JPS6113553Y2 - - Google Patents

Info

Publication number
JPS6113553Y2
JPS6113553Y2 JP1981051979U JP5197981U JPS6113553Y2 JP S6113553 Y2 JPS6113553 Y2 JP S6113553Y2 JP 1981051979 U JP1981051979 U JP 1981051979U JP 5197981 U JP5197981 U JP 5197981U JP S6113553 Y2 JPS6113553 Y2 JP S6113553Y2
Authority
JP
Japan
Prior art keywords
substrate
discharge
gas
sputtering
width direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981051979U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57167763U (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981051979U priority Critical patent/JPS6113553Y2/ja
Publication of JPS57167763U publication Critical patent/JPS57167763U/ja
Application granted granted Critical
Publication of JPS6113553Y2 publication Critical patent/JPS6113553Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1981051979U 1981-04-13 1981-04-13 Expired JPS6113553Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981051979U JPS6113553Y2 (https=) 1981-04-13 1981-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981051979U JPS6113553Y2 (https=) 1981-04-13 1981-04-13

Publications (2)

Publication Number Publication Date
JPS57167763U JPS57167763U (https=) 1982-10-22
JPS6113553Y2 true JPS6113553Y2 (https=) 1986-04-26

Family

ID=29848688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981051979U Expired JPS6113553Y2 (https=) 1981-04-13 1981-04-13

Country Status (1)

Country Link
JP (1) JPS6113553Y2 (https=)

Also Published As

Publication number Publication date
JPS57167763U (https=) 1982-10-22

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