JPS61140950U - - Google Patents
Info
- Publication number
- JPS61140950U JPS61140950U JP2530485U JP2530485U JPS61140950U JP S61140950 U JPS61140950 U JP S61140950U JP 2530485 U JP2530485 U JP 2530485U JP 2530485 U JP2530485 U JP 2530485U JP S61140950 U JPS61140950 U JP S61140950U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- gas
- rate control
- control means
- detection sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims description 10
- 239000012159 carrier gas Substances 0.000 claims description 3
- 238000002798 spectrophotometry method Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 4
- 239000000203 mixture Substances 0.000 claims 1
- 238000005375 photometry Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985025304U JPH052846Y2 (enrdf_load_stackoverflow) | 1985-02-22 | 1985-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985025304U JPH052846Y2 (enrdf_load_stackoverflow) | 1985-02-22 | 1985-02-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61140950U true JPS61140950U (enrdf_load_stackoverflow) | 1986-09-01 |
| JPH052846Y2 JPH052846Y2 (enrdf_load_stackoverflow) | 1993-01-25 |
Family
ID=30520255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985025304U Expired - Lifetime JPH052846Y2 (enrdf_load_stackoverflow) | 1985-02-22 | 1985-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH052846Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007129513A1 (ja) * | 2006-05-09 | 2007-11-15 | Sumitomo Seika Chemicals Co., Ltd. | 試料導入システム |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5660334A (en) * | 1979-10-20 | 1981-05-25 | Shimadzu Corp | Spectral analyzer for plasma light source light emission |
| JPS58167450U (ja) * | 1982-04-30 | 1983-11-08 | 株式会社島津製作所 | 高周波プラズマ分析装置 |
-
1985
- 1985-02-22 JP JP1985025304U patent/JPH052846Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5660334A (en) * | 1979-10-20 | 1981-05-25 | Shimadzu Corp | Spectral analyzer for plasma light source light emission |
| JPS58167450U (ja) * | 1982-04-30 | 1983-11-08 | 株式会社島津製作所 | 高周波プラズマ分析装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH052846Y2 (enrdf_load_stackoverflow) | 1993-01-25 |
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