JPS61151952A - 集束ビ−ム発生用イオン源引出しスリツト装置 - Google Patents

集束ビ−ム発生用イオン源引出しスリツト装置

Info

Publication number
JPS61151952A
JPS61151952A JP59273180A JP27318084A JPS61151952A JP S61151952 A JPS61151952 A JP S61151952A JP 59273180 A JP59273180 A JP 59273180A JP 27318084 A JP27318084 A JP 27318084A JP S61151952 A JPS61151952 A JP S61151952A
Authority
JP
Japan
Prior art keywords
slit
ion
longitudinal direction
ion source
extraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59273180A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0244102B2 (enrdf_load_stackoverflow
Inventor
Osamu Tsukagoshi
修 塚越
Kenichi Takagi
憲一 高木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP59273180A priority Critical patent/JPS61151952A/ja
Publication of JPS61151952A publication Critical patent/JPS61151952A/ja
Publication of JPH0244102B2 publication Critical patent/JPH0244102B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59273180A 1984-12-26 1984-12-26 集束ビ−ム発生用イオン源引出しスリツト装置 Granted JPS61151952A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59273180A JPS61151952A (ja) 1984-12-26 1984-12-26 集束ビ−ム発生用イオン源引出しスリツト装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59273180A JPS61151952A (ja) 1984-12-26 1984-12-26 集束ビ−ム発生用イオン源引出しスリツト装置

Publications (2)

Publication Number Publication Date
JPS61151952A true JPS61151952A (ja) 1986-07-10
JPH0244102B2 JPH0244102B2 (enrdf_load_stackoverflow) 1990-10-02

Family

ID=17524212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59273180A Granted JPS61151952A (ja) 1984-12-26 1984-12-26 集束ビ−ム発生用イオン源引出しスリツト装置

Country Status (1)

Country Link
JP (1) JPS61151952A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63228549A (ja) * 1987-03-18 1988-09-22 Hitachi Ltd マイクロ波多価イオン源
US9659749B2 (en) 2014-10-17 2017-05-23 Sumitomo Heavy Industries Ion Technology Co., Ltd. Beam extraction slit structure and ion source
JP2024532936A (ja) * 2021-09-13 2024-09-10 アプライド マテリアルズ インコーポレイテッド 可変厚さイオン源抽出プレート

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821949U (ja) * 1981-08-04 1983-02-10 日新ハイボルテ−ジ株式会社 イオン源装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821949U (ja) * 1981-08-04 1983-02-10 日新ハイボルテ−ジ株式会社 イオン源装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63228549A (ja) * 1987-03-18 1988-09-22 Hitachi Ltd マイクロ波多価イオン源
US9659749B2 (en) 2014-10-17 2017-05-23 Sumitomo Heavy Industries Ion Technology Co., Ltd. Beam extraction slit structure and ion source
JP2024532936A (ja) * 2021-09-13 2024-09-10 アプライド マテリアルズ インコーポレイテッド 可変厚さイオン源抽出プレート

Also Published As

Publication number Publication date
JPH0244102B2 (enrdf_load_stackoverflow) 1990-10-02

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