JPS61137672U - - Google Patents

Info

Publication number
JPS61137672U
JPS61137672U JP2034185U JP2034185U JPS61137672U JP S61137672 U JPS61137672 U JP S61137672U JP 2034185 U JP2034185 U JP 2034185U JP 2034185 U JP2034185 U JP 2034185U JP S61137672 U JPS61137672 U JP S61137672U
Authority
JP
Japan
Prior art keywords
bell gear
plate
susceptor
wafer
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2034185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2034185U priority Critical patent/JPS61137672U/ja
Publication of JPS61137672U publication Critical patent/JPS61137672U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP2034185U 1985-02-14 1985-02-14 Pending JPS61137672U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2034185U JPS61137672U (enrdf_load_stackoverflow) 1985-02-14 1985-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2034185U JPS61137672U (enrdf_load_stackoverflow) 1985-02-14 1985-02-14

Publications (1)

Publication Number Publication Date
JPS61137672U true JPS61137672U (enrdf_load_stackoverflow) 1986-08-27

Family

ID=30510735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2034185U Pending JPS61137672U (enrdf_load_stackoverflow) 1985-02-14 1985-02-14

Country Status (1)

Country Link
JP (1) JPS61137672U (enrdf_load_stackoverflow)

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