JPS61133380A - Chemical surface treatment - Google Patents

Chemical surface treatment

Info

Publication number
JPS61133380A
JPS61133380A JP25526184A JP25526184A JPS61133380A JP S61133380 A JPS61133380 A JP S61133380A JP 25526184 A JP25526184 A JP 25526184A JP 25526184 A JP25526184 A JP 25526184A JP S61133380 A JPS61133380 A JP S61133380A
Authority
JP
Japan
Prior art keywords
fixed
materials
shafts
treated
gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25526184A
Other languages
Japanese (ja)
Inventor
Hisashi Tomioka
富岡 久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KATSUKAWA KOGYO KK
Original Assignee
KATSUKAWA KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KATSUKAWA KOGYO KK filed Critical KATSUKAWA KOGYO KK
Priority to JP25526184A priority Critical patent/JPS61133380A/en
Publication of JPS61133380A publication Critical patent/JPS61133380A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1619Apparatus for electroless plating
    • C23C18/1621Protection of inner surfaces of the apparatus
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1619Apparatus for electroless plating
    • C23C18/1628Specific elements or parts of the apparatus
    • C23C18/163Supporting devices for articles to be coated

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Abstract

PURPOSE:To make uniform the contact conditions of a treating liquid with the surfaces of materials to be treated by revolving shafts for attaching materials to be treated which are charged into the electroless plating treating liquid and are attached with the many materials to be treated at specified intervals along the revolving orbit and rotating the shafts for attaching the materials to be treated as well. CONSTITUTION:A frame body 3 of which a vertical piece 3C is extended to the treating liquid 2 in a treating vessel 1 and is fixed there when placed to the top edge of the vessel 1, a driven gear 7, planetary gears 8, 9 and a center gear 10 which are attached to the body 3 and a driving source 4 which is fixed with fixing shafts 13, 14 for holding the materials 11, 12 to be treated on the extension of the axial center of the planetary gears and transmit rotating force to the planetary gear shafts from the air in the upper part of the body 3 are provided. The materials 11, 12 are held and fixed to the shafts 13, 14 and the shafts are driven, by which the materials 11, 12 are brought into contact with the liquid 2 while making the planetary rotation according to the motion of the planetary gears.

Description

【発明の詳細な説明】 産業上の利用分野 未発明は無電解での表面処理、すなわち無電解メッキ処
理、酸洗処理、中和処理、水洗処理等の化学表面処理に
おいて被処理物表面と処理液との接触条件を、ととのえ
改善することにより被処理物の表面処理の均一化を図る
ものである。
[Detailed Description of the Invention] Industrial field of application The invention is applied to the surface of an object to be treated in electroless surface treatment, that is, chemical surface treatment such as electroless plating, pickling, neutralization, and water washing. By improving the contact conditions with the liquid, it is possible to uniformize the surface treatment of the object to be treated.

従来の技術 従来では原動機の駆動力を処理液中に浸漬する被処理物
取付軸に伝えてこれを単に回転させるか、もしくは揺動
させるか、その併用又は液撹拌等が使用されているので
、処理液の被処理物への接触条件が不均一なため製品品
質の均一化は不満足のものである。
Conventional technology Conventionally, the driving force of a prime mover is transmitted to a shaft for attaching a workpiece immersed in a processing liquid, and the shaft is simply rotated or oscillated, or a combination of the two or stirring of the liquid is used. The uniformity of product quality is unsatisfactory because the contact conditions of the processing liquid to the object to be processed are non-uniform.

発明が解決しようとする問題点 被処理物に対する処理液の接触条件(リフレッシュや発
生ガス等を除去する条件)の良好化、製品品質の均一化
を図ることを目的とするものである。
Problems to be Solved by the Invention The invention aims to improve the contact conditions of the processing liquid with the object to be processed (conditions for refreshing, removing generated gas, etc.) and to uniformize product quality.

問題点を解決するための手段 未発明は上記目的を達成するため、処理槽上縁部に装置
した時、垂直片が槽内処理液中まで延長固定される枠体
に遊星歯車装置を組み付け、同装置の′a星歯車軸心の
延長上に被処理物を保持する固定軸を固着し、前記枠体
上部の空中に配設された駆動源の回転力を前記′a星歯
車軸に伝達して、前記固定軸に被処理物を保持固着して
駆動することにより、被処理物が処理液中で前記遊星歯
車の運動に従って、遊星回転(公転及び自転)を伴ない
つ一処理液との接液を充分になされるよう譬構へ したものである。
Means for Solving the Problems In order to achieve the above object, a planetary gear device is assembled to a frame whose vertical piece extends and is fixed into the processing liquid in the tank when the device is installed at the upper edge of the processing tank, A fixed shaft that holds the object to be processed is fixed to an extension of the axis of the 'a star gear of the device, and the rotational force of a drive source disposed in the air above the frame is transmitted to the 'a star gear shaft. By holding and fixing the object to the fixed shaft and driving it, the object to be processed is rotated in the processing liquid with planetary rotation (revolution and rotation) according to the movement of the planetary gear. The structure is designed to ensure that the liquid comes in sufficient contact with the liquid.

第1実施例(第1図乃至第4図参照) 第1図(1部縦断側面図)、第2図(1部縦断□正面図
)、第3図は被処理物の取付拡張軸への固定を説明中る
ための図面である。
1st Embodiment (See Figures 1 to 4) Figure 1 (part 1 longitudinal side view), Figure 2 (part 1 longitudinal □ front view), and Figure 3 show how the workpiece is attached to the expansion shaft. It is a drawing for explaining fixation.

第1図、第2図において−1は無電解メッキ用処理槽、
2はメッキ処理液(薬液)、3は処理槽上縁部に装置さ
れる枠体で、上部の槽上縁部には一対の装置部材3a(
3bはフック)を有し、この両装置部材3a間の一側に
は垂直板3cが固定され、処理液2中に没入している。
In Figures 1 and 2, -1 is an electroless plating treatment tank;
2 is a plating solution (chemical solution), 3 is a frame installed at the upper edge of the processing tank, and a pair of device members 3a (
3b has a hook), and a vertical plate 3c is fixed to one side between both device members 3a, and is immersed in the processing liquid 2.

前記垂直板3C上方の装置部材3aの一側部に配置した
駆動源4の回転駆動力は駆動ギヤー5を介して垂直板3
Cの上部に回転可能に軸着した中間ギヤー6と、これと
噛み合う従動ギヤー7に伝達される。
The rotational driving force of a drive source 4 disposed on one side of the device member 3a above the vertical plate 3C is transmitted to the vertical plate 3 via a drive gear 5.
The signal is transmitted to an intermediate gear 6 rotatably attached to the upper part of C and a driven gear 7 that meshes with the intermediate gear 6.

前記従動ギヤ−7側面の円形軌道位置には、第1の遊星
ギヤー8と、第2の遊星ギヤー9が回転可能に軸着され
ていると共に 前記第1.第2の遊星ギヤー8,9間に
は両者と夫々噛み合うセンターギヤー10が配置されて
いる。同センターギヤーlOは枠体3の垂直板3c(処
理液?中に没入)の下部に取付軸を介して固定されてお
り、同取付軸の垂直板3c側の部分に前記従動ギヤー7
が回転可能に取付けられている。
A first planetary gear 8 and a second planetary gear 9 are rotatably pivotally attached to a circular orbit position on the side surface of the driven gear 7. A center gear 10 is disposed between the second planetary gears 8 and 9 and meshes with the second planetary gears 8 and 9, respectively. The center gear 1O is fixed to the lower part of the vertical plate 3c (immersed in the processing liquid) of the frame 3 via a mounting shaft, and the driven gear 7 is attached to the part of the mounting shaft on the vertical plate 3c side.
is rotatably mounted.

前記各遊星ギヤー8.9には被処理物11゜12を相互
間に一定間隔をおいて垂直方向に取付は固定する拡張軸
13.14が水平方向に伸設されており、被処理物11
.12は処理液z中に浸漬されている。拡張軸13.1
4は第3図に示すごとく本体aと摺動片すよりなり、そ
の中間にクサビCを挿入可能になっている。被処理物1
1゜12は本体a、摺動片すの表面に一定間隔をおいて
設けられた多数の凹部に中心孔を嵌入したのち護 、クサビCを両a、b間に圧入すれば、本体a摺動片す
を押し開き、従って各被処理物11 、12は拡張軸1
3.14に取付けられ9る。dはクサビ用ストッパーで
ある。
Each of the planetary gears 8.9 has extended shafts 13.14 extending in the horizontal direction for mounting and fixing the objects 11 and 12 to be processed vertically at regular intervals.
.. 12 is immersed in processing liquid z. Expansion axis 13.1
4 consists of a main body a and a sliding piece, as shown in FIG. 3, and a wedge C can be inserted between them. Processed object 1
1゜12 is the main body a, by inserting the center hole into a number of recesses provided at regular intervals on the surface of the sliding piece, and then press-fitting the wedge C between both a and b. The moving pieces are pushed open, so each workpiece 11 and 12 is moved to the expansion shaft 1.
3.14 attached to 9. d is a wedge stopper.

作用を説明すると、原動源4による回転駆動力は駆動ギ
ヤー5を介して中間ギヤー6を回転すると共に、同ギヤ
ー6と噛み合う従動ギヤー7が回転する。同従動ギヤー
7の回転により、その側面の円形軌道位置に夫々回転可
能に軸着した第1゜第2の遊星ギヤー8,9は、枠体3
の垂直板3Cに取付軸を介して固着したセンターギヤー
10の歯と噛み合いながら、同センターギヤー10の取
付軸心を中心として回転(公転)すると共に、これに伴
い前記各遊星ギヤー8.9は夫々同ギヤー自体の取付軸
心を中心として自転する。即ち前記第1.第2の遊星ギ
ヤー8.9の公転(センターギヤー10の取付軸心を中
心としての公転)により、各遊星ギヤー8,9から伸設
した拡張軸13.14、これらに夫々取付けられた被処
理物11.12が液中において公転すると共に、自転す
ることになる。上記のごと〈被処理物を自転させながら
公転させるためにはギヤーの噛合、回転に限らず、第2
実施例(第4図)のごとくプリーとベルトの使用でも可
能である。
To explain the operation, the rotational driving force from the driving source 4 rotates the intermediate gear 6 via the driving gear 5, and the driven gear 7 that meshes with the gear 6 rotates. As the driven gear 7 rotates, the first and second planetary gears 8 and 9, which are rotatably pivoted at circular orbit positions on the side surfaces of the driven gear 7, are moved to the frame 3.
The planetary gears 8.9 rotate (revolution) around the mounting axis of the center gear 10 while meshing with the teeth of the center gear 10 fixed to the vertical plate 3C via the mounting shaft. Each gear rotates around its own axis. That is, the above-mentioned No. 1. Due to the revolution of the second planet gear 8.9 (revolution around the attachment axis of the center gear 10), the expansion shafts 13. Objects 11 and 12 revolve in the liquid and also rotate. As mentioned above, in order to make the object to be processed revolve while rotating, it is necessary not only to mesh and rotate the gears, but also to
It is also possible to use pulleys and belts as in the embodiment (FIG. 4).

即ち、原動源4の回転力は駆動プリー20からベルト2
1を介して垂直板3Cに回転可能に取付けられた従動プ
リー22を回転させ、その回転は同微動ブリー22側面
における軸心を中心とする円形軌道に設けられ、適例へ
突設させた軸23゜24の側面に被処理物取付けの拡張
軸25.26を固定したプリー27.28が夫々回転可
能に取付けられている。又前記従動プリー22の垂直片
3cへの取付軸の延長部分には、一対のプリー29.3
0が固着されており、前者固定プリー29は前記回転可
能プリー27と 後者固定プリー30は回転可能のプリ
ー28と夫々ベルト31.32で連結されている。従っ
て駆動a4の回転は駆動プリー20を介して従動プリー
22を回転し、その回転により円形軌道位置に固定した
公転する。又従動プリニ22の回転により一対の固定ブ
リー29.30が回転し、これに伴ない各ベルh31.
32を介して側面に夫々被処理物取付@25,26を固
着したプリー27.28が回転するので、取付軸25.
26に取付けた被処理物は公転用軸23.24を軸心と
して自転することになる。
That is, the rotational force of the driving source 4 is transferred from the driving pulley 20 to the belt 2.
1, the driven pulley 22 rotatably attached to the vertical plate 3C is rotated. Pulleys 27 and 28 to which expansion shafts 25 and 26 for attaching objects to be treated are fixed are rotatably attached to the sides of 23° and 24, respectively. Further, a pair of pulleys 29.3 are provided at the extension of the mounting shaft of the driven pulley 22 to the vertical piece 3c.
The former fixed pulley 29 is connected to the rotatable pulley 27 and the latter fixed pulley 30 is connected to the rotatable pulley 28 by belts 31 and 32, respectively. Therefore, the rotation of the driving pulley a4 rotates the driven pulley 22 via the driving pulley 20, and the rotation causes the driven pulley 22 to revolve in a fixed circular orbit position. Further, the pair of fixed bullies 29, 30 rotates due to the rotation of the driven prini 22, and each bell h31.
As the pulleys 27 and 28 to which the workpiece attachments 25 and 26 are fixed to the side surfaces via the shafts 25 and 32 rotate, the mounting shafts 25 and 28 rotate.
The workpiece attached to 26 rotates around the revolution shafts 23 and 24.

作用効果 大発明においては無電解メー、キ処理液中に没入し且つ
多数の被処理物を一定間隔を存して取付けた被処理物取
付軸を公転軌道に沿って公転すると共に、被処理物取付
軸も自転するようになっているので、従来のものに比し
被処理物表面に処理液の接触条件を均一化し、従って製
品品質を向上することが出来る。
In the invention with great effects, the workpiece mounting shaft, which is immersed in the electroless treatment liquid and has a large number of workpieces attached at regular intervals, revolves along an orbit, and the workpieces are Since the mounting shaft is also designed to rotate, the contact conditions of the processing liquid on the surface of the object to be processed can be made more uniform compared to conventional ones, and therefore the product quality can be improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図ないし第3図は本発明方法を実施する第1の実施
例を示し、第1図は1部縦断側面図、第2図は1部縦縦
断面図、第3図は被処理物取付の拡張軸の1部側断面図
、第4図は第2実施例の側面図である。 3:槽上鏝部装置にされる枠体、3aニ一対の装置部材
、3C:垂直板、4:WIA動源、5:駆動ギヤー、6
:中間ギヤー、7:従動ギヤー、8:第1のが星ギヤー
、9:第2の遊星ギヤー、【0:センターギヤー、11
.12:被処理物、13゜14:拡張軸、20:駆動プ
リー、22:従動プリー、23.24:従動プリー側面
の円形軌道に固定の軸 27.28:側面に被処理物取
付軸25.26を固定した回転可能のプリー、29゜3
0:従動プリー22の軸延長部に固定のプリー、21.
31,32:ベルト。 特許出願人  勝川工業株式会社 代  理  人   鈴  木  惟  司矢    
津    浩 ゆ 第2図 第4図 手続補正書 昭和60年1月If日 昭和59年特許H第255261号 ?8発明の名称 化学表面処理方法 3、補正をする者 事件との関係  特許出願人 住所 〒103東京都中央区日大橋本石町4丁目4番地 名称勝川工業株式会社 4、代 理 入 住所 東京都渋谷区恵比寿西−丁目2番1−911号図
面第4図は図示と誤りがありますので、これを別紙の通
りに補正します。
1 to 3 show a first embodiment of the method of the present invention, in which FIG. 1 is a partially vertical side view, FIG. 2 is a partially longitudinal sectional view, and FIG. 3 is a workpiece. FIG. 4 is a side sectional view of a part of the mounting expansion shaft, and FIG. 4 is a side view of the second embodiment. 3: Frame body to be used as a tank top device, 3a and pair of device members, 3C: Vertical plate, 4: WIA power source, 5: Drive gear, 6
: intermediate gear, 7: driven gear, 8: first star gear, 9: second planetary gear, [0: center gear, 11
.. 12: Workpiece, 13° 14: Expansion shaft, 20: Drive pulley, 22: Driven pulley, 23. 24: Axis fixed to circular orbit on side of driven pulley 27. 28: Workpiece mounting shaft on side 25. Rotatable pulley with fixed 26, 29°3
0: pulley fixed to the shaft extension of the driven pulley 22, 21.
31, 32: Belt. Patent applicant: Katsukawa Kogyo Co., Ltd. Agent: Shiya Suzuki
Hirotsu Tsu Figure 2 Figure 4 Procedural Amendment January 1985 If Date 1988 Patent No. H 255261? 8. Name of the invention Chemical surface treatment method 3. Relationship with the case of the person making the amendment Patent applicant address: 4-4 Nihonohashi Honseki-cho, Chuo-ku, Tokyo 103 Name: Katsukawa Kogyo Co., Ltd. 4, Agent Address: Shibuya, Tokyo Ward Ebisu Nishi-chome 2-1-911 Drawing 4 contains an error in illustration, so this has been corrected as shown in the attached sheet.

Claims (1)

【特許請求の範囲】[Claims] 処理槽上縁部に装置した時、垂直片が槽内処理液中まで
延長固定される枠体と、同枠体に組付けられた遊星歯車
装置と、同装置の遊星歯車軸心の延長上に被処理物を保
持する固定軸を固着し、前記枠体上部の空中から前記遊
星歯車軸に回転力を伝達する駆動源とを有し、前記固定
軸に被処理物を保持固着して駆動することにより被処理
物が処理液中で前記遊星歯車の運動に従って遊星回転を
伴ないつゝ処理液との接液がなされるようにしたことを
特徴とする化学表面処理方法。
When installed at the upper edge of the processing tank, the vertical piece is extended and fixed into the processing liquid in the tank, a planetary gear device assembled to the frame, and an extension of the planetary gear axis of the device. A fixed shaft for holding the workpiece is fixed to the fixed shaft, and a drive source transmits rotational force from the air above the frame to the planetary gear shaft, and the workpiece is held and fixed to the fixed shaft and driven. A chemical surface treatment method, characterized in that the object to be treated is brought into contact with the treatment solution while the object to be treated undergoes planetary rotation in the treatment solution according to the movement of the planetary gear.
JP25526184A 1984-12-03 1984-12-03 Chemical surface treatment Pending JPS61133380A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25526184A JPS61133380A (en) 1984-12-03 1984-12-03 Chemical surface treatment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25526184A JPS61133380A (en) 1984-12-03 1984-12-03 Chemical surface treatment

Publications (1)

Publication Number Publication Date
JPS61133380A true JPS61133380A (en) 1986-06-20

Family

ID=17276287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25526184A Pending JPS61133380A (en) 1984-12-03 1984-12-03 Chemical surface treatment

Country Status (1)

Country Link
JP (1) JPS61133380A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6286167A (en) * 1985-07-12 1987-04-20 Furukawa Electric Co Ltd:The Electroless plating device
KR20020092642A (en) * 2001-06-05 2002-12-12 주식회사 정우이지텍 The method and an+ apparatus plating a shaft
JP2005336612A (en) * 2004-05-26 2005-12-08 Komag Inc Method and apparatus for applying voltage to substrate during plating

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916342U (en) * 1972-05-16 1974-02-12
JPS6152367A (en) * 1984-08-20 1986-03-15 C Uyemura & Co Ltd Plating device for plate work

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916342U (en) * 1972-05-16 1974-02-12
JPS6152367A (en) * 1984-08-20 1986-03-15 C Uyemura & Co Ltd Plating device for plate work

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6286167A (en) * 1985-07-12 1987-04-20 Furukawa Electric Co Ltd:The Electroless plating device
KR20020092642A (en) * 2001-06-05 2002-12-12 주식회사 정우이지텍 The method and an+ apparatus plating a shaft
JP2005336612A (en) * 2004-05-26 2005-12-08 Komag Inc Method and apparatus for applying voltage to substrate during plating

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