JPS61137635U - - Google Patents
Info
- Publication number
- JPS61137635U JPS61137635U JP1954185U JP1954185U JPS61137635U JP S61137635 U JPS61137635 U JP S61137635U JP 1954185 U JP1954185 U JP 1954185U JP 1954185 U JP1954185 U JP 1954185U JP S61137635 U JPS61137635 U JP S61137635U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- voltage
- electrodes
- power supply
- supply device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 claims description 4
- 208000028659 discharge Diseases 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 1
Description
第１図は本考案の放電処理装置の一例を示す部
分断面説明図、第２図は電極Ａの本数が多くなつ
た場合のコンデンサーと電極Ａの結線の一例を示
す概略図、第３図は電極Ａが多本数の場合のコン
デンサーと電極Ａの結線の他の例を示す概略図、
第４図は接地された補助電極を有する場合の電極
配置の一例を示す概略図、第５図は整合回路とし
てマツチングトランスを有する場合の電極ならび
にコンデンサーとの結線の一例を示す概略図、第
６図は第１図の電極部分の概略側面図である。
１：放電処理装置、２：真空容器、３：被処理
基材、４，５：気密シール部、６：棒状電極Ａ、
７：電極Ｂ、８：コンデンサー、９：整合回路、
１０：電源、１１：電極Ｂ、１２：補助電極、１
３：マツチングトランス、１４：真空容器壁。
FIG. 1 is a partial cross-sectional explanatory diagram showing an example of the discharge treatment apparatus of the present invention, FIG. 2 is a schematic diagram showing an example of the connection between the capacitor and electrode A when the number of electrodes A is increased, and FIG. A schematic diagram showing another example of the connection between a capacitor and electrode A when there are many electrodes A,
FIG. 4 is a schematic diagram showing an example of electrode arrangement when a grounded auxiliary electrode is provided, FIG. FIG. 6 is a schematic side view of the electrode portion of FIG. 1. 1: Discharge treatment device, 2: Vacuum container, 3: Treated substrate, 4, 5: Airtight seal portion, 6: Rod-shaped electrode A,
7: Electrode B, 8: Capacitor, 9: Matching circuit,
10: Power supply, 11: Electrode B, 12: Auxiliary electrode, 1
3: Matching transformer, 14: Vacuum container wall.
Claims (1)
該電極Ａに対向して設けられ、かつ該電極Ａの表
面積より広い表面積を有する接地された電極Ｂと
、該電極ＡおよびＢを収納するための真空容器と
、該電極Ａ，Ｂ間に電圧を印加するための電源装
置と、該電極Ａと該電源装置の出力端子との間に
直列に接続されたコンデンサーとを具備してなる
放電処理装置。 A rod-shaped electrode A made of a conductor that applies high voltage;
A grounded electrode B that is provided opposite to the electrode A and has a surface area larger than that of the electrode A, a vacuum container for housing the electrodes A and B, and a voltage between the electrodes A and B. A discharge treatment device comprising: a power supply device for applying a voltage; and a capacitor connected in series between the electrode A and an output terminal of the power supply device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1954185U JPS61137635U (en) | 1985-02-14 | 1985-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1954185U JPS61137635U (en) | 1985-02-14 | 1985-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61137635U true JPS61137635U (en) | 1986-08-27 |
Family
ID=30509212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1954185U Pending JPS61137635U (en) | 1985-02-14 | 1985-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61137635U (en) |
-
1985
- 1985-02-14 JP JP1954185U patent/JPS61137635U/ja active Pending
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