JPS61140186A - Manufacture of cylindrical bimorph element - Google Patents

Manufacture of cylindrical bimorph element

Info

Publication number
JPS61140186A
JPS61140186A JP59261786A JP26178684A JPS61140186A JP S61140186 A JPS61140186 A JP S61140186A JP 59261786 A JP59261786 A JP 59261786A JP 26178684 A JP26178684 A JP 26178684A JP S61140186 A JPS61140186 A JP S61140186A
Authority
JP
Japan
Prior art keywords
sheet
cylindrical
ceramic sheet
ceramic
bimorph element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59261786A
Other languages
Japanese (ja)
Inventor
Tadayoshi Ushijima
牛島　忠良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59261786A priority Critical patent/JPS61140186A/en
Publication of JPS61140186A publication Critical patent/JPS61140186A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
    • C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/5105—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal with a composition mainly composed of one or more of the noble metals or copper
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/88—Metals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H10N30/097—Forming inorganic materials by sintering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Composite Materials (AREA)
  • Compositions Of Oxide Ceramics (AREA)

Abstract

PURPOSE:To produce the titled element of high reliability with good mass productivity by a method wherein a ceramic sheet with a paste of noble metal is rolled around a metallic rod and made integral with the noble metal with a static hydraulic press, and this integral body is sintered at a high temperature of 1,100-1,400 deg.C. CONSTITUTION:Polyvinylbutyral, dibutylphthalate, and butyl acetate are added to a piezoelectric powder made mainly of Pb, Zr, and Ti into a slurry, which is then drawn to sheet with a doctor blade, dried, and formed into a ceramic sheet. The ceramic sheet 4 is coated with Pt 2 and dried, and this is rolled around a metallic rod 5. The sheet 4 rolled around the metallic rod 5 is pressed under a pressure of about 300kg/cm<2> with a static hydraulic press into a cylinder, which is then cut into required shape. Then, the titled element is produced by sintering at 1,200 deg.C or so. A paste of palladium or gold can yield the same result.

Description

【発明の詳細な説明】 （産業上の利用分野） 本発明は民生用または産業用電子機器の微調整用駆動素
子として利用されている円筒形バイモルフ素子の製造方
法に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method of manufacturing a cylindrical bimorph element used as a drive element for fine adjustment of consumer or industrial electronic equipment.

（従来例の構成とその問題点） 近年、磁気テープ、磁気ディスクを使用する機器が急速
にひろまり、それに伴ない記録トラック上を忠実にヘッ
ド位置を制御する駆動素子が開発され、あわせて各種の
微調駆動素子の研究開発が行なわれている。この中でも
、特に円筒型バイモルフ素子は形状が小さい割りに大き
な変位が得られ、機械的強度も大きいことから注目され
ている。(Conventional structure and its problems) In recent years, devices using magnetic tapes and magnetic disks have rapidly spread, and along with this, drive elements that faithfully control the head position on the recording track have been developed. Research and development of fine adjustment drive elements is underway. Among these, the cylindrical bimorph element is attracting attention because it can obtain a large displacement despite its small size and has high mechanical strength.

従来の円筒型バイモルフ素子は第１図に示すように、押
出成形によって円筒型に成形されたセラミック成形体１
にペースト状の白金２を塗布、乾燥して、成形体１の外
型と同じ大きさの内径を有する円筒型のセラミック成形
体３を作製し、白金２を塗布したセラミック成形体１と
はめ合わせてバイモルフ構造とし、１２００℃前後で焼
結させる。A conventional cylindrical bimorph element, as shown in FIG. 1, is a ceramic molded body 1 formed into a cylindrical shape by extrusion molding.
Paste-like platinum 2 is applied to and dried to produce a cylindrical ceramic molded body 3 having an inner diameter of the same size as the outer mold of the molded body 1, which is fitted with the ceramic molded body 1 coated with platinum 2. It is made into a bimorph structure and sintered at around 1200°C.

しかし、セラミック成形体１の外径と、セラミック成形
体３の内径とのクリアランスが均一でなく、セラミック
成形体１および白金２と、セラミック成形体３との間に
デラミネーションができ、駆動用素子としての信頼性が
低下する欠点があった。However, the clearance between the outer diameter of the ceramic molded body 1 and the inner diameter of the ceramic molded body 3 is not uniform, and delamination occurs between the ceramic molded body 1, the platinum 2, and the ceramic molded body 3, and the driving element The drawback was that the reliability of the system was reduced.

（発明の目的） 本発明の目的は、従来の欠点を解消し、信頼性の高い円
筒型バイモルフ素子を量産性よく製造できる方法を提供
することである。(Objective of the Invention) An object of the present invention is to provide a method for manufacturing highly reliable cylindrical bimorph elements with good mass productivity by eliminating the conventional drawbacks.

（発明の構成） 本発明の円筒型バイモルフ素子の製造方法は、白金、パ
ラジウム、金などの貴金属ペーストを有するセラミック
シートを金属棒にロール巻きして静水圧プレスでセラミ
ックシートと貴金属とを一体化させ、１１００℃ないし
１４００℃の高温で焼結してなるものである。(Structure of the Invention) The method for manufacturing a cylindrical bimorph element of the present invention includes rolling a ceramic sheet containing a noble metal paste such as platinum, palladium, or gold around a metal rod, and integrating the ceramic sheet and the noble metal using a hydrostatic press. and sintered at a high temperature of 1100°C to 1400°C.

（実施例の説明） 本発明の一実施例を第２図ないし第６図に基づいて説明
する。(Description of Embodiment) An embodiment of the present invention will be described based on FIGS. 2 to 6.

Ｐｂ　、　Ｚｒ　、　Ｔｉを主成分とする圧電体粉末１
００部に対してポリビニルブチラール４．５部、ジブチ
ルフタレート４．５部、さらに酢酸ブチル２０部の割合
で別えてスラリー化し、これを、ドクターブレードでシ
ート引きして乾燥させ、セラミックシートを形成した。Piezoelectric powder 1 containing Pb, Zr, and Ti as main components
00 parts, 4.5 parts of polyvinyl butyral, 4.5 parts of dibutyl phthalate, and 20 parts of butyl acetate were separated into a slurry, and this was drawn into a sheet with a doctor blade and dried to form a ceramic sheet. .

第２図で示すように、セラミックシート４に白金２を塗
布し乾燥させ、これを第３図で示すように金属棒５にま
き付けた。金属棒５にロール巻きしたセラミックシート
４を静水圧プレスにより３００ｋｇ／ａｄの圧力で加圧
し、第４図で示すように円筒型に作製し、これを所定の
形状に切断し、１２００℃前後で焼結させ円筒型バイモ
ルフ素子を製造した。′ このときのセラミックスラリ−のポリビニルブチラール
は圧電体粉末に対して２ないし８部が望ましい。これは
、２部未満ではシートの保形性がなく、８部を越えると
バインダーが多重になり、焼結後のセラミック素子がポ
ーラスになるからである。さらに、ジブチルフタレート
はポリビニルブチラールに対して５０ないし１５０％が
望ましい。これは、５０％未満では加圧してもシートが
一体化しないし、１５０％を越えるとシートが強力な粘
性を生じるとともに保形性がなくなるからである。As shown in FIG. 2, platinum 2 was applied to a ceramic sheet 4 and dried, and then wrapped around a metal rod 5 as shown in FIG. A ceramic sheet 4 rolled around a metal rod 5 is pressurized at a pressure of 300 kg/ad using a hydrostatic press to produce a cylindrical shape as shown in FIG. A cylindrical bimorph device was manufactured by sintering. ' The ceramic slurry at this time preferably contains 2 to 8 parts of polyvinyl butyral based on the piezoelectric powder. This is because if the amount is less than 2 parts, the sheet will not retain its shape, and if it exceeds 8 parts, the binder will become multi-layered and the ceramic element after sintering will become porous. Further, dibutyl phthalate is preferably used in an amount of 50 to 150% based on polyvinyl butyral. This is because if it is less than 50%, the sheet will not be integrated even if it is pressurized, and if it exceeds 150%, the sheet will develop strong viscosity and lose its shape retention.

また、静水圧のプレスは２００ないし６００ｋｇ／ａＩ
Ｆが望ましく、これより低圧ではシートが一体化せず、
逆に高圧になると歪を生じるため好ましくない。In addition, hydrostatic presses have a pressure of 200 to 600 kg/aI.
F is preferable; if the pressure is lower than this, the sheets will not be integrated,
On the other hand, high pressure is not preferable because it causes distortion.

なお、上記の結果に基づいてパラジウム、金ペーストで
も実験を行なったが同様な結果が得られた。Based on the above results, experiments were also conducted using palladium and gold pastes, and similar results were obtained.

従来方法によって得られた円筒型バイモルフ素子の断面
の顕微鏡写真を第５図に、本発明によって得られた円筒
型バイモルフ素子の断面の顕微鏡写真を第６図に示す。FIG. 5 shows a micrograph of a cross section of a cylindrical bimorph element obtained by the conventional method, and FIG. 6 shows a micrograph of a cross section of a cylindrical bimorph element obtained by the present invention.

従来方法のバイモルフ素子は白金２′と外側のセラミッ
ク３′との間にデラミネーション６が発生しているが、
本発明によるものは内側の焼結されたセラミック１″と
白金２′、および外側の焼結されたセラミック３′との
間にデラミネーションがなく一体化し、バイモルフ構造
として優れていることがわかる。In the bimorph element of the conventional method, delamination 6 occurs between the platinum 2' and the outer ceramic 3'.
It can be seen that the structure according to the present invention has an excellent bimorph structure since the inner sintered ceramic 1'' and platinum 2' and the outer sintered ceramic 3' are integrated without delamination.

本発明によれば、セラミックと貴金属が容易に一体化し
て信頼性に優れ、生産性も良い種々の効果がある。According to the present invention, ceramic and noble metal can be easily integrated, resulting in various effects such as excellent reliability and good productivity.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の円筒型バイモルフ素子の斜視図。 第２図は本発明の一実施例による白金を塗布したセラミ
ックシートの斜視図、第３図は同金属棒にセラミックシ
ートを巻き付けた斜視図、第４図は同円筒型バイモルフ
素子の斜視図、第５図は従来の円筒型バイモルフ素子の
断面の顕微鏡写真、第６図は本発明の円筒型バイモルフ
素子の断面の顕微鏡写真である。 １．３　・・・セラミック成形体、　２　・・・白金ペ
ースト、　４　・・・セラミックシート　５−・・金属
棒、　６　・・・デラミネーション、１’、３’・・・
焼結されたセラミック。 特許出願人　松下電器産業株式会社 円 昭和６０年４月１５日 特許庁長官　志　賀　　　　学　彎 １・事件の表示　　特願昭５９−２６１７８６号２、発
　明　の名称 円筒型バイモルフ素子の製造方法 ３、補正をする者 事件との関係　　出願人 住所　　　大阪府門真市大字門真１００６番地名称（５
８２）松下電器産業株式会社 代表者　　　　　　　　山　　下　　俊　　彦４、代理
人 住所　東京都港区西新橋３丁目３番３号５、　Ｋｒ続補
正指令書の日付 昭和６０年　３月　６日（発送日昭和６０年　３月２６
日）６、補正により増加する発明の数　　０（１）　　
明細書を次表のとおり訂正する。 （２）　　第５図、第６図を別紙のように訂正する。 以　　上 手続補正書１発） 円 昭和６０年４月１５日 特許庁長官　志　賀　　　　学　殿 １・事件の表示　　特願昭５９−２６１７８６号２、発
　明の名称 円筒型バイモルフ素子の製造方法 ３、補正をする者 事件との関係　　出願人 住　　所　　大阪府門真市大字門真１００６番地　　　
名　称　　（５８２）松下電器産業株式会社代表者　　
　　　　　　山　　下　　俊　　彦４、代理人〒１０５ 任　　所　　東京都港区西新橋３丁目３番３号５、補正
により増加する発明の数　　　０６、補正の対象　　明
細書の発明の詳細な説明の欄７　補正の内容 明細書を次表のとおシ訂正する。 以　　上FIG. 1 is a perspective view of a conventional cylindrical bimorph element. FIG. 2 is a perspective view of a ceramic sheet coated with platinum according to an embodiment of the present invention, FIG. 3 is a perspective view of the ceramic sheet wrapped around the same metal rod, and FIG. 4 is a perspective view of the same cylindrical bimorph element. FIG. 5 is a micrograph of a cross section of a conventional cylindrical bimorph element, and FIG. 6 is a micrograph of a cross section of a cylindrical bimorph element of the present invention. 1.3...Ceramic molded body, 2...Platinum paste, 4...Ceramic sheet 5-...Metal rod, 6...Delamination, 1', 3'...
Sintered ceramic. Patent applicant: Matsushita Electric Industrial Co., Ltd. April 15, 1985 Commissioner of the Patent Office: Manabu Shiga 1. Indication of case: Japanese Patent Application No. 59-261786 2. Title of invention: Method for manufacturing cylindrical bimorph element 3. Relationship with the case of the person making the amendment Applicant address 1006 Kadoma, Kadoma City, Osaka Prefecture Name (5
82) Matsushita Electric Industrial Co., Ltd. Representative: Toshihiko Yamashita 4, Agent address: 3-3-3-5 Nishi-Shinbashi, Minato-ku, Tokyo Date of Kr continuation amendment order: March 6, 1985 (Shipping date: Showa) March 26, 1960
6. Number of inventions increased by amendment 0 (1)
The specification will be corrected as shown in the table below. (2) Figures 5 and 6 are corrected as shown in the attached sheet. 1 April 15, 1985 Commissioner of the Patent Office Manabu Shiga 1. Indication of the case Japanese Patent Application No. 59-261786 2. Name of the invention Method for manufacturing cylindrical bimorph device 3. Relationship with the case of the person making the amendment Applicant Address 1006 Kadoma, Kadoma City, Osaka Prefecture
Name (582) Representative of Matsushita Electric Industrial Co., Ltd.
Toshihiko Yamashita 4, Agent address: 105, Address: 3-3-3-5 Nishi-Shinbashi, Minato-ku, Tokyo Number of inventions increased by amendment: 06, Subject of amendment Detailed explanation of the invention in the specification Column 7 Amendment The detailed statement of contents will be corrected as shown in the table below. that's all

Claims (1)

【特許請求の範囲】[Claims] 　白金、パラジウム、金などの貴金属を有するセラミッ
クシートを金属棒にロール巻きして静水圧プレスでセラ
ミックシートと貴金属とを一体化させ、１１００℃ない
し１４００℃の高温で焼結してなることを特徴とする円
筒型バイモルフ素子の製造方法。It is characterized by being made by rolling a ceramic sheet containing precious metals such as platinum, palladium, and gold around a metal rod, integrating the ceramic sheet and the precious metal using a hydrostatic press, and sintering at a high temperature of 1100°C to 1400°C. A method for manufacturing a cylindrical bimorph element.
JP59261786A 1984-12-13 1984-12-13 Manufacture of cylindrical bimorph element Pending JPS61140186A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59261786A JPS61140186A (en) 1984-12-13 1984-12-13 Manufacture of cylindrical bimorph element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59261786A JPS61140186A (en) 1984-12-13 1984-12-13 Manufacture of cylindrical bimorph element

Publications (1)

Publication Number Publication Date
JPS61140186A true JPS61140186A (en) 1986-06-27

Family

ID=17366683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59261786A Pending JPS61140186A (en) 1984-12-13 1984-12-13 Manufacture of cylindrical bimorph element

Country Status (1)

Country Link
JP (1) JPS61140186A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103640075A (en) * 2013-11-01 2014-03-19 宁波凯普电子有限公司 Membrane pressing forming device and forming method for 0.1mm-thick thin piezoelectric ceramic pieces

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103640075A (en) * 2013-11-01 2014-03-19 宁波凯普电子有限公司 Membrane pressing forming device and forming method for 0.1mm-thick thin piezoelectric ceramic pieces
CN103640075B (en) * 2013-11-01 2016-04-06 宁波凯普电子有限公司 Thickness is the thin type piezoelectric ceramics sheet rolling formation method of 0.1mm

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