JPH01135376U - - Google Patents
Info
- Publication number
- JPH01135376U JPH01135376U JP2906688U JP2906688U JPH01135376U JP H01135376 U JPH01135376 U JP H01135376U JP 2906688 U JP2906688 U JP 2906688U JP 2906688 U JP2906688 U JP 2906688U JP H01135376 U JPH01135376 U JP H01135376U
- Authority
- JP
- Japan
- Prior art keywords
- probe needle
- tip
- contact
- semiconductor wafer
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988029066U JPH062266Y2 (ja) | 1988-03-04 | 1988-03-04 | エッジセンサー |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988029066U JPH062266Y2 (ja) | 1988-03-04 | 1988-03-04 | エッジセンサー |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01135376U true JPH01135376U (enExample) | 1989-09-18 |
| JPH062266Y2 JPH062266Y2 (ja) | 1994-01-19 |
Family
ID=31252944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988029066U Expired - Lifetime JPH062266Y2 (ja) | 1988-03-04 | 1988-03-04 | エッジセンサー |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH062266Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS598356U (ja) * | 1982-07-09 | 1984-01-19 | 小田島 進 | 消火装置 |
| JPS6252457A (ja) * | 1985-08-30 | 1987-03-07 | Omron Tateisi Electronics Co | 擬似折損信号発生装置 |
-
1988
- 1988-03-04 JP JP1988029066U patent/JPH062266Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS598356U (ja) * | 1982-07-09 | 1984-01-19 | 小田島 進 | 消火装置 |
| JPS6252457A (ja) * | 1985-08-30 | 1987-03-07 | Omron Tateisi Electronics Co | 擬似折損信号発生装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH062266Y2 (ja) | 1994-01-19 |