JPS61152082A - 半導体放射線検出器の製造方法 - Google Patents

半導体放射線検出器の製造方法

Info

Publication number
JPS61152082A
JPS61152082A JP59281421A JP28142184A JPS61152082A JP S61152082 A JPS61152082 A JP S61152082A JP 59281421 A JP59281421 A JP 59281421A JP 28142184 A JP28142184 A JP 28142184A JP S61152082 A JPS61152082 A JP S61152082A
Authority
JP
Japan
Prior art keywords
boron
radiation detector
film
semiconductor radiation
manufacturing semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59281421A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447992B2 (enrdf_load_stackoverflow
Inventor
Noritada Sato
則忠 佐藤
Yasukazu Seki
康和 関
Toshio Suzuki
敏夫 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP59281421A priority Critical patent/JPS61152082A/ja
Publication of JPS61152082A publication Critical patent/JPS61152082A/ja
Publication of JPH0447992B2 publication Critical patent/JPH0447992B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T3/00—Measuring neutron radiation
    • G01T3/08—Measuring neutron radiation with semiconductor detectors

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Light Receiving Elements (AREA)
JP59281421A 1984-12-25 1984-12-25 半導体放射線検出器の製造方法 Granted JPS61152082A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59281421A JPS61152082A (ja) 1984-12-25 1984-12-25 半導体放射線検出器の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59281421A JPS61152082A (ja) 1984-12-25 1984-12-25 半導体放射線検出器の製造方法

Publications (2)

Publication Number Publication Date
JPS61152082A true JPS61152082A (ja) 1986-07-10
JPH0447992B2 JPH0447992B2 (enrdf_load_stackoverflow) 1992-08-05

Family

ID=17638922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59281421A Granted JPS61152082A (ja) 1984-12-25 1984-12-25 半導体放射線検出器の製造方法

Country Status (1)

Country Link
JP (1) JPS61152082A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5457322A (en) * 1990-11-28 1995-10-10 Hitachi, Ltd. Semiconductor radiation detection apparatus for discriminating radiation having differing energy levels

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5457322A (en) * 1990-11-28 1995-10-10 Hitachi, Ltd. Semiconductor radiation detection apparatus for discriminating radiation having differing energy levels

Also Published As

Publication number Publication date
JPH0447992B2 (enrdf_load_stackoverflow) 1992-08-05

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