JPS61146954U - - Google Patents

Info

Publication number
JPS61146954U
JPS61146954U JP3005485U JP3005485U JPS61146954U JP S61146954 U JPS61146954 U JP S61146954U JP 3005485 U JP3005485 U JP 3005485U JP 3005485 U JP3005485 U JP 3005485U JP S61146954 U JPS61146954 U JP S61146954U
Authority
JP
Japan
Prior art keywords
substrate
temperature
cooling body
thermoelectric
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3005485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3005485U priority Critical patent/JPS61146954U/ja
Publication of JPS61146954U publication Critical patent/JPS61146954U/ja
Pending legal-status Critical Current

Links

JP3005485U 1985-03-01 1985-03-01 Pending JPS61146954U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3005485U JPS61146954U (enrdf_load_stackoverflow) 1985-03-01 1985-03-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3005485U JPS61146954U (enrdf_load_stackoverflow) 1985-03-01 1985-03-01

Publications (1)

Publication Number Publication Date
JPS61146954U true JPS61146954U (enrdf_load_stackoverflow) 1986-09-10

Family

ID=30529405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3005485U Pending JPS61146954U (enrdf_load_stackoverflow) 1985-03-01 1985-03-01

Country Status (1)

Country Link
JP (1) JPS61146954U (enrdf_load_stackoverflow)

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