JPS61144636U - - Google Patents
Info
- Publication number
- JPS61144636U JPS61144636U JP2851885U JP2851885U JPS61144636U JP S61144636 U JPS61144636 U JP S61144636U JP 2851885 U JP2851885 U JP 2851885U JP 2851885 U JP2851885 U JP 2851885U JP S61144636 U JPS61144636 U JP S61144636U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer surface
- nozzle
- susceptor
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000007781 pre-processing Methods 0.000 claims 1
- 238000011084 recovery Methods 0.000 description 1
- 238000012958 reprocessing Methods 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985028518U JPH0528758Y2 (enrdf_load_stackoverflow) | 1985-02-28 | 1985-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985028518U JPH0528758Y2 (enrdf_load_stackoverflow) | 1985-02-28 | 1985-02-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61144636U true JPS61144636U (enrdf_load_stackoverflow) | 1986-09-06 |
| JPH0528758Y2 JPH0528758Y2 (enrdf_load_stackoverflow) | 1993-07-23 |
Family
ID=30526465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985028518U Expired - Lifetime JPH0528758Y2 (enrdf_load_stackoverflow) | 1985-02-28 | 1985-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528758Y2 (enrdf_load_stackoverflow) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4999480A (enrdf_load_stackoverflow) * | 1973-01-02 | 1974-09-19 | ||
| JPS5493972A (en) * | 1978-01-06 | 1979-07-25 | Mitsubishi Electric Corp | Etching unit of semiconductor element |
| JPS5580319A (en) * | 1978-12-12 | 1980-06-17 | Nec Corp | Manufacture of semiconductor device |
| JPS5844838U (ja) * | 1981-09-21 | 1983-03-25 | 三菱電機株式会社 | ウエ−ハ洗浄乾燥装置 |
-
1985
- 1985-02-28 JP JP1985028518U patent/JPH0528758Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4999480A (enrdf_load_stackoverflow) * | 1973-01-02 | 1974-09-19 | ||
| JPS5493972A (en) * | 1978-01-06 | 1979-07-25 | Mitsubishi Electric Corp | Etching unit of semiconductor element |
| JPS5580319A (en) * | 1978-12-12 | 1980-06-17 | Nec Corp | Manufacture of semiconductor device |
| JPS5844838U (ja) * | 1981-09-21 | 1983-03-25 | 三菱電機株式会社 | ウエ−ハ洗浄乾燥装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0528758Y2 (enrdf_load_stackoverflow) | 1993-07-23 |