JPS61146945U - - Google Patents

Info

Publication number

JPS61146945U

JPS61146945U JP2779086U JP2779086U JPS61146945U JP S61146945 U JPS61146945 U JP S61146945U JP 2779086 U JP2779086 U JP 2779086U JP 2779086 U JP2779086 U JP 2779086U JP S61146945 U JPS61146945 U JP S61146945U

Authority

JP

Japan

Prior art keywords

tube

hydrogen

furnace

furnace core

tip

Prior art date

1986-02-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000001257 hydrogen Substances 0.000 claims description 8
• 229910052739 hydrogen Inorganic materials 0.000 claims description 8
• UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 7
• 230000003647 oxidation Effects 0.000 claims description 6
• 238000007254 oxidation reaction Methods 0.000 claims description 6
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
• 239000001301 oxygen Substances 0.000 claims description 3
• 229910052760 oxygen Inorganic materials 0.000 claims description 3
• 239000010453 quartz Substances 0.000 claims description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
• 238000002485 combustion reaction Methods 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 235000012431 wafers Nutrition 0.000 claims 1
• 239000007789 gas Substances 0.000 description 1
• 150000002431 hydrogen Chemical class 0.000 description 1
• 230000037431 insertion Effects 0.000 description 1
• 238000003780 insertion Methods 0.000 description 1