JPS61149338U - - Google Patents
Info
- Publication number
- JPS61149338U JPS61149338U JP3250485U JP3250485U JPS61149338U JP S61149338 U JPS61149338 U JP S61149338U JP 3250485 U JP3250485 U JP 3250485U JP 3250485 U JP3250485 U JP 3250485U JP S61149338 U JPS61149338 U JP S61149338U
- Authority
- JP
- Japan
- Prior art keywords
- suction surface
- stage
- board
- probe
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3250485U JPS61149338U (enExample) | 1985-03-07 | 1985-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3250485U JPS61149338U (enExample) | 1985-03-07 | 1985-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61149338U true JPS61149338U (enExample) | 1986-09-16 |
Family
ID=30534078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3250485U Pending JPS61149338U (enExample) | 1985-03-07 | 1985-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61149338U (enExample) |
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1985
- 1985-03-07 JP JP3250485U patent/JPS61149338U/ja active Pending