JPS61142865U - - Google Patents

Info

Publication number
JPS61142865U
JPS61142865U JP2485485U JP2485485U JPS61142865U JP S61142865 U JPS61142865 U JP S61142865U JP 2485485 U JP2485485 U JP 2485485U JP 2485485 U JP2485485 U JP 2485485U JP S61142865 U JPS61142865 U JP S61142865U
Authority
JP
Japan
Prior art keywords
temperature measuring
chemical vapor
plated substrate
substrate
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2485485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2485485U priority Critical patent/JPS61142865U/ja
Publication of JPS61142865U publication Critical patent/JPS61142865U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP2485485U 1985-02-25 1985-02-25 Pending JPS61142865U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2485485U JPS61142865U (enrdf_load_stackoverflow) 1985-02-25 1985-02-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2485485U JPS61142865U (enrdf_load_stackoverflow) 1985-02-25 1985-02-25

Publications (1)

Publication Number Publication Date
JPS61142865U true JPS61142865U (enrdf_load_stackoverflow) 1986-09-03

Family

ID=30519397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2485485U Pending JPS61142865U (enrdf_load_stackoverflow) 1985-02-25 1985-02-25

Country Status (1)

Country Link
JP (1) JPS61142865U (enrdf_load_stackoverflow)

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