JPS6115289Y2 - - Google Patents

Info

Publication number
JPS6115289Y2
JPS6115289Y2 JP5850481U JP5850481U JPS6115289Y2 JP S6115289 Y2 JPS6115289 Y2 JP S6115289Y2 JP 5850481 U JP5850481 U JP 5850481U JP 5850481 U JP5850481 U JP 5850481U JP S6115289 Y2 JPS6115289 Y2 JP S6115289Y2
Authority
JP
Japan
Prior art keywords
diaphragm
screw shaft
pressure
rod
pressure chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5850481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57171404U (US20030220297A1-20031127-C00074.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5850481U priority Critical patent/JPS6115289Y2/ja
Publication of JPS57171404U publication Critical patent/JPS57171404U/ja
Application granted granted Critical
Publication of JPS6115289Y2 publication Critical patent/JPS6115289Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP5850481U 1981-04-22 1981-04-22 Expired JPS6115289Y2 (US20030220297A1-20031127-C00074.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5850481U JPS6115289Y2 (US20030220297A1-20031127-C00074.png) 1981-04-22 1981-04-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5850481U JPS6115289Y2 (US20030220297A1-20031127-C00074.png) 1981-04-22 1981-04-22

Publications (2)

Publication Number Publication Date
JPS57171404U JPS57171404U (US20030220297A1-20031127-C00074.png) 1982-10-28
JPS6115289Y2 true JPS6115289Y2 (US20030220297A1-20031127-C00074.png) 1986-05-13

Family

ID=29854903

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5850481U Expired JPS6115289Y2 (US20030220297A1-20031127-C00074.png) 1981-04-22 1981-04-22

Country Status (1)

Country Link
JP (1) JPS6115289Y2 (US20030220297A1-20031127-C00074.png)

Also Published As

Publication number Publication date
JPS57171404U (US20030220297A1-20031127-C00074.png) 1982-10-28

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