JPS61153345U - - Google Patents
Info
- Publication number
- JPS61153345U JPS61153345U JP3604585U JP3604585U JPS61153345U JP S61153345 U JPS61153345 U JP S61153345U JP 3604585 U JP3604585 U JP 3604585U JP 3604585 U JP3604585 U JP 3604585U JP S61153345 U JPS61153345 U JP S61153345U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafer
- arm
- wafers
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 5
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3604585U JPS61153345U (zh) | 1985-03-15 | 1985-03-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3604585U JPS61153345U (zh) | 1985-03-15 | 1985-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61153345U true JPS61153345U (zh) | 1986-09-22 |
Family
ID=30540878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3604585U Pending JPS61153345U (zh) | 1985-03-15 | 1985-03-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61153345U (zh) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS64743A (en) * | 1987-02-13 | 1989-01-05 | Tokyo Electron Ltd | Counter for wafer |
| JP2001274224A (ja) * | 2000-03-27 | 2001-10-05 | Mitsubishi Electric Corp | 基板カセット装置 |
| KR100896744B1 (ko) | 2007-11-02 | 2009-05-11 | 주식회사 에이알씨코리아 | 웨이퍼 매핑장치 |
| JP2010272796A (ja) * | 2009-05-25 | 2010-12-02 | Tokyo Electron Ltd | 基板処理システム、基板検出装置および基板検出方法 |
| JP2012094927A (ja) * | 2012-02-17 | 2012-05-17 | Lintec Corp | 光照射装置 |
-
1985
- 1985-03-15 JP JP3604585U patent/JPS61153345U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS64743A (en) * | 1987-02-13 | 1989-01-05 | Tokyo Electron Ltd | Counter for wafer |
| JP2001274224A (ja) * | 2000-03-27 | 2001-10-05 | Mitsubishi Electric Corp | 基板カセット装置 |
| KR100896744B1 (ko) | 2007-11-02 | 2009-05-11 | 주식회사 에이알씨코리아 | 웨이퍼 매핑장치 |
| JP2010272796A (ja) * | 2009-05-25 | 2010-12-02 | Tokyo Electron Ltd | 基板処理システム、基板検出装置および基板検出方法 |
| JP2012094927A (ja) * | 2012-02-17 | 2012-05-17 | Lintec Corp | 光照射装置 |