JPS61134601A - Magnetic type displacement sensor - Google Patents
Magnetic type displacement sensorInfo
- Publication number
- JPS61134601A JPS61134601A JP25649784A JP25649784A JPS61134601A JP S61134601 A JPS61134601 A JP S61134601A JP 25649784 A JP25649784 A JP 25649784A JP 25649784 A JP25649784 A JP 25649784A JP S61134601 A JPS61134601 A JP S61134601A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- hall element
- holding member
- generation source
- magnetic pole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 61
- 230000004907 flux Effects 0.000 claims description 22
- 238000001514 detection method Methods 0.000 abstract description 13
- 229920003002 synthetic resin Polymers 0.000 abstract description 2
- 239000000057 synthetic resin Substances 0.000 abstract description 2
- 230000005389 magnetism Effects 0.000 abstract 5
- 238000010586 diagram Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は変位量に比例した電気信号を得る磁気形変位セ
ンサに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic displacement sensor that obtains an electrical signal proportional to the amount of displacement.
［従来の技術］
直線変位をリニアに検出する変位センサとして、差動変
圧器やポテンショメータが使用されている。[Prior Art] Differential transformers and potentiometers are used as displacement sensors that linearly detect linear displacement.
差動変圧器は、励磁電源に接続される１−次コイルと、
該１次コイルの両端にそれぞれ同軸的に配置された第１
及び第２の２次コイルと、これらのコイルの内側を軸線
方向に変位し得るように設けられた可動鉄心とを備え、
可動鉄心の変位に伴って第１及び第２の２次コイルに誘
起する電圧の差が可動鉄心の変位に比例していることを
利用して変位量を検出する。またポテンショメータは、
固定抵抗体と該固定抵抗体上を摺動する開動子とからな
り、固定抵抗体の一端と摺動子との間の抵抗値が摺動子
の変位に伴って変化することを利用して変位量を検出す
る。The differential transformer includes a primary coil connected to an excitation power source,
a first coil disposed coaxially at each end of the primary coil;
and a second secondary coil, and a movable iron core provided so as to be displaceable in the axial direction inside these coils,
The amount of displacement is detected by utilizing the fact that the difference between the voltages induced in the first and second secondary coils due to the displacement of the movable core is proportional to the displacement of the movable core. Also, the potentiometer is
It consists of a fixed resistor and an opening element that slides on the fixed resistor, and utilizes the fact that the resistance value between one end of the fixed resistor and the slider changes with the displacement of the slider. Detect the amount of displacement.
［発明が解決しようとする問題点］
直線変位を検出するセンサとして多く用いられている差
動変圧器やポテンショメータは構成部品が精巧で構造が
複雑であるため、高価になるのを避けられず、機械の各
可動部の変位量を検出するために多量に使用するのには
適していなかった。[Problems to be Solved by the Invention] Differential transformers and potentiometers, which are often used as sensors to detect linear displacement, have sophisticated components and complex structures, so they are inevitably expensive. It was not suitable for use in large quantities to detect the amount of displacement of each moving part of a machine.
またこれらのセンサは大形になるのを避けられないため
、機械の可動部にコンパクトに取付けることが困難であ
った。Furthermore, since these sensors are inevitably large in size, it has been difficult to mount them compactly on moving parts of machines.
本発明の目的は、ホール素子を検出素子として用いて簡
単な構造で変位をリニアに検出し得るようにした磁気形
変位センサを提供することにある。An object of the present invention is to provide a magnetic displacement sensor that uses a Hall element as a detection element and can linearly detect displacement with a simple structure.
［問題点を解決するための手段］
本発明は、その実施例を示す第１図乃至第４図に見られ
るように、相対的に変位し得るように設けられた磁気発
生源保持部材１及びホール素子保持部材２と、磁気発生
源保持部材１に保持された磁気発生源３と、ホール素子
保持部材２に保持されて磁気発生源３の磁極面３ａから
生じる磁束を検出するホール素子４とを備えており、磁
気発生源３のホール素子側磁極面３ａはｆｉｔｉｇ発生
源保持部材１とホール素子保持部材２との相対的な変位
（に伴ってホール素子４との間の距離が変化す
るように設けられている。[Means for Solving the Problems] As shown in FIGS. 1 to 4 showing embodiments of the present invention, a magnetic source holding member 1 and a magnetic source holding member 1 are provided so as to be relatively movable. A Hall element holding member 2, a magnetic source 3 held by the magnetic source holding member 1, and a Hall element 4 held by the Hall element holding member 2 to detect magnetic flux generated from the magnetic pole surface 3a of the magnetic source 3. The magnetic pole surface 3a of the magnetic generation source 3 on the Hall element side changes due to the relative displacement between the Fitig source holding member 1 and the Hall element holding member 2 (according to which the distance between the Hall element 4 changes). It is set up like this.
磁気発生源保持部材とホール素子保持部材との間の相対
的変位に伴って磁極面３ａとホール素子４との間の距離
を変化させるようにするための構造は種々考えられるが
、幾つかの例を挙げると、第１図に示した例では、磁気
発生源３が磁石３０と磁極片３１とにより構成され、磁
極片３１の厚みを磁気発生源保持部材１とホール素子保
持部材２との間の相対的変位の方向（ＡＩまたはＡ２方
向）に沿って徐々に変化させることにより磁極面３ａが
変位方向に対して傾斜させられている。Various structures can be considered for changing the distance between the magnetic pole surface 3a and the Hall element 4 in accordance with the relative displacement between the magnetic generation source holding member and the Hall element holding member. To give an example, in the example shown in FIG. The magnetic pole face 3a is made to be inclined with respect to the displacement direction by gradually changing the direction of relative displacement between the two (AI or A2 direction).
また第２図に示した例では、磁気発生源３が磁石３０と
磁極片３１とにより構成され、磁極片３１０ホ一ル素子
側磁極面３ａが階段状に形成されている。Further, in the example shown in FIG. 2, the magnetic generation source 3 is constituted by a magnet 30 and a magnetic pole piece 31, and the magnetic pole piece 310 and the magnetic pole surface 3a on the hole element side are formed in a stepped shape.
更に第３図に示した例では、磁気発生源３が磁石３０か
うなり、該磁石３０は、そのボール素子側磁極面が変位
方向に対して傾斜するように配置されている。Furthermore, in the example shown in FIG. 3, the magnetic generation source 3 is a magnet 30, and the magnet 30 is arranged so that its ball element side magnetic pole surface is inclined with respect to the displacement direction.
［発明の作用］
上記の構成において、磁気発生源保持部材１及びホール
素子保持部材２がＡ１方向またはＡ２方向に相対的に変
位すると、磁極面３ａとホール素子との間の距離が変化
するため、ホール素子４の出力電圧が変化する。このホ
ール素子の出力電圧の変化量は、磁気発生源保持部材１
とホール素子保持部材２との間の変位量に比例している
ため、磁気発生源保持部材１及びホール素子保持部材２
の内の一方を固定し、他方を可動として可動側の保持部
材を機械の可動部分等の被検出部に結合することにより
、被検出部の変位量を検出することができる。またホー
ル素子の各瞬時の出力電圧の大きさは該ホール素子の磁
気発生源に対する位置に対応しているので、該ホール素
子の出力電圧の大きさから被検出部の位置を検出するこ
とができる。[Operation of the invention] In the above configuration, when the magnetic source holding member 1 and the Hall element holding member 2 are relatively displaced in the A1 direction or the A2 direction, the distance between the magnetic pole face 3a and the Hall element changes. , the output voltage of the Hall element 4 changes. The amount of change in the output voltage of this Hall element is determined by the magnetic generation source holding member 1
Since it is proportional to the amount of displacement between the magnetic source holding member 1 and the Hall element holding member 2,
By fixing one of them, making the other movable, and coupling the movable holding member to a detected part such as a movable part of a machine, the amount of displacement of the detected part can be detected. Furthermore, since the magnitude of the output voltage of the Hall element at each instant corresponds to the position of the Hall element with respect to the magnetic generation source, the position of the detected part can be detected from the magnitude of the output voltage of the Hall element. .
［実施例］
以下添附図面を参照して本発明の詳細な説明する。
−
第１図は本発明の一実施例を示したもので、同図におい
て１は磁気発生源保持部材、２はホール素子保持部材で
ある。この例では、磁気発生源保持部材１及びホール素
子保持部材２が合成樹脂により形成され、磁気発生源保
持部材１及びホール素子保持部材２内にそれぞれ磁気発
生源３及びホ−ル素子４が埋設されている。ホール素子
保持部材２の内部を貫通させて孔２１が設けられ、該孔
２１内に該孔２１と相似な断面形状を有する磁気発生源
保持部材１が摺動自在に嵌合されている。[Example] The present invention will be described in detail below with reference to the accompanying drawings.
- FIG. 1 shows an embodiment of the present invention, in which 1 is a magnetic generation source holding member and 2 is a Hall element holding member. In this example, the magnetic generation source holding member 1 and the Hall element holding member 2 are formed of synthetic resin, and the magnetic generation source 3 and the Hall element 4 are embedded in the magnetic generation source holding member 1 and the Hall element holding member 2, respectively. has been done. A hole 21 is provided penetrating the inside of the Hall element holding member 2, and the magnetic generation source holding member 1 having a cross-sectional shape similar to that of the hole 21 is slidably fitted into the hole 21.
磁気発生源保持部材１を孔２１内で回転させることなく
、該孔２１の軸線方向（ＡＩ力方向びＡ２方向）にのみ
変位させるようにするため、磁気発生源１及び孔２１は
共に非円形な断面形状を有するように形成されている。In order to displace the magnetic source holding member 1 only in the axial direction of the hole 21 (AI force direction and A2 direction) without rotating the magnetic source holding member 1 within the hole 21, the magnetic source 1 and the hole 21 are both non-circular. It is formed to have a cross-sectional shape.
ホール素子４はその磁束検出面４ａを孔２１１１１１１
に向けて該孔２１の軸線と平行させた状態で孔２１の長
手方・向の中央部に対応する位置に配置され、ホール素
子４から引出された４本のリード線Ｗ１乃至Ｗ４が保持
部材２の側面から外部に導出されている。The Hall element 4 has its magnetic flux detection surface 4a connected to the hole 2111111.
The four lead wires W1 to W4 drawn out from the Hall element 4 are arranged in a position corresponding to the longitudinal center of the hole 21 in parallel to the axis of the hole 21, and the four lead wires W1 to W4 drawn out from the Hall element 4 are attached to the holding member. It is led out from the side of 2.
磁気発生源保持部材１の内部に埋設された磁気発生源３
は、帯板状の磁石３０と、磁石３０と同一の輪郭形状を
有して該磁石３０のホール素子側の磁極面３０ａに一面
が密接された状態で接合された帯板状の磁極片３１とか
らなっている。磁石３０はその長さ方向に沿って表面の
磁束密度が均一になるように厚み方向に着磁され、磁極
片３１のホール素子４側の面が磁気発生源の磁極面３ａ
としてホール素子４に対向せしめられている。この磁気
発生源３は、磁石３０及び１１橿片３１の長手方向を孔
２１の軸線方向に一致させて、且つ磁極片３１をホール
素子４側に向けて磁気発生源保持部材１内に埋設されて
いる。そして磁極片３１は磁気発生源保持部材１の変位
の方向に沿って厚みが直線的に変化する形状に形成され
、これにより磁極面３ａが変位方向に対して傾斜させら
れている。磁気発生源保持部材１の軸線方向の両端には
孔２１の軸線方向に伸びる可動軸５Ａ及び５Ｂが取付け
られ、これらの可動軸のいずれかが、図示しない被検出
部に結合されるようになっている。Magnetic source 3 embedded inside magnetic source holding member 1
A strip-shaped magnet 30 and a strip-shaped magnetic pole piece 31 having the same contour shape as the magnet 30 and joined with one surface in close contact with the magnetic pole surface 30a on the Hall element side of the magnet 30. It consists of The magnet 30 is magnetized in the thickness direction so that the magnetic flux density on the surface is uniform along the length direction, and the surface of the magnetic pole piece 31 on the Hall element 4 side is the magnetic pole face 3a that is the magnetic generation source.
It is made to face the Hall element 4 as a. This magnetic source 3 is embedded in the magnetic source holding member 1 with the longitudinal direction of the magnets 30 and 11 and the rod piece 31 aligned with the axial direction of the hole 21, and with the magnetic pole piece 31 facing the Hall element 4 side. ing. The magnetic pole piece 31 is formed in a shape whose thickness changes linearly along the direction of displacement of the magnetic source holding member 1, so that the magnetic pole surface 3a is inclined with respect to the displacement direction. Movable shafts 5A and 5B extending in the axial direction of the hole 21 are attached to both ends of the magnetic source holding member 1 in the axial direction, and one of these movable shafts is coupled to a detected portion (not shown). ing.
ホール素子４から引出された４本のリード線のうち、電
源端子から引出された２本のリード１ＩＷ１及びＷ２は
電源６の出力端子に接続され、該電源６からホール素子
４に電流Ｉが与えられる。ホール素子４の出力端子から
引出された２本のり一ド線Ｗ３及びＷ４は増幅器７の入
力端子に接続されている。増幅器７の出力電圧は電圧−
変位変換回路８に入力されて磁気発生源３の変位を示す
信号に変換され、該変換回路の出力が表示器９に入力さ
れている。Among the four lead wires drawn out from the Hall element 4, two leads 1IW1 and W2 drawn out from the power supply terminal are connected to the output terminal of a power supply 6, and a current I is applied from the power supply 6 to the Hall element 4. It will be done. Two power lines W3 and W4 drawn out from the output terminal of the Hall element 4 are connected to the input terminal of the amplifier 7. The output voltage of amplifier 7 is voltage -
The signal is input to the displacement conversion circuit 8 and converted into a signal indicating the displacement of the magnetic source 3, and the output of the conversion circuit is input to the display 9.
上記の実施例において、ホール素子４に与える電流Ｉを
一定とした場合のホール素子の出力電圧■０の磁束密度
Ｂに対する特性は第５図に示す通りで、ホール素子の出
力電圧は磁束密度Ｂに比例して直線的に変化する。一方
、磁気発生源３の磁極面３ａは磁気発生源保持部材１の
変位の方向に対して傾斜しているため、磁極面３ａとホ
ール素子４の磁束検出面４ａとの間の距離が磁気発生源
保持部材１の変位に伴って直線的に変化する。また磁気
発生源３の磁極面３ａは傾斜しているが、磁極片３１が
磁石３０に密接して面接合されているため、磁極面３ａ
での磁束密度は略一定である。In the above embodiment, when the current I applied to the Hall element 4 is constant, the characteristics of the output voltage of the Hall element with respect to the magnetic flux density B of 0 are as shown in FIG. changes linearly in proportion to On the other hand, since the magnetic pole surface 3a of the magnetic source 3 is inclined with respect to the direction of displacement of the magnetic source holding member 1, the distance between the magnetic pole surface 3a and the magnetic flux detection surface 4a of the Hall element 4 is It changes linearly as the source holding member 1 is displaced. Although the magnetic pole face 3a of the magnetic generation source 3 is inclined, since the magnetic pole piece 31 is closely surface-bonded to the magnet 30, the magnetic pole face 3a
The magnetic flux density at is approximately constant.
そこでＩａｔ面３ａがホール素子４の磁束検出面４ａに
最も近接する状態になる磁気発生源保持部材１の位置を
始点Ｏとして、該磁気発生源保持部材１を第１図のＡ１
方向に変位させた場合の磁束密度（磁束検出面４ａにお
ける磁束密度）Ｂの変化を示すと第６図のようになる。Therefore, the position of the magnetic source holding member 1 where the Iat surface 3a is closest to the magnetic flux detection surface 4a of the Hall element 4 is set as the starting point O, and the magnetic generating source holding member 1 is moved to A1 in FIG.
FIG. 6 shows a change in the magnetic flux density (magnetic flux density on the magnetic flux detection surface 4a) B when the magnetic flux is displaced in the direction.
従って磁気発生源保持部材１の変位に対するホール素子
４の出力電圧ＶＯの特性は第７図のようになり、ホール
素子４の出力電圧ｖＯは変位量の増大に伴って低下して
いく。なお、磁極面３ａがホール素子４の磁束検出面４
ａから最も離れた状態になる磁気発生源保持部材１の位
置を始点０として、磁気発生源保持部材１をＡ２方向に
変位させた場合には、第７図とは逆に変位量の増大に伴
ってホール素子の出力電圧■０が増大することになる。Therefore, the characteristics of the output voltage VO of the Hall element 4 with respect to the displacement of the magnetic source holding member 1 are as shown in FIG. 7, and the output voltage VO of the Hall element 4 decreases as the amount of displacement increases. Note that the magnetic pole surface 3a is the magnetic flux detection surface 4 of the Hall element 4.
When the magnetic source holding member 1 is displaced in the A2 direction with the position of the magnetic generating source holding member 1 that is farthest from A as the starting point 0, the amount of displacement increases, contrary to FIG. Correspondingly, the output voltage 0 of the Hall element increases.
上記のように、ホール素子４の出力電圧ＶＯは変位量に
応じて直線的に変化するため、該出力電圧により被検出
部の変位を直線的に検出することができる。またホール
素子４の出力電圧ＶＯの大きさは磁気発生源の位置に対
応している為、出力電圧Ｖｏの大きざにより被検出部の
位置を知ることができる。変位量は、ホール素子４の出
力電圧Ｖｏと、磁極面３ａの磁束密度及び磁極面３ａの
傾斜角度により決まるホール素子４の磁束検出面４ａの
磁束密度Ｂと、ホール素子４に流す電流の、 大きざと
、ホール定数とから求めることができる。As described above, since the output voltage VO of the Hall element 4 changes linearly according to the amount of displacement, the displacement of the detected portion can be detected linearly based on the output voltage. Furthermore, since the magnitude of the output voltage VO of the Hall element 4 corresponds to the position of the magnetic generation source, the position of the detected portion can be known from the magnitude of the output voltage Vo. The amount of displacement is determined by the output voltage Vo of the Hall element 4, the magnetic flux density B of the magnetic flux detection surface 4a of the Hall element 4, which is determined by the magnetic flux density of the magnetic pole surface 3a, and the inclination angle of the magnetic pole surface 3a, and the current flowing through the Hall element 4. It can be determined from the size and Hall constant.
磁極面３ａの傾斜角を適宜に設定することにより、単位
変位量当たりの出力電圧Ｖｏの変化量を調整して分解能
を調整することができる。By appropriately setting the inclination angle of the magnetic pole face 3a, it is possible to adjust the amount of change in the output voltage Vo per unit displacement amount and adjust the resolution.
第１図に示した例では、ホール素子４の出力電圧が増幅
器７により増幅された後電圧−変位変換回路８に入力さ
れる。この変換回路は、ホール素子の出力電圧Ｖｏを変
位量検出信号に変換し１、表示器９を動作させる。表示
器９はアナログまたはデジタル的に変位量を表示する。In the example shown in FIG. 1, the output voltage of the Hall element 4 is amplified by the amplifier 7 and then input to the voltage-displacement conversion circuit 8. This conversion circuit converts the output voltage Vo of the Hall element into a displacement detection signal 1, and operates the display 9. The display 9 displays the amount of displacement in an analog or digital manner.
尚、ホール素子４の出力を増幅した後、被検出部の変位
を制御する適宜の制御装置に与える変位検出信号として
用いることができるのは勿論である。Of course, after the output of the Hall element 4 is amplified, it can be used as a displacement detection signal to be given to an appropriate control device that controls the displacement of the detected portion.
上記の実施例では、磁気発生源３のホール素子ｆ１８＠
楊面３ａを変位方向に対して直線的に傾斜させたが、第
２図に示すように、磁極面３ａを変位方向に沿って階段
状に変化する形状に形成することもできる。磁気発生源
３をこのように構成すると、変位に対するホール素子の
出力電圧ｖＯの特性は第８図のようになり、ホール素子
の出力電圧は変位に対して階段状に変化する。In the above embodiment, the Hall element f18 of the magnetic generation source 3
Although the tooth surface 3a is tilted linearly with respect to the displacement direction, the magnetic pole surface 3a may be formed in a shape that changes stepwise along the displacement direction, as shown in FIG. When the magnetic generation source 3 is configured in this way, the characteristics of the output voltage vO of the Hall element with respect to displacement are as shown in FIG. 8, and the output voltage of the Hall element changes stepwise with respect to displacement.
また上記の各実施例では、磁気発生源３を磁石と磁極片
とにより構成したが、第３図に示すように磁気発生源３
を磁石３のみにより構成して、該磁石３を変位方向に対
して傾斜ざばて配置してもよい。Further, in each of the above embodiments, the magnetic generation source 3 is composed of a magnet and a magnetic pole piece, but as shown in FIG.
may be constructed of only magnets 3, and the magnets 3 may be arranged obliquely with respect to the displacement direction.
更に、上記の各実施例では、磁気発生源を可動側に配置
したが、第４図に示すように、孔１１を有する磁気発生
源保持部材１内に磁気発生源３を埋設し、孔１１内に摺
動自在に嵌合されたホール素子保持部材２内に１−′し
素子４を埋ｘｉ Ｌ／ ｉ：・１ ニール素子保
持部材２を可動としてもよい。この場合、ホール素子保
持部材２に可動軸５Ａ、５Ｂを取付け、これらの可動軸
のいずれかを被検出部に結合する。第４図に示す例にお
いて、磁気発生源３は第１図の実施例と同様に磁石３０
と磁極片３１とにより構成され、該磁気発生源３はその
長手方向が孔１１の軸線方向に一致するように配置され
ている。またホール素子４はその磁束検出面４ａを磁気
発生源３側に向けた状態でホール素子保持部材２内に埋
設され、ホール素子４から引出されたリード線Ｗ１〜Ｗ
４は可動軸５Ｂに沿って外部に導出されている。Furthermore, in each of the above embodiments, the magnetic source is placed on the movable side, but as shown in FIG. The element 4 is buried in the Hall element holding member 2 which is slidably fitted therein.The Neil element holding member 2 may be movable. In this case, the movable shafts 5A and 5B are attached to the Hall element holding member 2, and either of these movable shafts is coupled to the detected portion. In the example shown in FIG. 4, the magnetic source 3 has a magnet 30 similar to the embodiment shown in FIG.
and a magnetic pole piece 31, and the magnetic generation source 3 is arranged so that its longitudinal direction coincides with the axial direction of the hole 11. Further, the Hall element 4 is buried in the Hall element holding member 2 with its magnetic flux detection surface 4a facing the magnetic generation source 3 side, and the lead wires W1 to W drawn out from the Hall element 4 are
4 is led out to the outside along the movable shaft 5B.
上記の各実施例においては、可動側の保持部材に可動軸
５Ａ及び５Ｂを取付けて、該可動軸を利用して被検出部
に結合するようにしたが、可動側の保持部材を被検出部
に直接固定したり、被検出部に埋設したりすることもで
きる。また被検出部そのもの及び該被検出部近傍の固定
部材をそれぞれ可動側及び固定側の保持部材として用い
て、該被検出部に磁気発生源またはホール素子を保持さ
せ、該被検出部近傍の固定部材にホール素子または磁気
発生源を保持させるようにしてもよい。In each of the above embodiments, the movable shafts 5A and 5B are attached to the movable holding member, and the movable shafts are used to couple to the detected part. It can also be directly fixed to the body or buried in the detected part. In addition, the detected part itself and a fixed member near the detected part are used as holding members on the movable side and fixed side, respectively, and the magnetic generation source or Hall element is held in the detected part, and the fixed member near the detected part is fixed. The member may hold a Hall element or a magnetic generation source.
［発明の効果］
以上のように、本発明によれば、磁気発生源とホール素
子とを相対的に変位可能に設け、該相対的変位に伴って
磁気発生源の磁極面とホール素子との間の距離を変化さ
せるように該磁極面を設けたので、被検出部の変位を直
線的に検出することができる変位センサを簡単な構造で
得ることができ、変位センサの小形化を図ることができ
る利点がある。[Effects of the Invention] As described above, according to the present invention, the magnetic generation source and the Hall element are provided so as to be relatively displaceable, and the relationship between the magnetic pole surface of the magnetic generation source and the Hall element is changed according to the relative displacement. Since the magnetic pole surfaces are provided so as to change the distance between them, a displacement sensor capable of linearly detecting the displacement of the detected part can be obtained with a simple structure, and the displacement sensor can be miniaturized. It has the advantage of being able to
第１図は本発明の実施例のセンサを断面図で示し該セン
サと共に用いられる電気回路の一例をブロック図で示し
た構Ｔｉｔ図、第２図及び第３図はそれぞれ第１図の実
施例で用いる磁気発生源の異なる変形例を示した断面図
、第４図は本発明の他の実施例を示す断面図、第５図は
ホール素子の出力電圧と磁束密度との関係を示す線図、
第６図は第１図の実施例におけるホール素子の磁束検出
面の磁束密度と変位との関係を示す線図、第７図はホー
ル素子の出力電圧と変位との関係を示す線図、第８図は
第２図の磁気発生源を用いた場合のホール素子の出力電
圧と変位との関係を示す線図である。
１・・・磁気発生源保持部材、２・・・ホール素子保持
部材、３・・・磁気発生源、３ｏ・・・磁石、３１・・
・磁極片、３ａ・・・磁気発生源の磁極面、４・・・ホ
ール素子、４ａ・・・磁束検出面。
第１図FIG. 1 shows a cross-sectional view of a sensor according to an embodiment of the present invention, and a block diagram showing an example of an electric circuit used with the sensor. FIGS. 2 and 3 show an example of the embodiment of FIG. 4 is a sectional view showing another embodiment of the present invention, and FIG. 5 is a diagram showing the relationship between the output voltage of the Hall element and the magnetic flux density. ,
FIG. 6 is a diagram showing the relationship between the magnetic flux density and displacement of the magnetic flux detection surface of the Hall element in the embodiment of FIG. 1, FIG. 7 is a diagram showing the relationship between the output voltage of the Hall element and displacement, and FIG. FIG. 8 is a diagram showing the relationship between the output voltage and displacement of the Hall element when the magnetic generation source of FIG. 2 is used. DESCRIPTION OF SYMBOLS 1... Magnetic generation source holding member, 2... Hall element holding member, 3... Magnetic generation source, 3o... Magnet, 31...
- Magnetic pole piece, 3a... Magnetic pole surface of magnetic generation source, 4... Hall element, 4a... Magnetic flux detection surface. Figure 1
Claims (4)
保持部材及びホール素子保持部材と、前記磁気発生源保
持部材に保持された磁気発生源と、前記ホール素子保持
部材に保持されて前記磁気発生源の磁極面から生じる磁
束を検出するホール素子とを具備し、前記磁気発生源の
ホール素子側磁極面は前記磁気発生源保持部材とホール
素子保持部材との相対的な変位に伴って前記ホール素子
との間の距離が変化するように設けられていることを特
徴とする磁気形変位センサ。(1) A magnetic generation source holding member and a Hall element holding member provided so as to be relatively movable, a magnetic generation source held by the magnetic generation source holding member, and a magnetic generation source held by the Hall element holding member. a Hall element that detects a magnetic flux generated from a magnetic pole surface of the magnetic generation source, and a Hall element-side magnetic pole surface of the magnetic generation source is configured to detect magnetic flux generated from a magnetic pole surface of the magnetic generation source according to relative displacement between the magnetic generation source holding member and the Hall element holding member. 1. A magnetic displacement sensor, characterized in that the sensor is provided so that the distance between it and the Hall element changes.
磁石と、前記磁石のホール素子側の磁極表面に一面が密
接された状態で該磁石に接合された磁極片とからなり、
前記磁極片は前記磁気発生源保持部材及びホール素子保
持部材の相対的な変位の方向に沿って徐々に厚みが変化
する形状に形成されていることを特徴とする特許請求の
範囲第１項に記載の磁気形変位センサ。(2) The magnetic generation source consists of a plate-shaped magnet magnetized in the thickness direction, and a magnetic pole piece joined to the magnet with one surface in close contact with the magnetic pole surface on the Hall element side of the magnet. ,
Claim 1, wherein the magnetic pole piece is formed in a shape whose thickness gradually changes along the direction of relative displacement of the magnetic generation source holding member and the Hall element holding member. The described magnetic displacement sensor.
子側の磁極面に一面が密接された状態で該磁石に接合さ
れた磁極片とからなり、前記磁極片のホール素子側磁極
面は階段状に形成されていることを特徴とする特許請求
の範囲第１項に記載の磁気形変位センサ。(3) The magnetic generation source includes a magnet and a magnetic pole piece joined to the magnet with one surface in close contact with the magnetic pole face of the magnet on the Hall element side, and the magnetic pole piece has a magnetic pole face on the Hall element side of the magnetic pole piece. 2. The magnetic displacement sensor according to claim 1, wherein the magnetic displacement sensor has a stepped shape.
ホール素子側磁極面が前記磁気発生源保持部材とホール
素子保持部材の相対的変位の方向に対して傾斜するよう
に設けられていることを特徴とする特許請求の範囲第１
項に記載の磁気形変位センサ。(4) The magnetic generation source is composed of a magnet, and the magnet is provided so that its Hall element side magnetic pole surface is inclined with respect to the direction of relative displacement between the magnetic generation source holding member and the Hall element holding member. Claim 1 characterized in that
The magnetic displacement sensor described in .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25649784A JPS61134601A (en) | 1984-12-06 | 1984-12-06 | Magnetic type displacement sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25649784A JPS61134601A (en) | 1984-12-06 | 1984-12-06 | Magnetic type displacement sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61134601A true JPS61134601A (en) | 1986-06-21 |
Family
ID=17293457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25649784A Pending JPS61134601A (en) | 1984-12-06 | 1984-12-06 | Magnetic type displacement sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61134601A (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6341706U (en) * | 1986-09-05 | 1988-03-18 | ||
| JPS63111401A (en) * | 1986-10-29 | 1988-05-16 | Midori Sokki:Kk | Valve position sensor and valve position detecting method |
| JPH0242372A (en) * | 1988-08-02 | 1990-02-13 | Yuichi Moriki | Detection piece of magnetic sensor |
| DE3940894A1 (en) * | 1989-12-11 | 1991-06-13 | Pepperl & Fuchs | POSITION SENSOR |
| US5859531A (en) * | 1996-07-25 | 1999-01-12 | Maurice; Lisa Brackenbury | Displacement apparatus using a magnetic optic sensor and position dependent magnetic field |
| WO2000063640A1 (en) * | 1999-04-17 | 2000-10-26 | Robert Bosch Gmbh | Distance measuring device |
| US6496003B1 (en) * | 1999-08-09 | 2002-12-17 | Hirofumi Okumura | Magnetic displacement detecting device having linear changing magnetic field over the length of the service |
| US6552532B1 (en) * | 1998-07-24 | 2003-04-22 | Next Corporation | Displacement detector with relatively movable magnet and sensor |
| US6653830B2 (en) * | 2001-12-14 | 2003-11-25 | Wabash Technologies, Inc. | Magnetic position sensor having shaped pole pieces to provide a magnetic field having a varying magnetic flux density field strength |
| JP2007326212A (en) * | 2006-06-09 | 2007-12-20 | Snu Precision Co Ltd | Device and method for repairing substrate |
| JP2008286588A (en) * | 2007-05-16 | 2008-11-27 | Alps Electric Co Ltd | Position detection device |
| JP2011080907A (en) * | 2009-10-08 | 2011-04-21 | Tokai Rika Co Ltd | Rotation angle detection device |
| JP2013037042A (en) * | 2011-08-03 | 2013-02-21 | Canon Inc | Optical element driving device and optical instrument |
-
1984
- 1984-12-06 JP JP25649784A patent/JPS61134601A/en active Pending
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6341706U (en) * | 1986-09-05 | 1988-03-18 | ||
| JPS63111401A (en) * | 1986-10-29 | 1988-05-16 | Midori Sokki:Kk | Valve position sensor and valve position detecting method |
| JPH0242372A (en) * | 1988-08-02 | 1990-02-13 | Yuichi Moriki | Detection piece of magnetic sensor |
| DE3940894A1 (en) * | 1989-12-11 | 1991-06-13 | Pepperl & Fuchs | POSITION SENSOR |
| DE3940894C2 (en) * | 1989-12-11 | 1993-04-22 | British Technology Group Ltd., London, Gb | |
| US5859531A (en) * | 1996-07-25 | 1999-01-12 | Maurice; Lisa Brackenbury | Displacement apparatus using a magnetic optic sensor and position dependent magnetic field |
| US6552532B1 (en) * | 1998-07-24 | 2003-04-22 | Next Corporation | Displacement detector with relatively movable magnet and sensor |
| AU758009B2 (en) * | 1999-04-17 | 2003-03-13 | Robert Bosch Gmbh | Distance measuring device |
| WO2000063640A1 (en) * | 1999-04-17 | 2000-10-26 | Robert Bosch Gmbh | Distance measuring device |
| US6586928B1 (en) | 1999-04-17 | 2003-07-01 | Robert Bosch Gmbh | Distance measuring device |
| US6496003B1 (en) * | 1999-08-09 | 2002-12-17 | Hirofumi Okumura | Magnetic displacement detecting device having linear changing magnetic field over the length of the service |
| US6653830B2 (en) * | 2001-12-14 | 2003-11-25 | Wabash Technologies, Inc. | Magnetic position sensor having shaped pole pieces to provide a magnetic field having a varying magnetic flux density field strength |
| JP2007326212A (en) * | 2006-06-09 | 2007-12-20 | Snu Precision Co Ltd | Device and method for repairing substrate |
| JP2008286588A (en) * | 2007-05-16 | 2008-11-27 | Alps Electric Co Ltd | Position detection device |
| JP2011080907A (en) * | 2009-10-08 | 2011-04-21 | Tokai Rika Co Ltd | Rotation angle detection device |
| JP2013037042A (en) * | 2011-08-03 | 2013-02-21 | Canon Inc | Optical element driving device and optical instrument |
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