JPS6115436Y2 - - Google Patents
Info
- Publication number
- JPS6115436Y2 JPS6115436Y2 JP5385584U JP5385584U JPS6115436Y2 JP S6115436 Y2 JPS6115436 Y2 JP S6115436Y2 JP 5385584 U JP5385584 U JP 5385584U JP 5385584 U JP5385584 U JP 5385584U JP S6115436 Y2 JPS6115436 Y2 JP S6115436Y2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning liquid
- nozzle
- polished
- abrasive material
- abrasive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 26
- 238000002347 injection Methods 0.000 claims description 22
- 239000007924 injection Substances 0.000 claims description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 20
- 239000003082 abrasive agent Substances 0.000 claims description 17
- 239000007788 liquid Substances 0.000 claims description 16
- 238000003756 stirring Methods 0.000 claims description 13
- 238000005498 polishing Methods 0.000 claims description 5
- 239000007921 spray Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 239000002351 wastewater Substances 0.000 description 3
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003472 neutralizing effect Effects 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- ATRRKUHOCOJYRX-UHFFFAOYSA-N Ammonium bicarbonate Chemical compound [NH4+].OC([O-])=O ATRRKUHOCOJYRX-UHFFFAOYSA-N 0.000 description 1
- 229910000013 Ammonium bicarbonate Inorganic materials 0.000 description 1
- 235000012538 ammonium bicarbonate Nutrition 0.000 description 1
- 239000001099 ammonium carbonate Substances 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 150000003071 polychlorinated biphenyls Chemical class 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5385584U JPS59191096U (ja) | 1984-04-11 | 1984-04-11 | 研掃装置のノズル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5385584U JPS59191096U (ja) | 1984-04-11 | 1984-04-11 | 研掃装置のノズル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59191096U JPS59191096U (ja) | 1984-12-18 |
| JPS6115436Y2 true JPS6115436Y2 (ru) | 1986-05-13 |
Family
ID=30184201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5385584U Granted JPS59191096U (ja) | 1984-04-11 | 1984-04-11 | 研掃装置のノズル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59191096U (ru) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5311938B2 (ja) * | 2008-09-08 | 2013-10-09 | Ｎｓマテリアルズ株式会社 | 基板処理装置及び基板処理方法 |
| JP5595825B2 (ja) * | 2010-08-05 | 2014-09-24 | 川崎重工業株式会社 | 舶用ボイラの伝熱管の洗浄方法及び装置 |
| WO2021171626A1 (ja) * | 2020-02-28 | 2021-09-02 | 中国電力株式会社 | 脱硝触媒研磨方法及び脱硝触媒研磨装置 |
-
1984
- 1984-04-11 JP JP5385584U patent/JPS59191096U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59191096U (ja) | 1984-12-18 |
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