JPS61159083U - - Google Patents

Info

Publication number
JPS61159083U
JPS61159083U JP4327785U JP4327785U JPS61159083U JP S61159083 U JPS61159083 U JP S61159083U JP 4327785 U JP4327785 U JP 4327785U JP 4327785 U JP4327785 U JP 4327785U JP S61159083 U JPS61159083 U JP S61159083U
Authority
JP
Japan
Prior art keywords
cleaned
cleaning liquid
injection port
cleaning
injection cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4327785U
Other languages
English (en)
Other versions
JPH0319972Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985043277U priority Critical patent/JPH0319972Y2/ja
Publication of JPS61159083U publication Critical patent/JPS61159083U/ja
Application granted granted Critical
Publication of JPH0319972Y2 publication Critical patent/JPH0319972Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Nozzles (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Description

【図面の簡単な説明】
図面はこの考案の実施例を示し、第1図は一部
縦断正面図、第2図は一部の拡大平面図、第3図
は第1図の―線拡大断面図である。 t…把持具、5…洗浄液噴射筒、8…洗浄液噴
射口。

Claims (1)

  1. 【実用新案登録請求の範囲】 被洗浄物に対応して洗浄液噴射筒を位置させ、 上記噴射筒は、上記被洗浄物に対向する位置に
    洗浄液噴射口を有し、該噴射筒内に外部から圧送
    される洗浄液を上記噴射口から被洗浄物に噴射し
    て洗浄効果を高めるようにした、洗浄装置。
JP1985043277U 1985-03-27 1985-03-27 Expired JPH0319972Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985043277U JPH0319972Y2 (ja) 1985-03-27 1985-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985043277U JPH0319972Y2 (ja) 1985-03-27 1985-03-27

Publications (2)

Publication Number Publication Date
JPS61159083U true JPS61159083U (ja) 1986-10-02
JPH0319972Y2 JPH0319972Y2 (ja) 1991-04-26

Family

ID=30554805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985043277U Expired JPH0319972Y2 (ja) 1985-03-27 1985-03-27

Country Status (1)

Country Link
JP (1) JPH0319972Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9376760B2 (en) 2012-07-18 2016-06-28 Ebara Corporation Plating apparatus and method of cleaning substrate holder

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589668U (ja) * 1981-07-13 1983-01-21 三菱電機株式会社 太陽熱利用温水器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589668U (ja) * 1981-07-13 1983-01-21 三菱電機株式会社 太陽熱利用温水器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9376760B2 (en) 2012-07-18 2016-06-28 Ebara Corporation Plating apparatus and method of cleaning substrate holder
US10119198B2 (en) 2012-07-18 2018-11-06 Ebara Corporation Method of cleaning substrate holder

Also Published As

Publication number Publication date
JPH0319972Y2 (ja) 1991-04-26

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