JPS61156232U - - Google Patents

Info

Publication number

JPS61156232U

JPS61156232U JP3943485U JP3943485U JPS61156232U JP S61156232 U JPS61156232 U JP S61156232U JP 3943485 U JP3943485 U JP 3943485U JP 3943485 U JP3943485 U JP 3943485U JP S61156232 U JPS61156232 U JP S61156232U

Authority

JP

Japan

Prior art keywords

quartz

utility

processing

quartz plate

sandblasted

Prior art date

1985-03-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010453 quartz Substances 0.000 claims description 15
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 15
• 239000000758 substrate Substances 0.000 claims description 4
• HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 3
• 239000011701 zinc Substances 0.000 claims description 3
• 229910052725 zinc Inorganic materials 0.000 claims description 3
• 150000001875 compounds Chemical class 0.000 claims 3
• 239000004065 semiconductor Substances 0.000 claims 3
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
• 229910052799 carbon Inorganic materials 0.000 description 1

Cited By (1)