JPS61154662U - - Google Patents
Info
- Publication number
- JPS61154662U JPS61154662U JP1985038510U JP3851085U JPS61154662U JP S61154662 U JPS61154662 U JP S61154662U JP 1985038510 U JP1985038510 U JP 1985038510U JP 3851085 U JP3851085 U JP 3851085U JP S61154662 U JPS61154662 U JP S61154662U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- holding rod
- holder
- workpiece
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 15
- 239000007788 liquid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985038510U JPS61154662U (enrdf_load_stackoverflow) | 1985-03-18 | 1985-03-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985038510U JPS61154662U (enrdf_load_stackoverflow) | 1985-03-18 | 1985-03-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61154662U true JPS61154662U (enrdf_load_stackoverflow) | 1986-09-25 |
Family
ID=30545589
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985038510U Pending JPS61154662U (enrdf_load_stackoverflow) | 1985-03-18 | 1985-03-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61154662U (enrdf_load_stackoverflow) |
-
1985
- 1985-03-18 JP JP1985038510U patent/JPS61154662U/ja active Pending
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