JPS61149589A - クライオポンプ - Google Patents

クライオポンプ

Info

Publication number
JPS61149589A
JPS61149589A JP27200984A JP27200984A JPS61149589A JP S61149589 A JPS61149589 A JP S61149589A JP 27200984 A JP27200984 A JP 27200984A JP 27200984 A JP27200984 A JP 27200984A JP S61149589 A JPS61149589 A JP S61149589A
Authority
JP
Japan
Prior art keywords
shield
screening plate
baffle
cryopump
gas molecules
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27200984A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6339796B2 (enrdf_load_stackoverflow
Inventor
Hiroyuki Yamakawa
洋幸 山川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP27200984A priority Critical patent/JPS61149589A/ja
Publication of JPS61149589A publication Critical patent/JPS61149589A/ja
Publication of JPS6339796B2 publication Critical patent/JPS6339796B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP27200984A 1984-12-25 1984-12-25 クライオポンプ Granted JPS61149589A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27200984A JPS61149589A (ja) 1984-12-25 1984-12-25 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27200984A JPS61149589A (ja) 1984-12-25 1984-12-25 クライオポンプ

Publications (2)

Publication Number Publication Date
JPS61149589A true JPS61149589A (ja) 1986-07-08
JPS6339796B2 JPS6339796B2 (enrdf_load_stackoverflow) 1988-08-08

Family

ID=17507865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27200984A Granted JPS61149589A (ja) 1984-12-25 1984-12-25 クライオポンプ

Country Status (1)

Country Link
JP (1) JPS61149589A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006314864A (ja) * 2005-05-10 2006-11-24 Mitsubishi Electric Corp 排気トラップ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006314864A (ja) * 2005-05-10 2006-11-24 Mitsubishi Electric Corp 排気トラップ装置

Also Published As

Publication number Publication date
JPS6339796B2 (enrdf_load_stackoverflow) 1988-08-08

Similar Documents

Publication Publication Date Title
US4068683A (en) High energy loss device
JPS61149589A (ja) クライオポンプ
GB2109094A (en) Discharge valve assembly for a refrigeration compressor
US5301511A (en) Cryopump and cryopanel having frost concentrating device
US5311902A (en) Reciprocating compressor valve
JP4102856B2 (ja) ゲートバルブを組み込んだコールドトラップ
JP3609474B2 (ja) クライオポンプ
US5343709A (en) Cryopump
JP6886453B2 (ja) クライオポンプ及びゲートバルブ
WO2001040534A3 (de) Vorrichtung und verfahren zur beschichtung von gegenständen bei hoher temperatur
CN115233174A (zh) 工艺腔室
JPS6334316B2 (enrdf_load_stackoverflow)
JP2017122414A (ja) クライオポンプ
US3966368A (en) Insulated seal for engines
SU682718A1 (ru) Поплавковый клапан
JPH0658291A (ja) ターボ分子ポンプ用クライオトラップ
JPH0447180A (ja) クライオポンプ
RU2023910C1 (ru) Вакуумная установка
JPS53139011A (en) Valve mechanism of internal combustion engine
US3820442A (en) Variable cut off intake valve system
KR970006927A (ko) 씨로코팬
KR100494777B1 (ko) 소음저감형 차량용 이지알밸브
JPH0380992B2 (enrdf_load_stackoverflow)
SU1180652A1 (ru) Выт жна вентил ционна труба
JPH0415992Y2 (enrdf_load_stackoverflow)

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term