JPS61128709U - - Google Patents
Info
- Publication number
- JPS61128709U JPS61128709U JP1157685U JP1157685U JPS61128709U JP S61128709 U JPS61128709 U JP S61128709U JP 1157685 U JP1157685 U JP 1157685U JP 1157685 U JP1157685 U JP 1157685U JP S61128709 U JPS61128709 U JP S61128709U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- gas
- mass flow
- rate control
- mixed gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003085 diluting agent Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007865 diluting Methods 0.000 description 1
Landscapes
- Control Of Non-Electrical Variables (AREA)
Description
第１図は本考案の一実施例の構成を示す回路図
、第２図は第１図に示す装置に組み込まれている
マスフローコントローラの構成を説明するための
概念図、である。
１……導入ガスボンベ、２……希釈用ガスボケ
ベ、３……ガス混合室、４，５，８……マスフロ
ーコントローラ。
FIG. 1 is a circuit diagram showing the configuration of an embodiment of the present invention, and FIG. 2 is a conceptual diagram for explaining the configuration of a mass flow controller incorporated in the device shown in FIG. 1. 1... Introducing gas cylinder, 2... Diluting gas tank, 3... Gas mixing chamber, 4, 5, 8... Mass flow controller.
Claims (1)
、該混合回路からの混合ガスの質量流量を制御す
る質量流量制御回路と、からなる混合ガスの流量
制御装置。 A mixed gas flow rate control device comprising a mixing circuit that mixes an introduced gas and a diluent gas, and a mass flow rate control circuit that controls the mass flow rate of the mixed gas from the mixing circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985011576U JPH0530168Y2 (en) | 1985-01-30 | 1985-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985011576U JPH0530168Y2 (en) | 1985-01-30 | 1985-01-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61128709U true JPS61128709U (en) | 1986-08-12 |
| JPH0530168Y2 JPH0530168Y2 (en) | 1993-08-02 |
Family
ID=30493824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985011576U Expired - Lifetime JPH0530168Y2 (en) | 1985-01-30 | 1985-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530168Y2 (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5287889A (en) * | 1975-11-27 | 1977-07-22 | Draegerwerk Ag | Respiration protective* diving* medical and experimental gas mixer |
| JPS52137764A (en) * | 1976-05-14 | 1977-11-17 | Chiyoda Chem Eng & Constr Co Ltd | Fuel gas mixing system |
| JPS563978A (en) * | 1979-06-25 | 1981-01-16 | Akira Takayama | Semiconductor fuel cell using transistor effect |
-
1985
- 1985-01-30 JP JP1985011576U patent/JPH0530168Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5287889A (en) * | 1975-11-27 | 1977-07-22 | Draegerwerk Ag | Respiration protective* diving* medical and experimental gas mixer |
| JPS52137764A (en) * | 1976-05-14 | 1977-11-17 | Chiyoda Chem Eng & Constr Co Ltd | Fuel gas mixing system |
| JPS563978A (en) * | 1979-06-25 | 1981-01-16 | Akira Takayama | Semiconductor fuel cell using transistor effect |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0530168Y2 (en) | 1993-08-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS61128709U (en) | ||
| JPH0252039U (en) | ||
| JPS5843417U (en) | Home storage liquid particulate oxygen gas inhalation device | |
| JPH0359040U (en) | ||
| JPS5837949U (en) | gas engine fuel mixer | |
| JPS6452019U (en) | ||
| JPH0385150U (en) | ||
| JPH0359467U (en) | ||
| JPS6095358U (en) | window washer device | |
| JPH0378024U (en) | ||
| JPS60118493U (en) | Belt type nitrogen atmosphere furnace | |
| JPS61200213U (en) | ||
| JPS63156066U (en) | ||
| JPS63121231U (en) | ||
| JPS6354937U (en) | ||
| JPS6330725U (en) | ||
| JPS6257764U (en) | ||
| JPS58120436U (en) | Submerged heating device | |
| JPS6432500U (en) | ||
| JPS6433566U (en) | ||
| JPS62121607U (en) | ||
| JPH01128821U (en) | ||
| JPS6413426U (en) | ||
| JPS628546U (en) | ||
| JPS6234386U (en) |