JPS61145716A - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPS61145716A JPS61145716A JP26613884A JP26613884A JPS61145716A JP S61145716 A JPS61145716 A JP S61145716A JP 26613884 A JP26613884 A JP 26613884A JP 26613884 A JP26613884 A JP 26613884A JP S61145716 A JPS61145716 A JP S61145716A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic film
- tape
- sliding surface
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3176—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps
- G11B5/3179—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes
- G11B5/3183—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes intersecting the gap plane, e.g. "horizontal head structure"
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、ＶＴＲ等に適した薄膜磁気ヘッドに係り、特
に耐摩耗性の良好なヘッドの構造に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a thin film magnetic head suitable for VTRs and the like, and particularly to a head structure with good wear resistance.
高飽和磁束密度を有する軟磁性金属を磁気コアとする薄
膜磁気ヘッドには、４！Ｆ開昭５７−１３８０２１号公
報に示されるように、磁気コアを基板と保護膜で挟んだ
サンドイッチ構造のものが知られている。この構造では
耐摩耗性の低い磁気コアの摩耗が進行するので、ヘッド
寿命を伸ばすために、磁気コアの摩耗を軽減する必要が
あった。A thin film magnetic head whose magnetic core is made of a soft magnetic metal with a high saturation magnetic flux density has 4! As shown in Japanese Patent Application Laid-Open No. 57-138021, a sandwich structure in which a magnetic core is sandwiched between a substrate and a protective film is known. In this structure, the wear of the magnetic core, which has low wear resistance, progresses, so in order to extend the life of the head, it was necessary to reduce the wear of the magnetic core.
本発明の目的は、軟磁性金属をコア材とし。 An object of the present invention is to use a soft magnetic metal as a core material.
耐摩耗性１ｃｍｆ″ぐれた構造の薄膜磁気ヘッドを提供
することにある。The object of the present invention is to provide a thin film magnetic head having a structure with a wear resistance of 1 cmf.
本発明は、上記目的を達成するために、テープ摺動面に
露出する磁性膜形状を台形等のテープ走行方向に対し直
角面を持たない形状とし。In order to achieve the above object, the present invention makes the shape of the magnetic film exposed on the tape sliding surface a shape such as a trapezoid that does not have a surface perpendicular to the tape running direction.
その四方を耐摩耗性非磁性材料で囲むことを特徴とする
ものである。It is characterized by being surrounded on all sides with wear-resistant non-magnetic material.
本発明の一実施例を第１．第２．第３図により説明する
。第１図（α）は本発明による磁気ヘッドを示す斜視図
であって、１は非磁性基板、２１は第１磁気コア、２２
は第２磁気コア、３は非磁性スペーサー、４は保護膜、
５は巻線穴である。An embodiment of the present invention will be described in the first embodiment. Second. This will be explained with reference to FIG. FIG. 1 (α) is a perspective view showing a magnetic head according to the present invention, in which 1 is a non-magnetic substrate, 21 is a first magnetic core, 22
is a second magnetic core, 3 is a non-magnetic spacer, 4 is a protective film,
5 is a winding hole.
第１図（ｈ）は同図（α）のヘッドのテープ摺動面を示
した図である５同図（ａ）と対応する部分には同一符号
を付けた。FIG. 1(h) is a diagram showing the tape sliding surface of the head in FIG. 1(α). 5. Parts corresponding to those in FIG. 1(a) are given the same reference numerals.
本発明は、テープ摺動面側の磁性膜の一部を基板面に対
して傾斜角を持つように除去し、この部分に耐摩耗性に
優れた非磁性膜を形成したことを特徴としたものである
。The present invention is characterized in that a part of the magnetic film on the tape sliding surface side is removed so as to have an inclined angle with respect to the substrate surface, and a non-magnetic film with excellent wear resistance is formed in this part. It is something.
第２図はテープを走行させ磁気コアが摩耗した場合の図
で、（ａ）はテープ摺動面、（ｂ）〜（ｄ）は（α）に
示したす、ｃ、ｄ−それぞれの部分の断面図である。第
２図（α）の矢印はテープ走行方向を示し。Figure 2 is a diagram when the magnetic core is worn out by running the tape, where (a) is the tape sliding surface, (b) to (d) are the respective parts of (α), c, and d. FIG. The arrow in FIG. 2 (α) indicates the tape running direction.
６は走行するテープを示す、第１図（α）と対応する部
分には同一符号を付けた。磁気コアが摩耗してくると、
テープ摺動面形状が場所によって異なってくる。第２図
＜ｂ＞〜（ｄ）に示すように、テープが摺動面形状に、
浴りて走行すると摩耗はますます進行するが、そのため
Ｋはテープが摺動面形状の変化に従い、絶えず変化して
いかなければならない。しかし、短時間の内にテープが
摺動面形状変化に従い連続的に変化するということは起
こりにくい。そのため、テープが磁気コアに及ぼす圧力
は軽減され、磁気コアの摩耗速度が減少する。即ち、ヘ
ッドの耐摩耗性が向とする。Reference numeral 6 indicates a running tape, and parts corresponding to those in FIG. 1 (α) are given the same reference numerals. When the magnetic core wears out,
The shape of the tape sliding surface varies depending on the location. As shown in Figure 2<b>~(d), the tape has a sliding surface shape,
As the tape runs in hot water, wear progresses further, so K must constantly change as the shape of the sliding surface of the tape changes. However, it is unlikely that the tape will change continuously in accordance with the change in the shape of the sliding surface within a short period of time. Therefore, the pressure exerted by the tape on the magnetic core is reduced, reducing the rate of wear of the magnetic core. That is, the wear resistance of the head is improved.
また、保護膜と基板の摩耗性の違いやシリンダーに取り
付けた際のテープの当たり方の違い等により、ヘッドの
摩耗の進行に偏りを生じる場合がある。この場合には、
磁性膜のと辺と下辺の寸法を調整することにより、摩耗
の偏りを補正することができる。第１図に示すヘッドは
。Further, due to differences in abrasion properties between the protective film and the substrate, differences in the way the tape hits the cylinder when attached to the cylinder, etc., the progress of wear on the head may be uneven. In this case,
By adjusting the dimensions of the top and bottom sides of the magnetic film, uneven wear can be corrected. The head shown in FIG.
保護膜側か摩耗しやすい場合に有効である。This is effective when the protective film side is prone to wear.
第３図により本発明によるヘッドの製造方法を説明する
。（α）非磁性基板１上に、トラック幅を膜厚とする磁
性膜を蒸着、スパッタ等により形成し、エツチングまた
はダイサ、バイト等による機械加工により不要な部分の
磁性膜を除去してｔ４１磁気コア２１を形成する。（ｂ
）非磁性スペーサー３と第２の磁性膜２を蒸着、スパッ
タ等により形成する。（Ｃ）エツチング、ラップ、ダイ
サ。A method of manufacturing a head according to the present invention will be explained with reference to FIG. (α) A magnetic film having a film thickness equal to the track width is formed on the non-magnetic substrate 1 by vapor deposition, sputtering, etc., and unnecessary portions of the magnetic film are removed by etching or machining with a dicer, cutting tool, etc., and the t41 magnetic A core 21 is formed. (b
) A nonmagnetic spacer 3 and a second magnetic film 2 are formed by vapor deposition, sputtering, or the like. (C) Etching, wrapping, dicing.
バイト等により不要な磁性膜を除去し、第２磁気コアを
形成する。（→テープ摺動面側の磁性膜の一部を基板面
に対し傾斜を持つよ５＆てエツチング、ダイサ、バイト
等により、除去する。（−）保護膜４を蒸着、スパッタ
等圧より形成する。（ｆ）ダイサ等−でチップカットを
行い、超音波加工。Unnecessary magnetic film is removed using a cutting tool or the like to form a second magnetic core. (→Remove a part of the magnetic film on the tape sliding surface side with an inclination to the substrate surface by etching, dicer, cutting tool, etc.) (-) Form the protective film 4 by vapor deposition, sputtering, etc. (f) Cut chips with a dicer etc. and perform ultrasonic processing.
エツチング等で巻線穴を形成し１円研する。Form the winding hole by etching etc. and grind it one circle.
第３図には、１チツプのみを示したが、実際には同一基
板上にヘッドチップを多数配置して製造する。Although only one chip is shown in FIG. 3, in reality, a large number of head chips are arranged on the same substrate and manufactured.
上記実施例では、テープ摺動面忙露出した磁気コアは台
形であるが、磁性膜の左右は、くの字形２階段状２曲線
等のテープ走行方向に対して、磁気コアの露出面積が変
化するような形状であればよい。In the above embodiment, the exposed magnetic core on the tape sliding surface has a trapezoidal shape, but the exposed area of the magnetic core changes with respect to the tape running direction, such as a dogleg shape, two steps, and two curves on the left and right sides of the magnetic film. Any shape is acceptable as long as it does so.
本発明は、シングルギャップのヘッドのみでなく、１チ
ツプに複数個のギャップを有するヘッドにも適用するこ
とができる。ｌラップＶＣ２個のギャップを形成したヘ
ッドにおける本発明の実施例を第４図に示す。第４図（
α）は斜視図、（ｂ）はテープ摺動面の図である。第１
図（α）と対応する部分には同一符号を付けた。The present invention can be applied not only to a single-gap head but also to a head having a plurality of gaps in one chip. FIG. 4 shows an embodiment of the present invention in a head in which a gap of two VCs is formed. Figure 4 (
α) is a perspective view, and (b) is a diagram of the tape sliding surface. 1st
Parts corresponding to those in Figure (α) are given the same reference numerals.
また、磁性膜の周囲に形成する保護膜は必ずしも単一物
質である必要はなく、 ｆｓＳ図に示すように磁性膜を
除去した部分ＶＣｆｓ１の保護膜４１を形成し、さらに
第２の保護膜４２を形成してもよい。Further, the protective film formed around the magnetic film does not necessarily have to be made of a single material, but as shown in the fsS diagram, a protective film 41 of the portion VCfs1 from which the magnetic film has been removed is formed, and a second protective film 42 is formed. may be formed.
本発明の応用例をＩ！６図に示す。（α）はヘッドの斜
視図、（ｂ）はテープ摺動面を示した図、（Ｃ）〜（ｔ
Ａはその断面図である。矢印はテープの走行方向を示す
。第２図と対応する部分には同一符号を付けた。テープ
摺動面に露出した磁気コアは長方形である。磁気コアが
摩耗してくるとテープがヘッド形状に沿って走行するに
は１図６（Ｃ）に示したように変形する必要がある。テ
ープの′変形は連続的なものではないので、上記実施例
はどの効果はないが、磁気コアが保護膜と基板とく挟ま
れたサンドイッチ構造の従来のヘッドに比べ、耐摩耗性
は向上する。An application example of the present invention is shown below! It is shown in Figure 6. (α) is a perspective view of the head, (b) is a diagram showing the tape sliding surface, (C) to (t
A is its cross-sectional view. Arrows indicate the direction of tape travel. Parts corresponding to those in FIG. 2 are given the same reference numerals. The magnetic core exposed on the tape sliding surface is rectangular. As the magnetic core wears out, it is necessary for the tape to deform as shown in FIG. 6(C) in order to run along the head shape. Since the deformation of the tape is not continuous, the above embodiment does not have any effect, but the wear resistance is improved compared to a conventional head having a sandwich structure in which the magnetic core is sandwiched between a protective film and a substrate.
以上説明したよ５に、本発明によれば、磁気コア材に軟
磁性金属を用いた薄膜磁気ヘッドにおいて、テープ摺動
面に露出した磁性膜の四方を、耐摩耗性に優れた非磁性
膜で囲むことにより、ヘッドの耐摩耗性を向トさせるこ
とができる。As explained above, according to the present invention, in a thin film magnetic head using a soft magnetic metal for the magnetic core material, the magnetic film exposed on the tape sliding surface is covered on all sides with a non-magnetic film having excellent wear resistance. By surrounding it with , the wear resistance of the head can be improved.
第１図は本発明の一実施例を示す磁気ヘッドの斜視図、
第２図（α）はテープ摺動面の図、（ｂ）〜（ｄ）はテ
ープ摺動部の縦断面図、第３図は製造方法を示す斜視図
、第４図（ａ）は本発明の実施例を示すヘッドの斜視図
、（ｈ）はテープ摺動面の斜視図、第５図は本発明の実
施例を示すテープ摺動面の側面図、第６図（１）は本発
明の応用例を示すヘッドの斜視図、（ｈ）はテープ摺動
面の説明図。
（Ｃ１〜（−）はテープ摺動部の縦断面図である。
■・・・非磁性基板、２１・・・第１磁気コア２２・・
・ＷＪ２磁気コア ３・・・非磁性スペーサー４
、４１ 、４２・・・保護膜、 ５・・・巻線穴６・・
・テープ。
オ １ 昌
（０Ｌン
才３肥
第４必
（九）
第５口
明細書の浄書（内容に変更なし）
ｌｃ ６ 図
（α）
手続補正書（方式）
事件の表示
昭和５９ 年特許願第２６６１３８ 号発明の名称
薄膜磁気ヘッド
補正をする者
事件との関係 特 許 出 願 人名 称 （５
１０）株式会社 日 立 製 作 折代 理 人
補正の対象図面（第６図）
補正の内容 別紙の通りFIG. 1 is a perspective view of a magnetic head showing an embodiment of the present invention;
Figure 2 (α) is a diagram of the tape sliding surface, (b) to (d) are longitudinal sectional views of the tape sliding part, Figure 3 is a perspective view showing the manufacturing method, and Figure 4 (a) is the book. A perspective view of a head showing an embodiment of the invention, (h) a perspective view of a tape sliding surface, FIG. 5 a side view of a tape sliding surface showing an embodiment of the invention, and FIG. FIG. 6(h) is a perspective view of a head showing an example of application of the invention; FIG. (C1 to (-) are longitudinal cross-sectional views of the tape sliding part. ■... Non-magnetic substrate, 21... First magnetic core 22...
・WJ2 magnetic core 3...non-magnetic spacer 4
, 41, 42...protective film, 5...winding hole 6...
·tape. O 1 Masaru (0L n sai 3 hi No. 4 required (9)) Engraving of the 5th statement (no change in content) lc 6 Figure (α) Procedural amendment (method) Indication of the case 1982 Patent Application No. 266138 Name of the invention Relation to the case involving a person who corrects thin-film magnetic heads Patent application Name of person (5)
10) Manufactured by Hitachi Co., Ltd. Drawing to be corrected by the folding agent (Fig. 6) Contents of the correction As shown in the attached sheet
Claims (1)
の非磁性材で囲み、テープ摺動面に露出する磁気コアの
幅がテープ走行方向に対し、ギャップ近傍を境にある幅
を持つて漸減する形状としたことを特徴とする薄膜磁気
ヘッド。1. The magnetic core exposed on the tape sliding surface is surrounded on all sides with wear-resistant non-magnetic material, and the width of the magnetic core exposed on the tape sliding surface is the width bordering the gap in the tape running direction. A thin film magnetic head characterized by having a shape that gradually decreases while holding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26613884A JPS61145716A (en) | 1984-12-19 | 1984-12-19 | Thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26613884A JPS61145716A (en) | 1984-12-19 | 1984-12-19 | Thin film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61145716A true JPS61145716A (en) | 1986-07-03 |
Family
ID=17426841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26613884A Pending JPS61145716A (en) | 1984-12-19 | 1984-12-19 | Thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61145716A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6353708A (en) * | 1986-08-25 | 1988-03-08 | Sony Corp | Thin film magnetic head |
| JPH01140411A (en) * | 1987-11-27 | 1989-06-01 | Hitachi Ltd | Magnetic head |
-
1984
- 1984-12-19 JP JP26613884A patent/JPS61145716A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6353708A (en) * | 1986-08-25 | 1988-03-08 | Sony Corp | Thin film magnetic head |
| JPH01140411A (en) * | 1987-11-27 | 1989-06-01 | Hitachi Ltd | Magnetic head |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS61145716A (en) | Thin film magnetic head | |
| JPS61151818A (en) | Thin film magnetic head | |
| JPH0664711B2 (en) | Thin film magnetic head | |
| JPS63119007A (en) | Magnetic head | |
| KR0136418B1 (en) | Metal in gap type magnetic head | |
| JPH05303711A (en) | Magnetic head | |
| JPH0540910A (en) | Manufacture of narrow track magnetic head | |
| KR920000214B1 (en) | Magnetic head | |
| JPS63266607A (en) | Magnetic head | |
| JPH04221408A (en) | Laminated magnetic head and its manufacture | |
| JPS62124684A (en) | Head slider | |
| JPS63304413A (en) | Thin film magnetic head and its manufacture | |
| JPH05282619A (en) | Magnetic head | |
| JP2556478B2 (en) | Magnetic head | |
| JPS6334709A (en) | Production of magnetic head | |
| JPH0775048B2 (en) | Magnetic head manufacturing method | |
| JPS61287017A (en) | Production of magnetic head | |
| JPH05250621A (en) | Magnetic head | |
| JPH0612620A (en) | Manufacture of magnetic head | |
| JPS62277607A (en) | Magnetic head | |
| JPS61294618A (en) | Production of magnetic head | |
| JPH05314423A (en) | Magnetic head | |
| JPS62229510A (en) | Thin film magnetic head | |
| JPH064846A (en) | Magnetic head slider | |
| JPH087212A (en) | Production of magnetic head |