a long period of time, drain the chemical solution from the pipes inside the chemical supply device and the supply pipes connected to this device, dry it with nitrogen gas blow, etc., and then dry it with nitrogen gas etc. It is necessary to enclose the piping. At this time,
People had to move along the supply piping under the floor or on the ceiling, and open and close the valves manually, which was extremely troublesome.

(i) When a part of the supply piping is not used for a long period of time, that piping section is filled with nitrogen and maintenance is performed by monitoring pressure changes from a pressure gauge connected to the piping. However, because pressure gauges can only be checked periodically, even if nitrogen gas leaks and is replaced with air, it is not immediately noticed, and the replacement time is often long, which can accelerate the deterioration of piping. there were.

[Means for solving problems]

In order to solve the above-mentioned conventional problems, the automatic chemical supply device according to the present invention includes a valve that selectively switches and introduces the gas for pressurizing the chemical liquid into each storage tank in the supply piping for the gas for pressurizing the chemical liquid to the storage tanks. , is equipped with a pressure gauge to detect the pressure inside the pipe, while the pipe for supplying the chemical solution from the storage tank is equipped with a pressure gauge to detect the pressure inside the pipe.
It is equipped with a valve that selectively switches and supplies chemical liquid from each storage tank and a pressure gauge that detects the pressure inside the piping, and the valves and pressure gauges in both piping can be configured into various forms by remote control. It is characterized in that it is connected to one controller that performs related switching control and monitors pressure changes in the piping based on detection signals of the respective pressure gauges.

〔Example〕

Embodiments of the present invention will be described below based on the drawings.

1 to 14 show the overall configuration of the supply device of the present invention, which has four storage tanks in this example.

In the figure, 1 is a nitrogen gas supply port for pressure-feeding a chemical solution;
This supply port 1 communicates with a nitrogen gas supply pipe 1 via a hand valve 2a, a pressure regulator 4 having a pressure gauge 3a, and a filter unit 5. This supply pipe L+
is connected to a pressure switch 6 via a hand valve 2b.

This pressure switch 6 purges the high pressure nitrogen gas when the nitrogen pressure exceeds a specified value. The supply piping 1 branches into four parts, and these are flexible tubes 7a, 7b, and 7C.

Couplers 8a, 8b, 8c connected to 7d,
8d by four storage tanks 9a, 9b, 9c, 9
d. Each storage tank 9a,
Air valves 10a, 10b, 10C, 1Q are provided in the supply piping Ll for 9b, 9c, 9d, respectively.
d is interposed.

Further, in the figure, reference numeral 11 denotes a chemical solution supply port for supplying the chemical solution to the outside, and this supply port 11 includes a hand valve 2c, a pressure gauge 3d, and a liquid filter unit 1.
2, a pressure gauge 3c, a handle valve 2d, a buff 7, a tank unit 13, and a chemical liquid supply pipe connected to the tank unit 2. Details of the buffer tank unit 13 will be described later. The supply piping 2 branches into four flexible tubes 14a, 14b, 14c,
Coupler 15a, 15b, 15c connected to 14d.

15d provides four storage tanks 9a, 9b,
It is connected to each of 9C and 9d. Air valves 16a, 16b, respectively, in the supply connections @L2 for each storage tank 9a, 9b, 9c, 9d.

16c and 16d are interposed.

These storage tanks 9a, 9b, 9c,
Air valves 17a, 17b, 17c, 1 are installed between the supply pipes L+ and L2 every 9d, respectively.
7d is connected. In addition, each storage tank ga,
9b.

Sensors 18a, 18b, 18c, and 18d for monitoring the remaining amount of the chemical solution are provided for the sensors 9c and 9d.

Further, in the figure, 19 is a gas handling port, which communicates with the gas handling pipe @L3 via a pressure gauge 3d.

This piping 3 branches into four, and they are each storage tank 9a, 9b, 9c.

Air valve 9a in supply pipe L1 every 9d.

It is connected to the latter stage of the piping on the outlet side of 9b, 9c, and 9d. In the piping L3 for each storage tank 9a, 9b, 9c, 9d, there are air valves 20a, 2, respectively.
0b, 20c, and 20d are intervening saletails.

2, 3 and 4, 21 is a warning lamp, 22 is an exhaust duct, 23 is a control panel, 24 is a controller, 25 is an exhaust pipe connection port, 26 is a power cord connection port, and 27 is a control Input signal cord connection port, 2
8 is a pressure air intake for driving the air valve. The aforementioned pressure sensors 3a to 3d, air valves 10a to 1od,
16a-16d +, 17a-17d, 20a
~20d, chemical liquid external monitoring sensors 18a~18d
, buff 7 tank unit 13, and alarm lamp 21
are all under the control of the controller 24. Details of these controls can be monitored on the controller panel 23. Also, from the controller panel 23, the desired 1 lil+.

Control commands can be sent to controller 24.

Next, the function of the controller 24 and the operation of the supply device will be explained in each case.

[When operating the g5 liquid supply device] To operate this device, first turn on the power and close all air valves 10a to 10d, 16a to 16d, 17.
Confirm that hand valves a to 17d and 20a to 20d are closed and hand valves 28 to 2d are open. Next, the pressure regulator 4 is adjusted while checking the pressure with the pressure gauge 3a, and nitrogen gas at a desired pressure is allowed to flow into the apparatus through the filter unit 5 from the nitrogen gas supply port 1. When the nitrogen pressure exceeds a specified pressure, the pressure switch 6 is activated to purge the nitrogen gas, thereby making the apparatus safer. After the nitrogen gas flows in, when the air valve 10a is opened, the nitrogen gas passes through the flexible tube 7a and the coupler 8a and enters the chemical storage tank 9a, and the pressure inside the tank 9a rises to the pressure of the nitrogen gas flowing into it. When the air valve 16a is opened in this state, the chemical liquid in the tank 9a passes through the coupler 15a and the flexible tube 14a, passes through the buffer tank unit 13, and further enters the chemical filter unit 12, where dust in the chemical liquid is removed. The chemical solution is then fed under pressure to the supply pipe connected to the chemical solution supply port 11. The pressure gauge 3c detects the pressure of the chemical liquid fed from the chemical liquid storage tank 9a, and the pressure gauge 3b detects the pressure of the chemical liquid passed through the chemical filter unit 12 and fed to the supply pipe. ing.

When the chemical liquid in the chemical liquid storage tank 9a becomes empty while the chemical liquid is being force-fed to the supply pipe, the chemical liquid is automatically force-fed from the adjacent chemical liquid storage tank 9b.

That is, the chemical liquid remaining base monitoring sensor 18a detects that the chemical liquid in the chemical liquid storage tank 9a is empty, and sends a signal corresponding to this to the controller 24 of the device. When the controller 0-524 receives this signal indicating the empty state, it displays the empty status of the empty tank on the control panel 23, and also sets the air l<)tt buttons 10a and 16a to the control panel. Next, the controller 24 controls the air valve 1
0b and 16b, and nitrogen gas is supplied to the chemical solution supply tank 9b via the flexible tube 7 () and the coupler 8b.
The chemical solution is forced into the supply pipe via the coupler 15b and the flexible tube 14b. As described above, the ceiling-hanging chemical liquid is stored in each storage tank 9a, 9b, 9.
It can be supplied continuously from c to 9d.

[When replacing the chemical storage tank] When the chemical storage tank 9a is empty, the air valve 10a
, 16a, 17a, and 20a are closed. At this time, when the tank replacement button (not shown) of the tank 9a on the controller panel 23 is pressed, the air valve 20
The nitrogen gas in the tank 9a flows through the coupler 8a and the flexible tube 7a to the gas vent 1.
9, and as a result, the pressure inside the tank 9a becomes normal. After achieving this state, the couplers 3a and 15a are removed and the empty tank 9a is removed. Next, a new chemical liquid storage tank filled with a chemical liquid is placed on the chemical liquid remaining amount monitoring sensor 18a, and the coupler 83.15a is connected to the tank. And 1il to confirm that this operation was successful.
After confirming f, check the tank 9 on the controller panel 23.
Return the tank replacement button a, and press controller 2.
4 makes the air valve 20a a lever. During this time, the chemical solution is being supplied from another tank, so the chemical solution is continuously supplied.

[When discovering a malfunction in the air valve] Even though the chemical supply device is in operation,
There may be cases where the chemical solution is not supplied from the supply port 11 of the supply pipe. One of the causes of failure in this case is that air valves 10a and 10d, 16a to 16d,
Failures of 17a to 17d and 20a to 20d are possible. In this chemical supply device, the method for detecting a malfunctioning air valve is automated as follows.

That is, all the air valves 10a to 10d, 16a to 16d,
With air valves 17a to 17d and 20a to 20d in the leap state, press the air valve test button (shown in the figure) attached to the control panel 23.However, air valves 10a to 10d, 16a to 16d,
17a to 17d and 20a to 20d are all normally closed type air valves.

First, the T-absive 10a in the system of the chemical solution storage tank 9a is
, 16a, 17a, and 20a will be explained. There is a very low probability that two or more of these four air valves will fail at the same time. Therefore, controller 2
The controller 24 sends control signals for opening and closing the air valves in the order of (+), (n), and GiD at regular time intervals from 4 to 4, and detects the pressure gauge reading at that time using the controller 24.
The first malfunctioning air valve is found and the location of the faulty PJ is displayed on the control panel 23.

(i) Air valve 108 is open, air valve 16a is open.

If these air valves 10a and 16a are both normal, the chemical liquid is sent out from the tank 9a and the pressure gauge 3c
shows a value that almost matches the nitrogen pressure.

When this value is not shown, either the air valve 10a or 16a is malfunctioning.

(H) F valve 16a closed, air valve 20alJ
.

If both the air valves 10a, 20a are normal, nitrogen gas flows out to the gas vent port 19 through these valves 10a, 20a. At this time, pressure changes can be detected with the pressure gauge 3d. Now, for example, in the case where it is confirmed that both the air valves 10a and 16a are normal in the valve test sequence (+) above, O) here.
If no pressure change is detected by the pressure gauge 3d during the valve test sequence, it means that the air valve 20a is malfunctioning. On the other hand, if it is confirmed in the valve test sequence that either the air valve 10a or 16a is malfunctioning, (i
) When a change in pressure is detected on the pressure gauge 3d during the 17 valve test 1 to sequence, the air valve 16
This means a failure of a.

Further, if no pressure change is detected at this time, it means that the air valve 10a is malfunctioning.

IX) I Abarbu I Qa rJ]1Ft<)Lt7
2 Qa rJl, air valve 17a open.

If the F-valve 17a is in a normal state, the nitrogen gas passes through the air valve 17a and pressurizes the chemical solution in the pipe, and the pressure gauge 3c can detect a pressure that approximately corresponds to the nitrogen pressure. If the mouth pressure is not detected, it means that the F-valve 17a is malfunctioning.

After the series of valve test sequences CD, (i), and H are completed, the air valves 10a and 16a.

17a and 20a are open, and display the faulty air valve among them on the control panel 23. Next, open the air valve 10 in the system of the chemical storage tank 9b.
b, 16b, 17b, 20b automatically transitions to the death 1-sequence a (I!! chestnut juice storage tank 9c, 9
The air valve test for system d proceeds in the same manner.

In this way, a malfunctioning valve can be easily found among a large number of valves. Therefore, the labor and time required for removing conventional valves from piping can be saved.

"When detecting functional deterioration of the filter" Even when the filter used in the filter unit 12 becomes clogged during long-term use, the chemical solution is no longer supplied from the supply port 11 of the supply pipe. At this time,
By detecting pressure changes in the pressure gauges 3b and 3c using the controller 24, clogging of the filter can be indicated. That is, when the chemical solution is flowing normally, the pressure difference indicated by the pressure gauges 3b and 3c installed before and after the filter unit 12 indicates the pressure loss of the filter under normal conditions. The pressure loss at this time is approximately constant, but if the filter ruptures, this pressure loss decreases, and if the filter becomes clogged, this pressure loss tends to increase. Therefore, the pressure loss at the mouth is monitored by the controller 24,
When the pressure loss value changes more than the specified value, the control panel 23 displays the functional deterioration of the filter.

Because it has such a function, the supply port 1 of the supply piping
If the chemical solution is not supplied from 1 and the cause is the filter, it can be easily determined by simply looking at the display on the control panel 23, saving the trouble of removing the filter and examining it in detail.

By the way, in the past, filters were generally clogged after the chemical solution supply device was installed and used for a considerable period of time. In many cases, the filter is inspected after investigating other causes.As a result, it takes time to find the cause of the clogged filter, and it is necessary to remove the filter.
I had to investigate carefully.

Next, details of the buffer tank unit 13 mentioned above will be explained with reference to FIG.

The purpose of installing the buffer tank unit 13 is to ensure continuous supply of chemical solution and to ensure safety. First, in order to clarify the purpose of the installation, problems that occur when the buff 7 tank unit 13 is not installed will be explained.

For example, when replacing the empty chemical liquid storage tank 9a, air remains in the flexible tube 14a, and this air is forced into the supply pipe 2.

Furthermore, if the chemical solution remaining amount monitoring sensor 18a fails, even if the chemical solution storage tank 9a becomes empty, the mulberry solution remaining monitoring sensor 18a will not detect that it is empty, so the flexible tube 7a and coupler 88
The nitrogen gas that has flowed into the chemical liquid storage tank 9a through the coupler 15a, the flexible tube 14a, the filter unit 12, and the chemical liquid supply port 11,
4r flows into the supply pipe. As a result of the gas being released at the supply port of the supply piping, the chemical solution may protrude or nitrogen gas may blow out, causing safety problems and requiring the filter unit 12 to be handled as a gas. Problems such as failure to do so may occur.

The buffer tank unit 13 is provided to solve such problems.

In FIG. 5, reference numeral 29 denotes a buffer tank, which has a flow path through which a chemical solution is introduced from the upper side via an air valve 30 and a chemical solution inflow pipe 31, and a chemical solution is discharged from the bottom side via a chemical solution outflow pipe 32 and an air valve 33. It is part of the supply piping L2. A liquid level detector 34 is submerged in the buffer tank 29 to detect when the liquid level in the tank 29 has fallen to a lower liquid level detection position P. buffer tank 2
The upper part of 9 is connected to a discharge pipe via a gas pumping pipe 35, a chemical liquid detector 36, an air valve 37, a filter 38, and a check valve 39.

To operate the buffer tank unit 13, open the air pal 730 with the air valve 37 in between and with the air valve 33 open. At this time, the chemical solution is released while causing the air in the buffer tank 29 to flow out from the gas exhaust pipe 35.
The chemical solution flows into the buffer tank 29 from the chemical solution inflow pipe 31 .

The chemical liquid is filled in the Balanoa tank 29, and the chemical liquid detection 33
When the chemical liquid is detected by 6, the air valve 37 is opened, and the air valve 33 is opened. Thereby, the chemical liquid flowing into the buffer 7 tank 29 from the chemical liquid inflow pipe 31 always flows out toward the filter unit 12 through the chemical liquid outflow pipe 32. Here, for example, the chemical liquid inflow pipe 31
When air or nitrogen gas flows in, the buffer 7 tank 29
A gaseous skin forms on the upper part of the body. Furthermore, when nitrogen gas or the like flows in, the liquid level of the chemical solution in the buffer tank 29 is pushed down.

Then, when this liquid level is lowered to the liquid level detection position P of the liquid level detector 32, the liquid level detector 34 is activated, and the controller 24 closes the air valves 30 and 33.
Open 7. As a result, the gas in the bag 1 tank 29 is released from the gas exhaust pipe 35. buff 1 tank 2
When the pressure of the gas in the buffer 9 returns to normal pressure, the air valve 30 is opened to allow the chemical liquid to flow into the buffer 1 tank 29 from the chemical liquid inflow pipe 31. When the buffer tank 29 is filled with the chemical liquid and the chemical liquid is detected by the chemical liquid detector 36, the air valve 37 is closed and the air valve 33 is opened.

As a result, the chemical solution is sent out toward the supply pipe again. Note that the check valve 39 is installed to prevent contamination from the exhaust pipe, and the filter 38 is installed to exclude gaseous dust from the exhaust pipe.

In this way, all the gas generated by the supply device C is removed by the buffer 1 tank unit 13, and only the chemical solution is supplied to the supply pipe. As a result, it is possible to prevent accidents such as nitrogen gas ejection at the chemical liquid supply port, and it is possible to continuously supply the chemical liquid.

By the way, in the past, if the sensor for monitoring the remaining amount of chemical in the chemical storage tank malfunctioned, the sensor would unilaterally display "empty" even if the tank was filled with chemical, or conversely, the sensor would display "empty" even if the tank was filled with chemical. Even if it becomes empty, it will only unilaterally display “full”. In the former case, the chemical solution was not supplied at the supply port of the supply pipe, and it took time to discover that this sensor was malfunctioning. Furthermore, in the latter case, it is usual to notice that the sensor is malfunctioning only after the gas for pressure-feeding the chemical solution passes through the filter from the tank and the gas protrudes from the supply port of the supply pipe. At this time, there were problems such as the need to use a filter to handle gas when repairing the sensor failure and supplying the chemical solution again.

FIG. 6 shows the chemical solution supply port 1 in the chemical solution supply device shown in FIG.
1 shows an example of supply piping connected to 1.

In the figure, 408 to 40d are F valves for controlling the supply piping, 41a to 41 are air valves for controlling the chemical liquid supply port of the supply piping, and 42a to 42d are air valves for controlling the drain pipe connection port, and the chemical liquid is supplied through these air valves. A conduit is configured that leads from the chemical liquid supply port 11 of the device to a total of six chemical liquid supply ports 43a to 43'' and a total of four drain pipe connection ports 44a to 44d.

That is, the main supply pipe 45 connected to the chemical supply port 11 of the chemical supply device "I" is branched into three parts, one of which is connected to the discharge pipe via the F-valve 42a for controlling the stack pipe connection port. It is connected to the connection port 44a.In addition, the other two branched
The trees are supply branch pipes 45a and 46b on the left and right in the figure, and a supply branch pipe 46C branches off from the supply branch pipe 46b on the left side. The right supply branch pipe 46a passes through the supply piping control air valve 40a and then branches into three branches, two of which are connected to the chemical liquid supply port 43a, via the chemical liquid supply port control air valve 410, 41b. 43b, and the other branch path communicates with the exhaust pipe connection port 44b via the exhaust pipe connection port control air valve 42b.

A pressure gauge 47a is provided in the other branch path of the latter.

The supply branch pipe 46b includes a supply pipe control air valve 40b,
40C, it branches into three branches, two of which are connected to chemical supply ports 43c and 43d via chemical supply port control air valves 41c and 41d, and the other branch is an exhaust path. It communicates with the exhaust pipe connection port 44c via a pipe connection port control air valve 42C. A pressure gauge 47b is provided in the other branch path of the latter.

The supply branch pipe 46C includes a supply pipe control air valve 40b,
40d, it branches into three branches, two of which are connected to chemical liquid supply ports 43e and 43r via chemical liquid supply port control air valves 41e and 41f, and the other branch path is an exhaust path. It communicates with an exhaust pipe connection port 44d via a pipe connection port control air valve 42d. A pressure gauge 47c is provided in the other branch path of the latter.

Each exhaust pipe connection port 44a, 44b, 44c, 44d is connected to the exhaust pipe 48. Furthermore, the air valves shown in FIG. 6 are of the normally closed type, and all of them are controlled by the controller 24 of the chemical liquid supply device.

The supply control of the chemical solution in such a supply pipe is performed as follows.

The chemical liquid from the chemical liquid supply port 11 of the medical liquid supply device is fed under pressure to the supply pipe. Here, for example, when supplying the chemical liquid to the supply branch pipe 46b, the supply pipe control air valve 40b,
/Set IOC to U■. At this time, the chemical solution supply port 1ilI
When the IfIl air valve 41C or 41d is opened,
The chemical solution can be used from the chemical solution supply port 43c or 43d. Moreover, when supplying a chemical liquid to the chemical liquid supply branch pipe 46C, it is sufficient to open the supply pipe control air valve 40b and open the supply pipe control air valve 40d. In this way, the air valve is automatically controlled from the control roller 24 of the chemical liquid supply device.

Therefore, there is no need for the worker to crawl on the floor and open and close the hand valves connected in the middle of the piping one by one, unlike in the past, which is advantageous in terms of labor saving.

FIGS. 7 and 8 show examples of configurations added when automating the dust inspection of the supplied chemical solution in the chrysanthemum solution supply of the supply piping. In these figures, 49 is an air valve for controlling the chemical liquid supply port, 50 is a chemical liquid filter, 51 is a hand valve, 52° and 53 are dust detectors, and 54.55
is a controller for a dust detector. dust detector 5
As 2.53, a commercially available product based on a known principle is used. Therefore, detailed drawings and the like will be omitted. Further, the dust detector controllers 54 and 55 are under the control of the chemical solution supply bag controller 24.

In FIG. 7, the dust detector 52 uses ultrasonic waves, and this detector 52 is directly connected to a pipe, and detects the reflected ultrasonic wave from the dust in the chemical solution in the pipe.
Measure the size and number of dust particles. Therefore, valve 49
．． With the opening 51 open, changes in dust in the flowing chemical solution can be ascertained through "on-the-spot observation."

The filter 50 is installed to remove dust contained in the chemical liquid that is being pressure-fed. Since the removal effect of the filter 50 can be determined experimentally, it is possible to predict the amount of dust in the chemical solution after passing through the filter from the dust measurement results of the dust detector 52. Therefore, when the measurement result of the dust detector 52 increases more than the specified number of dust, the controller 24 of the chemical liquid supply device
An alarm signal can be issued to the control panel 23 by issuing a command to turn off the air valve 49.

On the other hand, the dust detector 53 shown in FIG. 8 is a device that applies a laser, which sucks a part of the chemical liquid flowing inside the pipe into the dust detector 53 and irradiates the dust in the chemical liquid with laser light. , and the size and number of dust in the GI liquid are determined by evaluating the laser light scattered by the dust.

After the test, the chemical solution flows out into the pipe, but if care is taken to prevent contamination during the test, it can be returned to the supply pipe.

The operation when the number of dust particles in the chemical solution in FIG. 8 exceeds the specified number of dust particles is the same as that in FIG. 7.

By eliminating the structure shown in FIGS. 7 and 8, a high quality chemical solution can be automatically supplied from the chemical solution supply port at all times.

Incidentally, in the past, even if the dust in the chemical solution increased due to deterioration of the filter-piping, etc., it could only be detected during periodic inspections in which the chemical solution was sampled at the supply port of the supply pipe and the dust was measured. As a result of measuring the purity of trichlorethylene supplied from the 9i liquid supply port by atomic absorption method,
It was confirmed that impurity 151 in trichlorethylene could supply a chemical solution with a purity much higher than that required for trichlorethylene for semiconductor industry. Based on the dust measurement method shown in Fig. 8, the measured dust i number of the supplied trichlorethylene (the measured dust size is 2 μm or more) determines whether the trichlorethylene dust supplied from the chemical supply device through the supply piping is suitable for use in the semiconductor industry. It was found that the dust count was much lower than that required for trichlorethylene. In addition, these dusts are also removed from the filter 5 installed just before the chemical solution supply port.
It can be further reduced by 0.

Next, automation of management of the chemical solution supply device and the supply piping connected thereto will be explained.

[Pipe management of chemical liquid supply equipment] If the chemical liquid in the piping remains stagnant, the quality will deteriorate. For this reason, when the chemical solution supply device is not used for a long period of time, such as during summer vacation or New Year's holiday, it is necessary to
Measures such as cleaning the pipes are required.

Therefore, first of all, in Figures 1, 5, and 6,
Open the supply pipe control air valves 40a and 40b, and connect the exhaust pipe]] Open the control air valve 42a. Also,
Close the air valve 37 in Fig. 5, and then close the air valve 30.3.
3 is opened and the operation of the liquid level detector 34 is stopped. Thereafter, nitrogen gas is allowed to flow into the apparatus through the nitrogen gas supply port 1 shown in FIG. 1, and the air valve 17a is opened.

After a predetermined time, the air valve 17a is opened, and the air valve 17b is closed for a predetermined time.

A similar operation is performed for the air valves 17c and 17d. As a result, the chemical liquid in the pipe of the chemical liquid supply device is discharged from the chemical liquid supply port 11 of the chemical liquid supply device, through the supply pipe 45, and from the drain pipe connection port 44a to the drain pipe 48. In addition, in order to blow nitrogen into these pipes for a predetermined period of r11,
Dry the inside of the pipe. After drying the inside of the piping, all air valves 17a-17d, 30, 33.42a are closed. As a result, the piping and supply piping 45 within this device are filled with nitrogen. All of these sequences are performed under the control of the controller 24. Further, since the pipes are filled with nitrogen gas, loosening of the joints of the pipes can be detected by observing changes in the pressure of the pressure gauges 3b and 3c over time. In this way, the management of the chemical solution supply device is extremely easy.

[Piping management of supply piping] After the chemical solution in the piping of the chemical solution supply device is removed and dried according to the piping management sequence of the chemical solution supply device described above, the process moves to the piping management sequence of the supply piping. First, as shown in FIG. , nitrogen gas is caused to flow into the chemical liquid supply device from the nitrogen gas supply port 1.Next, in FIG.
The air valves 30 and 33 are opened so as not to operate.

Furthermore, in FIG. 6, an air valve 40 for controlling supply piping is shown.
a, and open the exhaust pipe connection port control air valve 42b. At this time, due to the nitrogen gas pressure flowing into the supply branch pipe 46a, the chemical liquid in the supply pipe 46a is transferred to the drain pipe connection port 4.
4b to the exhaust pipe 48. Next, the air valve 42b for controlling the exhaust pipe connection port is closed, and the air valve 41b for controlling the chemical solution supply port is closed. As a result, the chemical liquid present in the pipe between the supply branch pipe 46a and the chemical liquid supply port 43b is caused to flow out from the chemical liquid supply port 43b. Thereafter, the air valve 41b for controlling the chemical liquid supply port is closed, and the air valve 41a for controlling the chemical liquid supply port is opened. As a result, the chemical liquid in the piping between the chemical liquid supply port 43a and the supply branch pipe 46a is removed from the chemical liquid supply port 43a.
more excreted. After the discharge, the chemical solution supply port control 1
The valve 41a is used as a lever. By the above operation, the air valve for controlling the supply pipe 40a is connected to the exhaust pipe connection port 44. The chemical solution in the pipe connected to the supply branch pipe 46a up to b is
All will be ejected.

Next, the air valve 42b for controlling the exhaust pipe connection port is turned on, and the inside of the supply branch pipe 46a is blown with nitrogen to dry it.
The exhaust pipe connection port control air valve 42b is closed. Further, the air valve 41b for controlling the chemical liquid supply port is opened, and after the inside of the piping up to the chemical liquid supply port 43b is dried by blowing with nitrogen, the 17-valve 41b is opened. next,
The air valve 41a for controlling the exhaust pipe connection port is opened, and after drying the inside of the pipe up to the chemical supply port 43a by blowing nitrogen, the air valve 41a is closed, and the air valve 40a for controlling the supply pipe is set to the lock.

Through the above operations, the inside of the supply branch pipe 46a is filled with nitrogen until reuse, and changes in nitrogen gas pressure during that time are monitored by the pressure gauge 46a.
7a to detect and monitor.

Further, the procedure for filling the supply branch pipes 46b and 46c with nitrogen is the same as that for the supply branch pipe 46a. The rules for these procedures can be summarized as follows.

■ Drain the chemical liquid from the supply branch pipe into the pipe through the drain pipe connection port.

■ Among the chemical liquid supply ports connected to the supply branch pipes, remove the chemical liquid from the pipes in order from the chemical liquid supply port that is farthest from the supply pipe control air valve.

■ Dry the inside of the supply branch pipe with nitrogen blow.

■ By nitrogen blowing, connect each chemical solution supply port and supply branch in the same order as ■? A: Dry the inside of the color scheme.

■ Fill all of the above piping with nitrogen.

A series of these historical works ① to ② is controlled by the controller 1-[1-ra 24].

By performing the functions described above, maintenance management when the chemical solution supply device is not used for a long period of time becomes easy. Furthermore, maintenance and management of the supply piping becomes easier because the pipes for supplying the chemical solution at locations that are not used for a long period of time are filled with nitrogen, and the pressure change on the pressure gauge at that time can be monitored by the Rontro roller 24 of the chemical solution supply device.

〔Effect of the invention〕

As explained above, the automatic chemical supply device according to the present invention centrally controls many valves in the chemical supply device by one roller, and controls them in various forms. Since the controller described above inputs the detection signal of the pressure gauge in the piping and monitors the pressure change in the piping, it is possible to transfer a large amount of chemical liquid from multiple chemical liquid storage tanks to a predetermined amount through the piping. Not only can the valves be supplied continuously up to the desired position, but by switching a large number of valves into various configurations, it is possible to find a malfunctioning valve among them very easily and automatically. Moreover, if the chemical solution supply device or supply piping is not used for a long period of time, this device and supply piping can be automatically filled with nitrogen, and by detecting pressure changes during that time, loosening of piping connections can be detected. and leaks can be discovered. In addition, since it is possible to automatically supply chemical solutions and automate maintenance and management in this way, it is extremely advantageous in terms of labor saving and safety measures, and eliminates the contamination of chemical solutions caused by the intervention of conventional workers. This has the advantage of improving product yield.

[Brief explanation of drawings]

Fig. 1 is a piping diagram of an embodiment of the feeding device of the present invention, Fig. 2 is a front view of the device shown in Fig. A top view, FIG. 5 is a piping diagram of the air valve and tank of the buffer tank unit incorporated as part of this device, FIG. 6 is a piping diagram showing an example of the supply piping connected to the supply device, and FIG. Fig. 7 and Fig. 8 are diagrams showing an example of a gas supply pipe when a dust detector is provided in the supply pipe. 1...Nitrogen gas supply port, 3a to 3c...
・Pressure gauge, 9a-9d...Storage tank, 1
0a-10d. 16a-16d, 17a-17d, 20a-20d
... Air valve, 11 ... Chemical solution supply port, 24 ... Controller.

Claims (1)

[Claims] A supply device that has a plurality of storage tanks storing chemical liquids and continuously supplies chemical liquids from these storage tanks by introducing gas for pressurizing the chemical liquid into these storage tanks. The gas supply piping is equipped with a valve that selectively switches and introduces the chemical liquid pressure-feeding gas into each storage tank, and a pressure gauge that detects the pressure inside the piping.On the other hand, the chemical liquid supply piping from the storage tank is equipped with A valve that selectively switches and supplies chemical liquid from each storage tank;
A pressure gauge is provided to detect the pressure in the pipes, and the valves and pressure gauges in both pipes are controlled to switch to various modes by remote control, and based on the detection signals of the respective pressure gauges. An automatic chemical supply device characterized in that the device is connected to one controller that monitors pressure changes in piping.