JPS61164255U - - Google Patents

Info

Publication number
JPS61164255U
JPS61164255U JP4678985U JP4678985U JPS61164255U JP S61164255 U JPS61164255 U JP S61164255U JP 4678985 U JP4678985 U JP 4678985U JP 4678985 U JP4678985 U JP 4678985U JP S61164255 U JPS61164255 U JP S61164255U
Authority
JP
Japan
Prior art keywords
gas
heat treatment
atmospheric gas
flow rate
treatment container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4678985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4678985U priority Critical patent/JPS61164255U/ja
Publication of JPS61164255U publication Critical patent/JPS61164255U/ja
Pending legal-status Critical Current

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Landscapes

  • Furnace Details (AREA)
JP4678985U 1985-04-01 1985-04-01 Pending JPS61164255U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4678985U JPS61164255U (enrdf_load_stackoverflow) 1985-04-01 1985-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4678985U JPS61164255U (enrdf_load_stackoverflow) 1985-04-01 1985-04-01

Publications (1)

Publication Number Publication Date
JPS61164255U true JPS61164255U (enrdf_load_stackoverflow) 1986-10-11

Family

ID=30561513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4678985U Pending JPS61164255U (enrdf_load_stackoverflow) 1985-04-01 1985-04-01

Country Status (1)

Country Link
JP (1) JPS61164255U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0264391A (ja) * 1988-08-30 1990-03-05 Ulvac Corp 真空熱処理炉
JP2017110841A (ja) * 2015-12-15 2017-06-22 富士電機機器制御株式会社 熱処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0264391A (ja) * 1988-08-30 1990-03-05 Ulvac Corp 真空熱処理炉
JP2017110841A (ja) * 2015-12-15 2017-06-22 富士電機機器制御株式会社 熱処理装置

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