JPS6113178B2 - - Google Patents
Info
- Publication number
- JPS6113178B2 JPS6113178B2 JP50151625A JP15162575A JPS6113178B2 JP S6113178 B2 JPS6113178 B2 JP S6113178B2 JP 50151625 A JP50151625 A JP 50151625A JP 15162575 A JP15162575 A JP 15162575A JP S6113178 B2 JPS6113178 B2 JP S6113178B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- humidity
- lithium chloride
- detector
- heating electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 15
- 239000012777 electrically insulating material Substances 0.000 claims description 2
- 239000003779 heat-resistant material Substances 0.000 claims description 2
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 33
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 230000007423 decrease Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15162575A JPS5275388A (en) | 1975-12-18 | 1975-12-18 | Humidity detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15162575A JPS5275388A (en) | 1975-12-18 | 1975-12-18 | Humidity detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5275388A JPS5275388A (en) | 1977-06-24 |
| JPS6113178B2 true JPS6113178B2 (US06486227-20021126-C00005.png) | 1986-04-11 |
Family
ID=15522622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15162575A Granted JPS5275388A (en) | 1975-12-18 | 1975-12-18 | Humidity detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5275388A (US06486227-20021126-C00005.png) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3231534A1 (de) * | 1982-08-25 | 1984-03-01 | Endress Hauser Gmbh Co | Taupunktmessgeraet |
| JPS6063453A (ja) * | 1983-09-16 | 1985-04-11 | Yamatake Honeywell Co Ltd | 感湿素子 |
| JPS6063452A (ja) * | 1983-09-16 | 1985-04-11 | Yamatake Honeywell Co Ltd | 感湿素子 |
| DE3409401A1 (de) * | 1984-03-14 | 1985-09-19 | Winfried Dr.-Ing. 7500 Karlsruhe Lück | Wasserdampfdruckkompensierende feuchtemesseinrichtung |
| US5364185A (en) * | 1993-04-16 | 1994-11-15 | California Institute Of Technology | High performance miniature hygrometer and method thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4935838U (US06486227-20021126-C00005.png) * | 1972-06-29 | 1974-03-29 |
-
1975
- 1975-12-18 JP JP15162575A patent/JPS5275388A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4935838U (US06486227-20021126-C00005.png) * | 1972-06-29 | 1974-03-29 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5275388A (en) | 1977-06-24 |
