JPS61161639U - - Google Patents

Info

Publication number
JPS61161639U
JPS61161639U JP4424585U JP4424585U JPS61161639U JP S61161639 U JPS61161639 U JP S61161639U JP 4424585 U JP4424585 U JP 4424585U JP 4424585 U JP4424585 U JP 4424585U JP S61161639 U JPS61161639 U JP S61161639U
Authority
JP
Japan
Prior art keywords
optical path
mirror
dark box
half mirror
entering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4424585U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4424585U priority Critical patent/JPS61161639U/ja
Publication of JPS61161639U publication Critical patent/JPS61161639U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図は本発明の一実施例の構成図、第２図は
従来の構成図である。 １…ＬＤモジユール、２…ＣＷ用光検出器、３
…移動ステージ、４…高速用光検出器、５…ハー
フ・ミラー、６…暗箱、７…ビーム。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体レーザ・ダイオード・モジユールから発
    光し暗箱内に入光したビームの光路内にハーフ・
    ミラーを配設し、暗箱内でのハーフ・ミラーの透
    過側光路上とハーフ・ミラーの反射方向側光路上
    とにそれぞれ光検出器を配設したことを特徴とす
    る半導体装置の検査治具。
JP4424585U 1985-03-27 1985-03-27 Pending JPS61161639U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4424585U JPS61161639U (ja) 1985-03-27 1985-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4424585U JPS61161639U (ja) 1985-03-27 1985-03-27

Publications (1)

Publication Number Publication Date
JPS61161639U true JPS61161639U (ja) 1986-10-07

Family

ID=30556647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4424585U Pending JPS61161639U (ja) 1985-03-27 1985-03-27

Country Status (1)

Country Link
JP (1) JPS61161639U (ja)

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