JPS61133315A - Heat treatment device - Google Patents

Abstract

PURPOSE:To reduce the size of a heating device without decreasing heating effect by heating a work, which is subjected to plasma etching, by a hot plate and hot air while changing the direction thereof in the heating device. CONSTITUTION:The work 15 subjected to plasma etching is carried into the heating device 1 through an inlet 4 thereof and is imposed on two pieces of endless belts 6, 7 fitted into channels 11 of the heating plate 2. The work 15 moves forward as the belts 6, 7 advances. The moving work stops by colliding against a guide 12 at the end of the plate 2. The advancing direction of the belts 6, 7 is changed in a perpendicular direction by direction changing guides 8, 8, by which the work 15 is moved toward an outlet 5. Projections are projected through holes 13 for putting in and out of the projections at this time to stop the moving work. The work 15 is heated on the heating plate 2 during this period and the hot air is blown from above to heat the work 15 to remove the gas sticking to the work; thereafter, the projections are lowered into the holes 13 and the work is taken out of the outlet 5 to the outside of the heating device.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention is applied to a heat treatment apparatus for removing the influence of the etching gas on the workpiece after the plasma etching process due to adhesion, adsorption, etc. of the workpiece. 1
In particular, when transferring a workpiece to a heating plate and bringing it into contact with the heating plate to transfer heat, it is possible to shorten the transport distance of the workpiece and
The present invention relates to a heat treatment apparatus that performs reliable heat treatment using individual drive sources.

[Prior art and its problems]

In recent years, in the manufacturing process of integrated circuits called ICs, I
With the increase in the degree of integration and speed of C, there is a strong demand for microfabrication of elements.

For this reason, a reactive ion etching method is used that can achieve a vertical etched profile without undercuts.

For example, when etching aluminum, which is often used as an electrode wiring material, a chlorine-based gas is used, and a workpiece is introduced into a reaction vessel and a glow discharge is generated in this reaction gas atmosphere under reduced pressure. The etching progresses by promoting the reaction between the material to be etched and the reactive gas, and converting the material to be etched into a volatile compound.

When this etching process is completed and the workpiece is taken out into the atmosphere from the reaction chamber, the gas components used in the reaction are attached and adsorbed on the workpiece, and react with water vapor in the atmosphere, leaving the workpiece to be etched. It starts to react with wiring patterns etc. formed of the material, causing 1 giwA of wiring and short circuits.

For this reason, it is necessary to immediately remove the reactive gas components adhering to the workpiece after the etching process is completed, and methods such as blowing hot air and heating are extremely effective. However, there were drawbacks such as the long heating time, poor temperature distribution, and differences in treatment effects, as well as the time it took to start the heat treatment after etching.

Therefore, a heat treatment device has been devised that is directly connected to the etching treatment device, immediately carried into the heat treatment device using a belt, and heat-treated immediately using a constantly heated heating plate and hot air generator. Since the heat treatment apparatus is transported, the heat treatment apparatus becomes longer in the transport direction and the volume inside the heat treatment chamber becomes larger, resulting in poor heating efficiency and an increase in the equipment area.

Furthermore, when connected to an etching processing apparatus, various disadvantages arise, such as a large overall occupied area and large operating area.

In order to overcome this drawback, a transport mechanism was devised that changes the transport direction before carrying the workpiece into the heat treatment equipment, but the time it takes to start heat treatment becomes longer due to the additional transport mechanism, and corrosion progresses during that time. In addition, the introduction of a complicated transport mechanism into the heat treatment chamber increases heat dispersion, reduces the heating effect, and causes malfunction due to high temperature, resulting in a lack of reliability. was there.

[Purpose of the invention]

In view of this, the present invention provides a heat treatment method in which a workpiece is immediately introduced into a heat treatment apparatus after the etching process is completed, heat treatment is performed while changing the transport direction of the workpiece within the apparatus, and the workpiece can be carried out in any direction. provide the equipment,
This was done for the purpose of reducing the width of the device compared to the conventional one and driving the conveyance with one drive source.

(Summary of the Invention) In order to achieve the above object, the present invention provides a heat treatment apparatus that heats a workpiece in a case having an inlet and an outlet, and a workpiece conveyance direction changing mechanism is provided on a heating plate provided in the case. It is characterized by the fact that it is equipped with

(Embodiments of the Invention) The present invention will be described below with reference to embodiments shown in FIGS. 1 to 4.

The heat treatment apparatus according to the present invention includes a case 1, a heating plate 2 provided in the case 1, a workpiece conveyance direction changing mechanism 3, and the like.

The case 1 is an outer wall component, and is provided with a workpiece loading port 4 and a loading port 5 perpendicular to the loading port 4. A rectangular heating plate 2 is provided for leading to the export port 5.

The workpiece conveyance direction conversion mechanism 3 includes an endless belt 6 having a circular cross section, an endless belt 7 shorter than the endless belt 6, and a pair of direction conversion guides 8.8 for changing the moving direction of both belts 6.7. , a drive shaft 9 directly connected to a drive source (not shown), and a tension b-510 that presses the drive shaft 9 and the endless belt 6.7 together.

The direction change guide 8 is for changing the direction of the endless belt 6°7, and the vertical portion has a small diameter.
The head portion 8b, which is the horizontal portion, has a large diameter, and the endless belt 6.7 extends in the circumferential direction.
In order to support the belt 6.7 and to place and convey the workpiece on the belt 6.7, a concave portion having an radius equal to the radius of the endless belt 6.7 is formed around the entire circumference, and the upper surface of the head 8b is is lower than the height of the belt 6.7 when the belt 6.7 is wound. And this head 8
In order to prevent the belt 6.7 from coming off the head 8b when the belt 6.7 is driven, as shown in FIG.
It should be 3 or more.

On the upper surface of the heating plate 2, two large and small holes are drilled downward in two stages, upper and lower, for accommodating the direction change guide 8°8, and the lower small hole accommodates the direction change guide 8. The supporting portion 8a is rotatably fitted into the upper large hole, and the head 8b is fitted into the upper large hole with an appropriate gap.

In addition, in order to accommodate the endless belt 6.7 in contact with the direction changing guide 8.8, the direction of the endless belt 6.7 entered from the loading port 4 is changed at right angles by the direction changing guide 8, and the direction is changed at right angles to the loading port. A pair of grooves 11.11 at a predetermined interval are provided in parallel and bent toward the loading port 5. A projecting work guide 12 is provided on the end surface of the side heating plate 2.

The upper surface of the heating plate 2 is provided with holes 13, 13 through which protrusions can temporarily stop the progressing workpiece.

The endless belt 6.7 is fitted into the groove 11.11 provided on the heating plate 2 in order to heat the work carried into the case 1 from the carry-in port 4 and then convey it to the carry-out port 5. The longer endless belt 6 is arranged at the back when viewed from the carry-in port 4, and the shorter S-end belt 7 is arranged at the front.

When fitted, the upper surface of the endless belt 6.7 is slightly higher than the upper surface of the heating plate 2, so that the workpiece is placed and supported on the endless belt 6.7 on the heating plate 2. It is now possible to move around.

In this case, the upper surface of the head 8b of the direction conversion guide 8 is also desirably flush with the upper surface of the heating plate 2.

As mentioned above, the workpiece entrance 4 is connected to the groove 11 of the heating plate 2.
The endless belts 6.7 that have been traveling from the direction are each changed in direction at right angles by the direction change guides 8.8, and when they reach the end face of the heating plate 2 in the direction of the outlet 5, they are bent downward at right angles, and then bent at right angles. Change direction and enter case 1 loading port 4
facing side, overlapping vertically, sandwiched between the drive shaft 9 and the tension roller 10, which are both provided at the corner of the case 1, extending toward the loading port 4 within the case 1, and near the loading port 4, The shorter endless belt 7 rises, and the longer endless belt 6 extends forward a predetermined distance, then rises and enters the groove 11 of the heating plate 2 at the same time again from the same rising height, so that they are at right angles. It is shaped to bend.

Therefore, the endless belts 6.7, which rotate as if being unwound from one drive e-wheel 9, simultaneously move on the heating plate 2 and return to the drive shaft 9, where they are unwound forward again. .

Here, each belt 6.7 is provided with a grooved pulley 14 of the same size at the part where it bends at right angles, so that it can move smoothly at right angles.

Although the present invention has been described using two endless belts, the number of belts may be two or more as necessary. Furthermore, although a structure has been described in which the conversion angle is 90° with the unloading direction being perpendicular to the loading direction of the workpiece, it goes without saying that it is not necessarily limited to 90'.

Next, the operation of the present invention will be explained.

The workpiece 15 carried into the case 1 through the carry-in port 4 is placed on two endless belts 6.7 fitted in the grooves 11 of the heating plate 2, and as the belts 6.7 move forward, Although it moves forward, it comes into contact with the guide 12 at the end of the heating plate 2 and is prevented from moving forward, and then moves toward the exit 5 on the endless belt 6.7, which is turned in the right angle direction by the direction changing guides 8, 8. and move.

In order to temporarily stop the workpiece 15 at this time, a protrusion is protruded from the protrusion projection hole 13, and the moving workpiece 15 stops when it comes into contact with the protrusion.

While the workpiece 15 is stopped, the workpiece 15 is heated on the heating plate 2, and hot air is blown from above using a hot air generator (not shown) to heat the workpiece 15. When the heat-treated workpiece 15 is lowered into the hole 13, the workpiece 15 is advanced toward the outlet 5 by the moving endless belt 6.7.

In this embodiment, two workpieces 15.degree. 15 can be heat-treated on the heating plate 2 at the same time, but by making the heating plate 2 longer, it is also possible to heat-treat even more workpieces at the same time. Moreover, in this case, the area of the heating plate 2 may be the minimum necessary for carrying out the heat treatment, as shown in FIG.

The endless belt 6 that has finished conveying the workpiece 15 in this way
．． 7 descends from the heating plate 2, is held by the drive @ 9 and the tension roller 10 at the same time, is forced forward, rises again, returns to the heating plate 2, and is loaded with the workpieces that are being sent without interruption one after another. Heat treatment and transportation are repeated.

〔Effect of the invention〕

As explained above, the present invention is equipped with a single drive source, a plurality of conveyance tools, and a direction change guide, so that the conveyance direction can be changed at the same time as the heat treatment on the heating plate. Alternatively, it is possible to reduce the area to the necessary minimum, and it has excellent effects such as reducing the heating effect due to the increase in size and eliminating malfunctions caused by high temperatures. It is.

[Brief explanation of drawings]

Fig. 1 is a plan view of the heat treatment apparatus according to the present invention, Fig. 2 is a perspective view of the part shown in Fig. 1 excluding the case, and Fig. 3 is a structural diagram of the direction conversion guide part used in Fig. 1. , FIG. 4 is an explanatory diagram showing the contact area between the direction conversion guide and the endless belt and the frequency of conveyance troubles. DESCRIPTION OF SYMBOLS 1... Case, 2... Heating plate, 3... Conveyance direction conversion mechanism, 4... Carrying inlet, 5... Carrying out outlet, 6.7...
- Endless belt, 8... Direction conversion guide, 9... Drive shaft, 10... Tension roller, 15... Work. 6 Applicant's representative Ino Mata
Reto Mamoru instead of Kiyoshi 3rd figure? ♂To Hi1

Claims (1)

[Scope of Claims] 1. A heat treatment apparatus for heating a workpiece in a case having an inlet and an outlet, the heat treatment apparatus comprising a heating plate provided in the case and a mechanism for changing the direction of conveyance of the workpiece. 2. The heat treatment apparatus according to claim 1, wherein the conveyance direction changing mechanism includes a plurality of conveyance tools and one drive source. 3. The plurality of conveyance tools are equipped with a plurality of endless belts and a rotatable direction change guide, and the area of contact between the endless belt and the head of the direction change guide is at least 1/1/2 of the surface area of the endless belt. 3. The heat treatment apparatus according to claim 2, wherein the number is 3 or more.